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3928091
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Information
Patent Grant
3928091
References
Source
Patent Number
3,928,091
Date Filed
Not available
Date Issued
Tuesday, December 23, 1975
49 years ago
CPC
H01L21/76202 - using a local oxidation of silicon
H01L21/32 - using masks
H01L21/74 - Making of localized buried regions
Y10S148/007 - Autodoping
Y10S148/036 - Diffusion, nonselective
Y10S148/037 - Diffusion-deposition
Y10S148/085 - Isolated-integrated
Y10S148/117 - Oxidation, selective
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
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