3853974

Information

• Patent Grant
• 3853974

• References
• Source

• Patent Number

  3,853,974

• Date Filed

  Not available

• Date Issued

  Tuesday, December 10, 1974
  50 years ago

• CPC

  • C23C16/24 - Deposition of silicon only
  • C01B33/02 - Silicon
  • C23C16/01 - on temporary substrates
  • Y10S148/007 - Autodoping
  • Y10S148/025 - Deposition multi-step
  • Y10S148/027 - Dichlorosilane
  • Y10S148/049 - Equivalence and options
  • Y10S148/073 - Hollow body
  • Y10S148/122 - Polycrystalline

• US Classifications

  • 264 - Plastic and nonmetallic article shaping or treating: processes
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 427 - Coating processes