3881242

Information

• Patent Grant
• 3881242

• References
• Source

• Patent Number

  3,881,242

• Date Filed

  Not available

• Date Issued

  Tuesday, May 6, 1975
  49 years ago

• CPC

  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L23/485 - consisting of layered constructions comprising conductive layers and insulating layers
  • H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
  • Y10S148/103 - Mask, dual function
  • Y10S148/106 - Masks, special
  • Y10S148/122 - Polycrystalline
  • Y10S148/141 - Self-alignment coat gate
  • Y10S148/147 - Silicides

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices