The present invention relates to an anode unit of an electroplating apparatus, the electroplating apparatus including the anode unit, and a method for adjusting a power feeding position to an anode.
A method for forming a metal film and/or an organic film on a substrate such as a wafer by a plating process has been recently employed in wiring of a semiconductor circuit and a method for forming a bump. The following method has been widely employed. For example, a gold, an argentum, a copper, a solder, a nickel, or a wiring or a bump (a projecting coupling electrode) formed by laminating these substances in multilayer is formed at a predetermined part on a surface of the wafer where the semiconductor circuits and a micro wiring coupling these semiconductor circuits together are formed. The wafer is coupled to an electrode of a package substrate and/or a Tape Automated Bonding (TAB) electrode via this bump. While various methods such as an electroplating method, an electroless plating method, a deposition method, and a printing method are available as the method for forming these wiring and bump, in association with an increase in the number of I/Os of a semiconductor chip and a decrease in pitch, the electroplating method configured to handle miniaturization and featuring a fast film attachment speed has been often used. The metal film obtained by electroplating currently most frequently used features high purity, a fast film formation speed, and ease of a film thickness regulating method.
A general electroplating apparatus couples a substrate to a negative electrode of a power supply, couples an anode to a positive electrode of the power supply, and applies a voltage between the anode and the substrate to form a metal film on the substrate. Here, as disclosed in Japanese Unexamined Patent Application Publication No. 2015-161028 (PTL 1), there has been known that in the case where a power feeding portion is disposed only at a center point of an anode, an electrical resistance of the anode generates a difference between a current at the center of the anode and a current at an outer peripheral portion of the anode. The current difference generated in the anode possibly adversely affects uniformity of a thickness of the metal film formed on the substrate.
PTL 1 discloses an anode unit that includes a plurality of radially extending arms fixed to an outer peripheral portion of an anode. PTL 1 discloses that, by supplying an electric power to the outer peripheral portion of the anode through the plurality of arms, the current will uniformly flow through the entire anode, ensuring forming a metal film having a uniform thickness on a substrate as the result.
PTL 1: Japanese Unexamined Patent Application Publication No. 2015-161028
Studies by the applicant has found that an optimum electric power supply position to an anode in an electroplating apparatus possibly changes depending on various conditions, for example, a shape of a wiring formed on a substrate, a property of the substrate, a property of the anode, a property of plating solution, a value of an applied voltage, required uniformity in film thickness, and/or a positional relationship between the anode and other components, and so on. Accordingly, for optimum plating, the electric power supply position to the anode is preferably adjustable. However, with the electroplating apparatus described in PTL 1, fixed positions of the arms to the anode are settled. Accordingly, it is difficult for the electroplating apparatus described in PTL 1 to adjust the fixed positions of the arms, that is, to adjust the electric power supply positions to the anode.
Therefore, one object of this application is to solve at least some of the above-described problems.
This application discloses an anode unit for an electroplating apparatus as one embodiment. The anode unit includes an anode, a power feeding element, and a power feeding element fixing portion. The power feeding element is configured to supply an electric power from a power supply to the anode. The power feeding element fixing portion is disposed on the anode. The power feeding element fixing portion is configured to fix the power feeding element to the anode. The power feeding element fixing portion is configured such that a fixed position of the power feeding element to the anode is changeable.
The electroplating apparatus 100 of this embodiment includes a plating tank 110. The plating tank 110 is provided to internally hold a plating solution. The plating tank 110 preferably includes an overflow tank 120 at the side portion of the plating tank 110 to catch the overflown plating solution from the plating tank 110. The plating tank 110 is coupled to the overflow tank 120 with a circulation line 121. The plating solution flown into the overflow tank 120 passes through the circulation line 121 and returns to the inside of the plating tank 110.
The electroplating apparatus 100 includes a substrate holder 130 for holding a substrate 131 and for immersing the substrate 131 into the plating solution. The substrate holder 130 is configured so as to removably and vertically hold the substrate 131. While this specification describes the square substrate 131, a circular substrate may be used.
The electroplating apparatus 100 further includes an anode unit 140. The anode unit 140 includes an anode 141 and a power feeding element 142 to supply an electric power from a power supply 150 to the anode 141. The power feeding element 142 is fixed to the anode 141 using a fixture 210 described later (see
The substrate 131 is coupled to a negative electrode of the power supply 150 via the substrate holder 130. The anode 141 is coupled to a positive electrode of the power supply 150 via the power feeding element 142. The power supply 150 may be configured integrally with the electroplating apparatus 100, that is, may be a part of the electroplating apparatus 100. Additionally or alternatively, an external power supply may be used as the power supply 150.
Further, the electroplating apparatus 100 optionally includes a puddle 160 and a regulating plate 170. The puddle 160 is disposed to stir the plating solution near the substrate 131 to uniform the plating solution. The regulating plate 170 is located in the plating tank 110. Specifically, the regulating plate 170 is located between the substrate holder 130 and the anode unit 140. The regulating plate 170 has an opening 171. The opening 171 restricts an electric field in the plating solution, thus adjusting an electric potential distribution on the substrate 131.
The power feeding element 142 is located on the back surface side of the anode 141 and is fixed to the anode 141 with the fixture 210. This embodiment employs a bolt 211 as the fixture 210. Furthermore, in the power feeding element 142 a screw hole 220 is provided at a part in contact with the anode 141. The bolt 211 is inserted into the slit 201 from the front surface side of the anode 141 and is screwed into the screw hole 220 on the power feeding element 142. Note that, opposite to the example of
In this embodiment, the power feeding element 142 can be removably fixed to the anode 141 at any given position in a region where the slit 201 is formed in the anode 141. That is, the slit 201 is configured such that the fixed position of the power feeding element 142 to the anode 141 is changeable. As one example, the fixed position of the power feeding element 142 is changed by performing steps of: (1) loosening the bolt 211 to release the fixation between the anode 141 and the power feeding element 142, (2) changing the relative positional relationship between the anode 141 and the power feeding element 142, and (3) tightening the bolt 211 to fix the power feeding element 142 to the anode 141 again. Note that the bolt 211 does not need to be completely loosened at the above-described step (1).
In the example of
In the example of
It is considered that an electrode reaction does not basically occur in the opening of the slit 201 and the surface of the bolt 211. Accordingly, the electric field between the anode 141 and the substrate 131 might be possibly biased (possibly one-sided or possibly distorted). However, knowledge of the applicant has found that in the case where the substrate 131 and the anode 141 have surface areas sufficiently larger than an opening area of the slit 201 and an area of the head of the bolt 211, and, the distance between the substrate 131 and the anode 141 is sufficiently longer than an opening width of the slit 201 and a diameter of the head of the bolt 211, an influence to a current distribution by the slit 201 and the bolt 211 is negligible. With the use of an insoluble anode as the anode 141, the head of the bolt 211 may be coated similarly to the anode 141 to lower an oxygen overvoltage. Coating the head of the bolt 211 allows the head itself of the bolt 211 to function as an anode.
In
In the example of
The plurality of slits 201 can be provided on the anode 141.
In the case where the plurality of slits 201 are provided on the anode 141, all of the slits 201 do not need to be used for fixing the power feeding element 142. For example, in the example of
As yet another example, the slit can be formed into a cross shape.
The configurations are not limited to the above-described examples, and the slit 201 having any given shape can be provided at any given position on the anode 141. The slit 201 can take various shapes such as an X-shape, a T-shape, an L-shape, a C-shape, a U-shape, an H-shape, and so on. As another modification, for example, the plurality of screw holes 220 may be provided at the one power feeding element 142 and the one power feeding element 142 may be fixed to the anode 141 with the plurality of bolts 211.
The second embodiment describes the anode unit 140 that has a plurality of through-holes 600 as the power feeding element fixing portion 200 instead of the slit 201, and the electroplating apparatus 100 that includes the anode unit 140.
Similarity to the first embodiment, this embodiment also locates the power feeding element 142 having the screw hole 220 on the back surface side of the anode 141. In this embodiment, the fixture 210 (the bolt 211) is inserted into at least the one through-hole 600 from the front surface side of the anode 141 and screwed into the screw hole 220, thus fixing the power feeding element 142 to the anode 141 at the position of the through-hole 600. In the example of
In this embodiment, the power feeding element 142 can be removably fixed to the anode 141 at the position of any given through-hole 600. That is, the plurality of through-holes 600 are configured such that the fixed position of the power feeding element 142 to the anode 141 is changeable. As one example, the fixed position of the power feeding element 142 is changed by performing steps of: (1) completely loosening the bolt 211 to release the fixation between the anode 141 and the power feeding element 142, (2) pulling out the bolt 211 from the through-hole 600 (the through-hole 600B in the example of
The use of the slit 201 is advantageous in that the fixed position of the power feeding element 142 is finely adjustable. Meanwhile, the use of the plurality of through-holes 600 is advantageous in that the fixed position of the power feeding element 142 is easily and quickly changeable.
