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3804682
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Information
Patent Grant
3804682
References
Source
Patent Number
3,804,682
Date Filed
Not available
Date Issued
Tuesday, April 16, 1974
50 years ago
CPC
C30B13/12 - in the gaseous or vapour state
Y10S117/906 - Special atmosphere other than vacuum or inert
Y10S148/041 - Doping control in crystal growth
Y10S148/107 - Melt
Y10S438/925 - Fluid growth doping control
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
252 - Compositions
438 - Semiconductor device manufacturing: process
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