Number | Date | Country | Kind |
---|---|---|---|
81 17846 | Sep 1981 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4182958 | Goto et al. | Jan 1980 | |
4199689 | Takigawa | Apr 1980 | |
4218621 | Nakasuji et al. | Aug 1980 | |
4243866 | Pfeiffer et al. | Jan 1981 | |
4282437 | Boie | Aug 1981 |
Number | Date | Country |
---|---|---|
1544222 | Apr 1979 | GBX |
Entry |
---|
Electronics International, vol. 50, No. 10, May 1977, by: Chang et al, "Electron-Beam Lithography Draws a Finer Line" pp. 89-98. |