Patent Grant
11762127
The present invention relates to an antireflective film for collecting visible light with a shallow incidence angle without reflecting it and for emitting visible light at a shallow angle without reflecting it, a method of producing the antireflective film, and an eyeglass type display using the antireflective film.
The development of devices for virtual reality (VR) has been advancing. Wearing a goggles type VR, it is possible to watch a movie and to converse with a person remote from each other as if being adjacent to (PATENT LITERATURE 1). It becomes familiar to experience images as if to go beyond space-time, which were shown in SF movies in the past.
In order to obtain real feeling of virtual reality, it has been investigated to reduce the weight and the thickness of the goggles. It is also necessary to replace the pair of goggles itself to an eyeglass type (glasses type), which is lighter in weight, and it will become necessary to contrive devices that enable to experience VR without having glasses. As a technique to form images in space, holography has been known. This makes it possible to experience VR without having goggles or glasses. In the holography, images in space are formed by highly coherent laser interference. Due to the weight reduction, miniaturization, price reduction, quality improvement, and increased intensity of laser apparatuses, holography has become familiar recently. It has been proposed a technique to let light through a propagation layer for light to the vertical direction, which is projected using holography (PATENT LITERATURE 2). This is constructed such that light is propagated to the horizontal direction to an eyeglass, and is diffracted to project images to the vertical direction, which is the direction to an eye.
In the holography, resolution and contrast of images are changed due to differences in accuracy and resolution of a pattern to be diffracted. At present, liquid crystal displays and organic EL displays are much better in resolution and contrast of images.
If a head mount display is replaced with an eyeglass type display, which is light in weight, it is possible to reduce the weight substantially. In this case, it becomes necessary to provide a technique to project oblique incident light that is extremely thin, a thin constitution of lenses to focus on an object at a short distance, and a high quality antireflective film material to project light with a shallow incidence angle without reflecting it.
It has long been proposed to provide a display with an antireflective film at the side of eyes (PATENT LITERATURE 3). This allows images projected from a display to be seen in a highly contrast state without losing the intensity. It has also been demonstrated that a multi-layer antireflective film is effective as the antireflective film (PATENT LITERATURE 4). To prevent reflections with respect to visible lights with various wavelength and lights at various angles, multi-layer antireflective films are favorable.
An antireflective film with a moth eye structure has been proposed (NON-PATENT LITERATURE 1). The reason why moths can detect light with high efficiency even in darkness is that the surface of their eye has a structure with repeated minute projections. This structure is artificially formed in an antireflection film, which has been proposed (PATENT LITERATURE 5). In this film, massed pillars with higher refractive index are formed in which the pillar is finer than the wavelength, finer at the tip and thicker at the substrate side, thereby making the refractive index be lower at the tip and higher at the substrate side. The moth eye structure can realize effect that is similar in the case of multilayer antireflective film.
The antireflective film with a moth eye structure is formed by imprint technique in which a printing block is pushed against resin, and the resin is transformed while heating under certain circumstances. The imprint method involves a drawback of wearing of the printing block, which makes it impossible to form a pattern. The moth eye structure itself involves a problem that the antireflective function lowers when a foreign matter sticks to the pillars or the pillar breaks.
The present invention was accomplished in view of the above-described problems. It is an object of the present invention to provide an antireflective film that is able to give antireflection effect to decrease the reflection of light, a method of producing the same, and an eyeglass type display.
To solve the above problems, the present invention provides an antireflective film, comprising:
a support base, and
a pattern composed of a photoresist material formed on the support base, the pattern having a larger size at a point closer to the support base.
The inventive antireflective film is able to give antireflection effect to decrease the reflection of light.
It is preferable that the pattern have a pitch of 400 nm or less.
The antireflective film having such a pattern pitch is able to prevent diffuse reflection on the pattern.
It is preferable that the photoresist material contain a polymer compound having an aromatic group.
With the photoresist material like this, the antireflective film becomes easy in manufacturing.
The photoresist material preferably contains a polymer compound that contains 85% or more of a repeating unit having at least one structure selected from the group consisting of naphthalene, fluorene, anthracene, and cyclopentadienyl complexes.
