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3689766
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Information
Patent Grant
3689766
References
Source
Patent Number
3,689,766
Date Filed
Not available
Date Issued
Tuesday, September 5, 1972
52 years ago
CPC
B01D59/48 - using electrostatic and magnetic fields
H01J49/022 - Circuit arrangements
H01J49/025 - Detectors specially adapted to particle spectrometers
Y10S438/961 - Ion beam source and generation
US Classifications
250 - Radiant energy
313 - Electric lamp and discharge devices
438 - Semiconductor device manufacturing: process
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