3812947

Information

• Patent Grant
• 3812947

• References
• Source

• Patent Number

  3,812,947

• Date Filed

  Not available

• Date Issued

  Tuesday, May 28, 1974
  50 years ago

• CPC

  • B23Q41/06 - Features relating to organisation of working of machines
  • H01L21/67276 - Production flow monitoring
  • H01L21/67712 - the substrate being handled substantially vertically
  • H01L21/6776 - Continuous loading and unloading into and out of a processing chamber
  • Y10S414/137 - including means for charging or discharging wafer cassette

• US Classifications

  • 198 - Conveyors: power-driven
  • 406 - Conveyors: fluid current
  • 414 - Material or article handling
  • 700 - Data processing: generic control systems or specific applications