The photoresist material preferably contains a polymer compound that contains 50% or more of a repeating unit having any of styrene substituted with iodine or bromine, benzene (meth)acrylate substituted with iodine or bromine, and benzene (meth)acrylamide substituted with iodine or bromine.
The photoresist material preferably has a refractive index of 1.6 or more with respect to visible light having a wavelength of 590 to 610 nm.
With the photoresist material described above, it becomes easy to produce a moth eye pattern to achieve still more enhanced antireflection effect.
It is preferable that the pattern be covered with a low-refractive-index material having a refractive index of 1.45 or less with respect to visible light having a wavelength of 590 to 610 nm.
In the antireflective film like this, it is possible to prevent lowering of antireflection effect due to pattern collapse.
The antireflective film is preferably such that the transmittance of visible light having a wavelength of 400 to 800 nm is 80% or more.
The antireflective film with such transmittance can be preferably used for a light-weight and thin eyeglass-type head mount display by which light with higher brightness and higher contrast can be seen.
The present invention also provides an eyeglass type display, comprising:
a self-emitting display selected from the group consisting of liquid crystal, organic EL, and micro LED installed on a substrate at the side of an eyeball of the eyeglass type display, and
a convex lens for focusing installed on the side of an eyeball of the self-emitting display,
wherein the antireflective film described above is formed on a surface of the convex lens.
The inventive eyeglass type display can be preferably used as a light-weight and thin eyeglass-type head mount display by which light with higher brightness and higher contrast can be seen.
The present invention also provides a method of producing an antireflective film, comprising:
coating a support base with a photoresist material, and
exposing and developing the photoresist material to form a pattern having a larger size at a point closer to the support base.
The inventive method of producing an antireflective film facilitates manufacturing an antireflective film that is allowed to have antireflective effect to exhibit lower reflection of light.
The method of producing an antireflective film preferably comprises
forming an organic film as the support base on a substrate using an organic film-forming composition,
wherein the pattern is formed on the organic film using the photoresist material.
By the production method like this, the inventive antireflective film can be manufactured more easily.
It is preferable to set the pattern to have a pitch of 400 nm or less.
With the pattern pitch like this, it is possible to manufacture an antireflective film capable of preventing diffuse reflection on the pattern.
It is preferable to use the photoresist material containing a polymer compound having an aromatic group.
Using the photoresist material like this, the antireflective film of the present invention can be manufactured more easily.
It is preferable to use the photoresist material containing a polymer compound that contains 85% or more of a repeating unit having at least one structure selected from the group consisting of naphthalene, fluorene, anthracene, and cyclopentadienyl complexes.
It is preferable to use the photoresist material containing a polymer compound that contains 50% or more of a repeating unit having any of styrene substituted with iodine or bromine, benzene (meth)acrylate substituted with iodine or bromine, and benzene (meth)acrylamide substituted with iodine or bromine.
It is preferable to use the photoresist material having a refractive index of 1.6 or more with respect to visible light having a wavelength of 590 to 610 nm.
Using the photoresist material described above, it is possible to manufacture an antireflective film in which a moth eye pattern is easily formed, and still more enhanced antireflection effect can be achieved.
It is preferable to cover the formed pattern with a low-refractive-index material having a refractive index of 1.45 or less with respect to visible light having a wavelength of 590 to 610 nm.
Including the step like this, the production method makes it possible to manufacture an antireflective film that is prevented from lowering of antireflection effect due to pattern collapse.
As described above, in the antireflective film of the present invention, a moth eye-type antireflective film is successfully formed with a pattern in a tapered profile formed by exposure and development using a photoresist based on a highly refractive polymer. This makes it possible to obtain antireflective effect, which exhibits lower reflection of visible light even to incident light and emitted light with a shallow angle. Accordingly, when it is combined with a lens(es) with a high refractive index, light emitted from liquid crystal, organic EL, and micro LED that are installed near eyes can be seen in the state of higher contrast and higher brightness. The inventive method of producing an antireflective film makes it possible to form the inventive antireflective film easily. Moreover, using the inventive antireflective film, it is possible to realize an eyeglass type display which is substantially light in weight and thin compared to previous head mount displays.
As described above, it has been known that excellent antireflective effect can be obtained by installing a film with a lower refractive index at the side of air (eyes), a film with a higher refractive index at the side of generating light, which is opposite to the eye, and a multilayer film therebetween in which the refractive index alters gradually. However, the refractive index is an intrinsic value of each material. Accordingly, to change the refractive index gradually, it is necessary to laminate films of materials with the refractive indexes being different from each other, and it has been difficult to adjust the refractive index. It is also conceivable to alter the refractive index of the film to be laminated by blending a material with a higher refractive index and a material with a lower refractive index, together with altering the ratio of blending. However, the material with a higher refractive index and the material with a lower refractive index are largely different in polarity in many cases, and are not mixed after blending thereby. Accordingly, this method is not popular either. Hence, it is also conceivable to use a film in which the moth eye pattern described above is formed as an antireflective film. In general, the moth eye pattern is formed by imprint technique to process a resin film by pressing a mold called stamper while heating the resin film.
The present inventors diligently investigated to achieve the foregoing objects and consequently found that the moth eye pattern is successfully improved greatly in the throughput if it can be formed by exposure and development, and still more enhanced antireflection effect can be obtained using a highly refractive material as a photoresist to form the moth eye pattern; thereby bringing the present invention to completion.
That is, the present invention is an antireflective film, comprising:
a support base, and
a pattern composed of a photoresist material formed on the support base, the pattern having a larger size at a point closer to the support base.
Hereinafter, the present invention will be specifically described by referring to FIGS., but the present invention is not limited thereto.
<Antireflective Film>
The present invention provides an antireflective film in which a pattern composed of a photoresist material is formed on a support base, and the pattern has a larger size at a point closer to the support base, that is, the pattern is flared toward the support base.
An example of the inventive antireflective film is shown in
The moth eye pattern may have any layout, when it is observed from the above, such as a crosswise arrangement as shown in
In the antireflective film of the present invention, the transmittance of visible light having a wavelength of 400 to 800 nm is preferably 80% or more.
[Pattern Having a Larger Size at a Point Closer to Support Base (Moth Eye Pattern)]
The moth eye pattern 13 is preferably set to have a pitch smaller than the wavelength of the visible light. This successfully prevents diffuse reflection on the moth eye pattern 13. Since the shortest wavelength in the visible light is about 400 nm, the pitch of the pattern is preferably 400 nm or less, more preferably 300 nm or less.
The height of the moth eye pattern 13 is preferably 50 nm or more and 1000 nm or less, more preferably 100 nm or more and 800 nm or less.
The resin film formed by common imprint method has a refractive index of about 1.5, but a moth eye pattern having a higher refractive index than 1.5 can be formed from a photoresist material as in the present invention. With higher refractive index, it is possible to achieve higher antireflection effect to emit or introduce shallower light. Accordingly, the photoresist material preferably has a refractive index of 1.6 or more, more preferably 1.65 or more, still more preferably 1.7 or more with respect to visible light having a wavelength of 590 to 610 nm.
The moth eye pattern 13 have to be formed such that the upper part has a smaller size, and the face adjoined to the underneath support base has a larger size as shown in
The photoresist material preferably has an aromatic group, and a polymer compound having a condensed aromatic ring is more preferable due to the higher refractive index. For example, as the resist material having a condensed aromatic ring with higher refractive index, a resist material having an acid-labile group of condensed aromatic ring is exemplified in JP 2010-237662A, JP 2010-237661A, JP 2011-150103A, JP 2011-138107A, and JP 2011-141471A. The preferable examples thereof also include a resist material that contains any of acenaphthylene described in JP 2002-119659A, vinylferrocene described in JP 2014-119659A, hydroxyvinylnaphthalene described in JP 2002-107933A, and hydroxynaphthalene methacrylate described in JP 2007-114728A since they have a higher refractive index. The resist material described in JP H05-204157A, which contains hydroxystyrene substituted with bromine or iodine, has higher refractive index and is preferable thereby.
