3900363

Information

• Patent Grant
• 3900363

• References
• Source

• Patent Number

  3,900,363

• Date Filed

  Not available

• Date Issued

  Tuesday, August 19, 1975
  49 years ago

• CPC

  • C30B25/02 - Epitaxial-layer growth
  • Y10S148/017 - Clean surfaces
  • Y10S148/051 - Etching
  • Y10S148/056 - Gallium arsenide
  • Y10S148/065 - Gp III-V generic compounds-processing
  • Y10S148/079 - Inert carrier gas

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment