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3795554
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Patent Grant
3795554
References
Source
Patent Number
3,795,554
Date Filed
Not available
Date Issued
Tuesday, March 5, 1974
50 years ago
CPC
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
C30B29/06 - Silicon
C30B31/06 - by contacting with diffusion material in the gaseous state
C30B31/185 - Pattern diffusion
H01L29/00 - Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier
Y10S252/951 - for vapor transport
Y10S438/923 - Diffusion through a layer
US Classifications
438 - Semiconductor device manufacturing: process
252 - Compositions
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