The following are exemplified as a monomer that contains an acid-labile group of condensed aromatic ring.
The following are exemplified as a monomer to obtain a repeating unit having a naphthalene structure.
The following are exemplified as a monomer to obtain a repeating unit having any of styrene substituted with iodine or bromine, benzene (meth)acrylate substituted with iodine or bromine, and benzene (meth)acrylamide substituted with iodine or bromine.
The following are exemplified as a monomer to obtain a repeating unit having an anthracene structure.
The following are exemplified as a monomer to obtain a repeating unit having a cyclopentadienyl complex. The following cyclopentadienyl complexes are preferably ferrocene.
In the formulae, R represents a hydrogen atom or a methyl group, and M represent any of Fe, Co, Ni, Cr, and Ru.
The aforementioned polymer compounds are suitable, particularly for a base resin of a positive type resist material with higher refractive index. In a positive type resist material composed of the polymer compound like this as a base material, together with organic solvent, acid generator, a basic compound, and surfactant formulated thereto being appropriately combined in accordance with needs, the polymer compound dissolves into developer at an accelerated rate in the exposed part due to catalytic reaction, thereby allowing the positive type resist material to have extremely high sensitivity, to form a resist film with high dissolution contrast and resolution, to have exposure margin and an excellent process adaptability, and to form a moth eye pattern with higher refractive index with respect to visible light after exposure.
The photoresist material preferably contains a polymer compound, among the polymer compounds described above, which contains 85% or more of a repeating unit having at least one structure selected from the group consisting of naphthalene, fluorene, anthracene, and cyclopentadienyl complexes.
The photoresist material preferably contains a polymer compound that contains 50% or more of a repeating unit having any of styrene substituted with iodine or bromine, benzene (meth)acrylate substituted with iodine or bromine, and benzene (meth)acrylamide substituted with iodine or bromine.
Additionally, the resist material is allowed to decrease diffusion rate of acid in the resist film to further improve the resolution by adding a basic compound, and the application property of the resist material is more improved or controllable by adding surfactant.
The resist material may contain an acid generator to activate the chemically amplified positive type resist material used for the patterning process of the production method that will be described later, for example, a compound capable of generating an acid by responding to an active beam or a radiation beam (photo acid generator) may be contained therein. As to the photo acid generator component, any compound capable of generating an acid by exposure to a high energy beam can be used. Examples of the suitable photo acid generator include a sulfonium salt, an iodonium salt, a sulfonyldiazomethane, an N-sulfonyloxyimide, and an oxime-O-sulfonate type acid generator.
Illustrative examples of the acid-generator are described in paragraphs [0122] to [0142] of JP 2008-111103A, for example. These compounds may be used solely or as a mixture of two or more.
Illustrative examples of the components that can be formulated to the resist material include organic solvent, a basic compound (quencher), and surfactant described in paragraphs [0144] to [0145], paragraphs [0146] to [0164], and paragraphs [0165] to [0166] of JP 2008-111103A respectively, together with dissolution inhibitor described in paragraphs to [0178] of JP 2008-122932A. It is also possible to add a polymer type quencher described in JP 2008-239918A. In accordance with needs, acetylene alcohols can be added as an optional component, and illustrative examples thereof include acetylene alcohols described in paragraphs [0179] to [0182] of JP 2008-122932A.
These components orient on the resist surface after coating thereof to improve the profile accuracy after the patterning. The polymer-type quencher also has the effects to prevent film loss of the pattern when a top coat for immersion exposure is formed thereon as well as rounding of the pattern head.
When the acid generator is formulated, the formulate amount is preferably 0.1 to 50 parts by mass based on 100 parts by mass of the base resin. When the basic compound (quencher) is formulated, the formulate amount is preferably 0.01 to 20 parts by mass, particularly 0.02 to 15 parts by mass based on 100 parts by mass of the base resin. When the dissolution inhibitor is formulated, the formulate amount is preferably 0.5 to 50 parts by mass, particularly 1.0 to 30 parts by mass based on 100 parts by mass of the base resin. When the surfactant is formulated, the formulate amount is preferably 0.0001 to 10 parts by mass, particularly 0.001 to 5 parts by mass based on 100 parts by mass of the base resin.