The number and positions of through-holes 600 illustrated in
The third embodiment describes an example of including a depressed portion 700 disposed on the back surface of the anode 141 and a cover plate 720 as the power feeding element fixing portion 200.
The depressed portion 700 is disposed at the back surface of the anode 141 of this embodiment. In the example of
The anode unit 140 of this embodiment includes the cover plate 720. The vertical length of the cover plate 720 is preferably longer than the vertical length of the depressed portion 700. The cover plate 720 preferably has the width larger than the width of the depressed portion 700. The anode 141 has four screw holes (not illustrated) in the example of
The power feeding element 142 has the rectangular-parallelepiped-shaped top portion 710 in the example of
As described above, the depressed portion 700 has the depth smaller than the depth of the top portion 710 and the width of the void 722 is narrower than the width of the top portion 710. Accordingly, in the case where the cover plate 720 is fixed to the anode 141 while the neck portion 711 is inserted in the void 722 and the top portion 710 is sandwiched between the depressed portion 700 and the cover plate 720, the depressed portion 700 and the cover plate 720 press the top portion 710 sandwiched therebetween. This pressing force fixes the power feeding element 142 to the anode 141. That is, in this embodiment, the depressed portion 700 and the cover plate 720 constitute at least a part of the power feeding element fixing portion 200.
In this embodiment, the void (or gap) 722 having the sufficiently long vertical length ensures removably fixing the power feeding element 142 to the anode 141 at any given position of the depressed portion 700. That is, the depressed portion 700 and the cover plate 720 are configured such that the fixed position of the power feeding element 142 to the anode 141 is changeable. As one example, the fixed position of the power feeding element 142 is changed by performing steps of: (1) loosening the bolts 730 to release the fixation between the anode 141 and the power feeding element 142, (2) changing the relative positional relationship between the anode 141 and the power feeding element 142, and (3) tightening the bolts 730 to fix the power feeding element 142 to the anode 141 again.
The configuration of this embodiment does not need to provide a hole passing through the anode 141. In the configuration of this embodiment, there is no component projecting from the front surface of the anode 141. Accordingly, the configuration of this embodiment ensures keeping the front surface of the anode 141 smooth and ensures stabilizing the electric field in the plating solution. Note that providing the hole on the anode 141 and/or using the component projecting from the anode 141 in addition to the configuration of this embodiment is not excluded. Additionally, the shape of the cover plate 720 is not limited to the U-shape. The anode 141 and the cover plate 720 are insulated or the power feeding element 142 and the cover plate 720 are insulated.
The fourth embodiment describes the anode unit 140 using mesh holes 800 of the lath-shaped (netlike) anode 141 as the power feeding element fixing portion 200.
Providing the slit 201 or the through-holes 600 on the lath-shaped anode 141 is available. However, forming the edge portion of the slit 201 and the through-holes 600 into a desired shape is sometimes difficult depending on the size and the shape of the mesh holes 800 of the anode 141. Accordingly, this embodiment uses the mesh holes 800 itself of the lath-shaped anode 141 as the power feeding element fixing portion 200. In other words, the mesh holes 800 of the anode 141 constitutes at least a part of the power feeding element fixing portion 200.
This embodiment uses plugs 810 as the fixtures 210.
The power feeding element 142 of this embodiment includes at least one, preferably a plurality of sockets 820. In the example of
The plugs 810 are inserted from the side opposed to the power feeding element 142 (the front surface side of the anode 141 in
Washers or spacers may be used for the coupling of the plugs 810 to the sockets 820. In the example of
In this embodiment, the power feeding element 142 can be removably fixed to the anode 141 at any given position of the mesh holes 800 of the anode 141. That is, the mesh holes 800 are configured such that the fixed position of the power feeding element 142 to the anode 141 is changeable. As one example, the fixed position of the power feeding element 142 is changed by performing steps of: (1) pulling out the plugs 810 from the sockets 820 and the mesh holes 800, (2) changing the relative positional relationship between the anode 141 and the power feeding element 142 such that the sockets 820 are positioned near other mesh holes 800, and (3) inserting the plugs 810 to the mesh holes 800 and the sockets 820.
