Claims
- 1. An antireflective coating composition comprising:
a. a polymer selected from the group consisting of a polyester, and a polyurethane and mixtures thereof; and b. a crosslinker selected from the group consisting of tetraamidomethyl ether.
- 2. The antireflective coating composition according to claim 1, wherein the tetraamidomethyl ether comprises Gecko™.
- 3. The antireflective coating composition according to claim 1, wherein the composition is formed in the presence of an effective amount of catalyst.
- 4. The antireflective coating composition according to claim 3, wherein the catalyst comprises an amine salt of an aromatic sulfonic acid.
- 5. The antireflective coating composition according to claim 4, wherein the catalyst comprises Nacure 5225™.
- 6. The antireflective coating composition according to claim 1, wherein the polyester comprises a branched polyester.
- 7. An antireflective, light attenuating, photolithography polymer comprising: a polyurethane comprising isocyanate groups reacted with alcohol groups, wherein the ratio of —NCO/—OH groups is between about 0.6 to about 0.95 and wherein the polyurethane is crosslinked with a tetraamidomethyl ether crosslinking agent.
- 8. The polymer according to claim 7, wherein the tetraamidomethyl ether crosslinker comprises Gecko™.
- 9. The polymer according to claim 7, wherein the ratio of —NCO/—OH groups is between about 0.7 to about 0.85.
- 10. An antireflective, light attenuating, photolithography polymer comprising a polyester crosslinked with a tetraamidomethyl ether crosslinking agent.
- 11. A method for making an antireflective, light attenuating, photolithography polymer composition comprising:
a. reacting a monomer having at least two isocyanate groups with a monomer having at least two alcohol groups, wherein the molar ratio of the isocyanate groups to the alcohol groups is between about 0.6 and about 0.95, to form a polyurethane; and b. reacting the polyurethane with an effective amount of a tetraamidomethyl ether crosslinker.
- 12. The method according to claim 11, wherein the crosslinker is Gecko™.
- 13. The method according to claim 11, including the step of,
c. reacting the polyurethane and crosslinker in the presence of a catalyst.
- 14. The method according to claim 11, wherein the catalyst is an amine salt of an aromatic sulfonic acid.
- 15. The method according to claim 11, wherein the monomer is a diisocyanate selected from the group consisting of TDI, MDI, and mixtures thereof.
- 16. The method according to claim 13, including the step of coating the polymer, crosslinker, and catalyst onto a substrate.
- 17. A method for making an antireflective coating comprising:
a. selecting a polymer from the group consisting of a polyester, a polyurethane, and mixtures thereof; and b. reacting the selected polymer(s) with a tetraamidomethyl ether crosslinker.
- 18. The method according to claim 17, including the step of,
c. reacting the selected polymer and crosslinker in the presence of a catalyst.
- 19. The method according to claim 18, including the step of spin coating the selected polymer, crosslinker and catalyst onto a substrate.
- 20. The method according to claim 18 wherein the catalyst comprises an amine salt of an aromatic sulfonic acid.
Parent Case Info
[0001] This application claims the benefit of U.S. Provisional Application Serial No. 60/387,149, filed Jun. 7, 2002. The entire disclosure of this provisional application is incorporated herein by reference as if fully rewritten herein.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60387149 |
Jun 2002 |
US |