3745043

Information

• Patent Grant
• 3745043

• References
• Source

• Patent Number

  3,745,043

• Date Filed

  Not available

• Date Issued

  Tuesday, July 10, 1973
  51 years ago

• CPC

  • C23C16/22 - characterised by the deposition of inorganic material, other than metallic material
  • C23C16/00 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
  • Y10S148/006 - Apparatus
  • Y10S148/007 - Autodoping
  • Y10S148/027 - Dichlorosilane
  • Y10S148/118 - Oxide films

• US Classifications

  • 423 - Chemistry of inorganic compounds
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process