With the configuration of this embodiment, the electric power can be supplied to the lath-shaped anode 141 at the optimum position without the slit 201 and/or the through-holes 600. Note that providing the slit 201 and/or the through-holes 600 on the lath-shaped anode 141 is not excluded.
The method for coupling the plugs 810 to the sockets 820 is not limited to the coupling with the screws. As long as the anode 141 is fixable and the removal and the recoupling of the plugs 810 and the sockets 820 are possible, the plugs 810 and the sockets 820 may be coupled together by any given method. As one example of the coupling method, a method of using a spring, a claw, a plunger, a pin, a damper, or a similar tool or a method by fitting or a similar method is possible.
In this embodiment, insulating plugs is usable as the plugs 810. Here, “insulating plugs” indicate plugs in which a part in contact with the anode 141 is insulated from a part in contact with the power feeding element 142. That is, in the insulating plug, the part in contact with the anode 141 and the part in contact with the power feeding element 142 are not electrically coupled unless another conductive component is interposed. As the insulating plug, a plug entirely made of an insulator may be used or a plug partially made of an insulator may be used. As the insulating plug, a plug entirely or partially coated with an insulator can be used. Meanwhile, “conductive plugs” indicate plugs in which a part in contact with the anode 141 is electrically coupled to a part in contact with the power feeding element 142.
Similarly, “insulating spacer” indicates a spacer in which a part in contact with the anode 141 is insulated from a part in contact with the power feeding element 142. “Conductive spacer” indicates a spacer in which a part in contact with the anode 141 is electrically coupled to a part in contact with the power feeding element 142.
For example, in the example illustrated in
The fifth embodiment describes the anode unit 140 that includes pivot shafts 1000 at the power feeding elements 142.
Except for the number of power feeding elements 142 and the presence of the pivot shafts 1000, the anode unit 140 of this embodiment is configured similarly to the anode unit 140 of the fourth embodiment. That is, the anode 141 of this embodiment is formed into a lath shape, and the power feeding elements 142 are fixed to the anode 141 with the plugs 810 and the sockets 820. Note that, for convenience of illustration, the number of sockets 820 disposed at the one power feeding element 142 of this embodiment (two sockets) is different from the number of sockets 820 disposed at the one power feeding element 142 of the fourth embodiment (three sockets).
With the configuration of this embodiment, pulling out the plugs 810, pivoting the tops of the power feeding elements 142, and then inserting the plugs 810 allow easily changing the fixed positions of the power feeding elements 142 to the anode 141. With the square anode 141, as illustrated in
At least a part of the power feeding elements 142 of
As illustrated in
For example, in
As described above, in the case where the anode unit 140 includes the plurality of power feeding elements 142, the power feedings by the respective power feeding elements 142 are configured to be independently controllable and the power feeding element 142 performing the power feeding is selected, thus the power feeding position to the anode 141 can be changed. The change of the power feeding position by the selection of the power feeding element 142 is applicable to all embodiments described above. Furthermore, the change of the power feeding position by the selection of the power feeding element 142 is also applicable to an anode unit (an anode unit having the conventional configuration) that cannot change the fixed position of the power feeding element 142.
The sixth embodiment describes the anode unit 140 having a plurality of through-holes on the power feeding element 142.
As illustrated in
As illustrated in
The combination of the anode 141 of
Preferably, spacers 1410 are disposed between the anode 141 and the power feeding element 142. The example of
With the configuration of
For example, in
The configuration of this embodiment ensures keeping the front surface of the anode 141 smooth and ensures stabilizing the electric field in the plating solution. Note that providing the hole on the anode 141 and/or using the component projecting from the anode 141 in addition to the configuration of this embodiment is not excluded. The configuration of this embodiment is advantageous in that the relative positional relationship between the anode 141 and the power feeding element 142 does not need to be changed before and after changing the power feeding position. With the use of the insulating spacers 1410, the spacers 1410 can be preliminarily fixed to any of the boss portions 1200 or the power feeding element 142 so as to be integrated. In this case, by changing only the conductive property/insulating property of the bolts 1401, the electric power supply position to the anode 141 is adjustable. Generally speaking, as long the conductive property/insulating property of any one of the bolts 1401 and the spacers 1410 are changeable, the other members may have the insulating property. In the case where the spacers 1410 are fixed to one of the boss portions 1200 or the power feeding element 142, the spacers 1410 can be prevented from coming off at the adjustment of the electric power supply position. An insulating coating may be applied over the surfaces of the boss portions 1200 in contact with the power feeding element 142. The insulating coating works as the spacer 1410. Additionally or alternatively, an insulating coating that works as the spacer 1410 may be applied over the surface of the power feeding element 142 in contact with the boss portions 1200.
The protrusions 1500 are inserted into the through-holes 1300 from the front surface side of the power feeding element 142. After being inserted into the through-holes 1300, nuts 1510 are screwed into the protrusions 1500.
Spacers 1410′ are preferably disposed between the anode 141 and the power feeding element 142. The use of spacers partially insertable into the through-holes 1300, such as stepped spacers having T-shaped cross-sectional surfaces, as the spacers 1410′ is further preferred. The use of the stepped spacers or similar spacers allows preventing the protrusion 1500 from contacting the power feeding element 142 at an undesired position.
Similarly to the example illustrated in
The configurations of the embodiment illustrated from
Several embodiments of the present invention have been described above in order to facilitate understanding of the present invention without limiting the present invention. The present invention can be changed or improved without departing from the gist thereof, and of course, the equivalents of the present invention are included in the present invention. It is possible to arbitrarily combine or omit respective constituent elements described in the claims and specification in a range in which at least a part of the above-described problems can be solved, or a range in which at least a part of the effects can be exhibited. For example, the use of the anode 141 having both of the slit 201 and the through-holes 600 is possible. The use of the anode 141 partially formed into a lath shape and formed into a non-lath shape at the other part is also possible.
This application discloses an anode unit of an electroplating apparatus as one embodiment. The anode unit includes an anode, a power feeding element, and a power feeding element fixing portion. The power feeding element is fixed to the anode. The power feeding element is configured to supply an electric power from a power supply to the anode. The power feeding element fixing portion is disposed on the anode. The power feeding element fixing portion is configured to fix the power feeding element to the anode. The power feeding element fixing portion is configured such that a fixed position of the power feeding element to the anode is changeable.
This anode unit provides, as one example, an effect that ensures supplying the anode with the electric power at the optimum position by adjusting the fixed position of the power feeding element, that is, the electric power supply position to the anode.
Further, this application discloses the anode unit as one embodiment. At least a part of the power feeding element fixing portion is a slit. The power feeding element is fixed to the anode with a fixture inserted into the slit.
This anode unit provides, as one example, an effect that can finely adjust the fixed position of the power feeding element.
Further, this application discloses the anode unit as one embodiment. At least a part of the power feeding element fixing portion is a plurality of through-holes. The power feeding element is fixed to the anode with the fixture inserted into the through-hole.
This anode unit provides, as one example, an effect that can change the fixed position of the power feeding element easily and quickly.
Further, this application discloses the anode unit as one embodiment. At least a part of the power feeding element fixing portion is a depressed portion disposed at a back surface of the anode and a cover plate fixed to the anode so as to cover at least a part of the depressed portion. The power feeding element is fixed to the anode by fixing the cover plate to the anode while at least a part of the power feeding element is sandwiched between the depressed portion and the cover plate.
This anode unit provides, as one example, an effect that can smoothly keep the front surface of the anode 141 and can stabilize the electric field in the plating solution.
Further, this application discloses the anode unit as one embodiment. The anode is formed into a lath shape. At least a part of the power feeding element fixing portion is a mesh hole of the anode. The power feeding element is fixed to the anode with the fixture inserted into the mesh hole.
This anode unit provides, as one example, an effect that can supply an electric power to the lath-shaped anode 141 at the optimum position without the slit or the through-holes.
Further, this application discloses the anode unit as one embodiment. The power feeding element includes a socket. The fixture inserted into the mesh hole is a plug configured to be coupled to the socket.
The contents of this disclosure describe details of the fixture with the use of the lath-shaped anode.
Further, this application discloses the anode unit as one embodiment. The anode unit includes a plurality of the plugs and a plurality of spacers. The plurality of spacers are disposed between the anode and the power feeding element. The plurality of spacers are mounted to the respective plugs. At least one of the plugs has an insulating property. At least one of the spacers mounted to the insulating plug has an insulating property. Further, this application discloses a method for adjusting a power feeding position to the anode in the anode unit as one embodiment. The method includes a step of configuring the plug at a position where a power feeding is undesired and the spacer mounted to the plug at the position where the power feeding is undesired so as to have insulating properties; and a step of configuring the plug at a position where the power feeding is desired and/or the spacer mounted to the plug at the position where the power feeding is undesired so as to have conductive properties.
These anode unit and method provide, as one example, an effect that can feed the power only to the position where the power feeding is desired while maintaining the fixing strength. Furthermore, these anode unit and method provide an effect that can change the power feeding position to the anode by switching the conductive property/insulating property of the plug and/or the spacer as one example.
Further, this application discloses an electroplating apparatus as one embodiment. The electroplating apparatus includes a plating tank, a substrate holder, and the anode unit. The plating tank holds a plating solution. The substrate holder is a holder for holding a substrate and for immersing the substrate into the plating solution. In the anode unit, the anode is located to be opposed to the substrate at an inside of the plating tank.
The contents of this disclosure describe the details of the electroplating apparatus.
Further, this application discloses a method for adjusting a power feeding position to the anode in the anode unit as one embodiment. The method includes a step of releasing the fixation between the anode and the power feeding element; a step of changing a relative positional relationship between the anode and the power feeding element; and a step of fixing the power feeding element to the anode again.
The contents of this disclosure describe the details of the method for adjusting the power feeding position.
Further, this application discloses an anode unit of an electroplating apparatus as one embodiment. The anode unit includes an anode, a power feeding element, a plurality of fixtures, and a plurality of spacers. The power feeding element is fixed to the anode. The power feeding element is configured to supply an electric power from a power supply to the anode. The power feeding element has a plurality of through-holes. The plurality of fixtures are inserted into the through-holes on the power feeding element. The plurality of fixtures fix the power feeding element to the anode. The plurality of spacers are disposed between the anode and the power feeding element. The plurality of spacers are mounted to the respective fixtures. At least one of the fixtures has an insulating property. At least one of the spacers mounted to the insulating fixture has an insulating property. Further, this application discloses the anode unit as one embodiment. The fixture at a position where a power feeding is undesired and the spacer mounted to the fixture at the position where the power feeding is undesired have insulating properties. The fixture at a position where the power feeding is desired and/or the spacer mounted to the fixture at the position where the power feeding is undesired have conductive properties. Further, this application discloses a method for adjusting a power feeding position to an anode by a power feeding element having a plurality of through-holes as one embodiment. The power feeding element is fixed to the anode using: a fixture inserted into the through-hole; and a spacer disposed between the anode and the power feeding element, the spacer being mounted to the fixture. The method includes: a step of configuring the fixture at a position where a power feeding is undesired and the spacer mounted to the fixture at the position where the power feeding is undesired so as to have insulating properties; and a step of configuring the fixture at a position where the power feeding is desired and/or the spacer mounted to the fixture at the position where the power feeding is undesired so as to have conductive properties.
These anode unit and method provide, as one example, an effect that can smoothly keep the surface of the anode and can stabilize the electric field in the plating solution. Furthermore, these anode unit and method provide, as one example, an effect that changing the conductive property/insulating property of the fixture and the spacer makes it possible to adjust the electric power supply position to the anode.
100 . . . electroplating apparatus
110 . . . plating tank
120 . . . overflow tank
121 . . . circulation line
130 . . . substrate holder
131 . . . substrate
140 . . . anode unit
141 . . . anode
142 . . . power feeding element
150 . . . power supply
160 . . . puddle
170 . . . regulating plate
171 . . . opening
200 . . . power feeding element fixing portion
201 . . . slit
210 . . . fixture
211 . . . bolt
220 . . . screw hole
600 . . . through-hole
700 . . . depressed portion
710 . . . top portion
711 . . . neck portion
720 . . . cover plate
721 . . . arm portion
722 . . . void
730 . . . bolt
800 . . . mesh hole
810 . . . plug
820 . . . socket
900 . . . rod-shaped portion
910 . . . head
1000 . . . pivot shaft
1100 . . . high-elastic conductor
1200 . . . boss portion
1201 . . . screw hole
1300 . . . through-hole
1400 . . . fixture
1401 . . . bolt
1410 . . . spacer
1500 . . . protrusion
1510 . . . nut
Number | Date | Country | Kind |
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2017-228059 | Nov 2017 | JP | national |