3752711

Information

• Patent Grant
• 3752711

• References
• Source

• Patent Number

  3,752,711

• Date Filed

  Not available

• Date Issued

  Tuesday, August 14, 1973
  51 years ago

• CPC

  • H01L21/76221 - with a plurality of successive local oxidation steps
  • H01L23/291 - Oxides or nitrides or carbides
  • H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
  • Y10S148/053 - Field effect transistors fets
  • Y10S148/103 - Mask, dual function
  • Y10S148/105 - Masks, metal
  • Y10S148/117 - Oxidation, selective

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices