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3924024
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Information
Patent Grant
3924024
References
Source
Patent Number
3,924,024
Date Filed
Not available
Date Issued
Tuesday, December 2, 1975
49 years ago
CPC
H01L29/792 - with charge trapping gate insulator
H01L21/3144 - on silicon
H01L23/29 - characterised by the material
H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Y10S148/003 - Anneal
Y10S148/057 - Gas flow control
Y10S148/114 - Nitrides of silicon
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
427 - Coating processes
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