3745358

Information

• Patent Grant
• 3745358

• References
• Source

• Patent Number

  3,745,358

• Date Filed

  Not available

• Date Issued

  Tuesday, July 10, 1973
  51 years ago

• CPC

  • H01J37/3045 - Object or beam position registration
  • H01J29/54 - Arrangements for centring ray or beam
  • Y10S438/949 - Energy beam treating radiation resist on semiconductor

• US Classifications

  • 250 - Radiant energy
  • 430 - Radiation imagery chemistry: process, composition, or product thereof
  • 438 - Semiconductor device manufacturing: process