Number | Name | Date | Kind |
---|---|---|---|
4097889 | Kern et al. | Jun 1978 | |
4249960 | Schnable et al. | Feb 1981 | |
4258078 | Celler et al. | Mar 1981 | |
4284659 | Jaccodine et al. | Aug 1981 |
Entry |
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M. Delfino et al., "Laser Activated Flow of Phosphosilicate Glass in Integrated Circuit Devices", IEEE Electron Device Letters, vol. EDL3, No. 5, May 1982, pp. 116-118. |
P. Jeuch et al., "P-Glass Reflow with a Tunable CO.sub.2 Laser", Article in Laser and Electron-Beam Interaction with Solids, ed. by B. R. Appleton et al., Elseview Science Pub. Co., Inc. 1982, pp. 603-608, Also presented at the Materials Research Society Meeting, Boston, MA, Nov. 16-21, 1981. |