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3772519
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Information
Patent Grant
3772519
References
Source
Patent Number
3,772,519
Date Filed
Not available
Date Issued
Tuesday, November 13, 1973
51 years ago
CPC
H01J49/162 - Direct photo-ionisation
B01D59/34 - Separation by photochemical methods
B01D59/48 - using electrostatic and magnetic fields
B01D59/50 - Separation involving two or more processes covered by different groups selected from groups B01D59/02, B01D59/10, B01D59/20, B01D59/22, B01D59/28, B01D59/34, B01D59/36, B01D59/38, B01D59/44
H01J37/3053 - for evaporating or etching
H01J49/147 - with electrons
H01S3/0007 - Applications not otherwise provided for
H05H1/00 - Generating plasma Handling plasma
US Classifications
250 - Radiant energy
204 - Chemistry: electrical and wave energy
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