3798061

Information

• Patent Grant
• 3798061

• References
• Source

• Patent Number

  3,798,061

• Date Filed

  Not available

• Date Issued

  Tuesday, March 19, 1974
  50 years ago

• CPC

  • H01L21/3185 - of siliconnitrides
  • Y10S148/043 - Dual dielectric
  • Y10S148/106 - Masks, special
  • Y10S148/112 - Nitridation, direct, of silicon
  • Y10S148/113 - Nitrides of boron or aluminum or gallium
  • Y10S148/114 - Nitrides of silicon

• US Classifications

  • 427 - Coating processes
  • 148 - Metal treatment
  • 257 - Active solid-state devices