The formulate amount of organic solvent is preferably 100 to 10,000 parts by mass, particularly 200 to 8,000 parts by mass based on 100 parts by mass of the base resin.
[Support Base]
The support base can be any material as far as it can support the moth eye pattern, such as an underlayer film and a substrate without being particularly limited thereto. The underlayer film may be any of an organic film and an inorganic film. It is also possible to form a moth eye pattern directly on a substrate without providing an underlayer film. However, the underlayer film and the substrate are preferable to be highly transparent with respect to visible light. Additionally, it is also preferable that the substrate and the underlayer film each have higher refractive index. When a substrate is used as the support base, it is preferable to use a substrate treated with HMDS (Hexamethyldisilazan).
[Low-Refractive-Index Material]
As the low-refractive-index material for burring the moth eye pattern, a material that is applicable by spin-coating is preferable, and fluorine polymers can be exemplified, for example. Additionally, the low-refractive-index material preferably has a refractive index of 1.45 or less. Teflon (trade mark) type polymer has a refractive index of 1.35 in the area of visible light. Even in methacrylate having a pendant fluoroalkyl group, the refractive index is about 1.42. For example, JP 2008-257188A shows a crosslinkable underlayer film with a lower refractive index having a fluoroalcohol group. As a material with a still lower refractive index, porous silica films can be exemplified. The refractive index is decreased by enlarging the size of the pores or increasing the ratio of the pores, and can be decreased to about 1.25 thereby.
The low-refractive-index material for burring the moth eye pattern is preferably dissolved into a solvent that does not dissolve a resist pattern and applied onto a moth eye pattern by spin-coating. Illustrative examples of the solvent that does not dissolve a resist pattern include alcohol type solvents, ether type solvents, hydrocarbon type solvents, and fluorine type solvents.
The inventive antireflective film, in which a moth eye structure is formed, allows the image projected from a display of liquid crystal, organic EL, or micro LED to emit obliquely with high brightness and high contrast. It is also possible to prevent reflection of oblique incident light from the opposite side of a display not only reflection in which light emitted from the display side returns to the display side.
<Eyeglass Type Display>
The present invention also provides an eyeglass type display, comprising:
a self-emitting display selected from the group consisting of liquid crystal, organic EL, and micro LED installed on a substrate at the side of an eyeball of the eyeglass type display, and
a convex lens for focusing installed on the side of an eyeball of the self-emitting display,
wherein the inventive antireflective film is formed on a surface of the convex lens.
The inventive eyeglass type display makes it possible to realize an eyeglass type display, which is substantially light in weight and thin compared to previous head mount displays.
<Method of Producing Antireflective Film>
The present invention also provides a method of producing an antireflective film, comprising:
coating a support base with a photoresist material, and
exposing and developing the photoresist material to form a pattern having a larger size at a point closer to the support base.
As a support base and a photoresist material used in this process, it is possible to use ones described in the explanation of the inventive antireflective film.
The inventive method of producing an antireflective film preferably includes a step of applying the resist material described above onto a support base, a step of heat treatment followed by exposure to high energy beam, and a step of development using developer.
In the step of exposure to high energy beam, it is possible to use a light source such as ArF excimer laser at a wavelength of 193 nm, KrF excimer laser at a wavelength of 248 nm, i-beam at a wavelength of 365 nm, and accelerated electron beam.
For example, the resist material described above is applied onto a substrate for manufacturing an integrated circuit or a layer to be processed on the substrate (Si, SiO2, SiN, SiON, TiN, WSi, BPSG, SOG, an organic antireflective film; a flexible substrate such as thin film glass, PEN, PET, or polyimide; or a device on which an organic EL, liquid crystal, or micro LED have been formed) by appropriate coating method such as spin-coating, roll coating, flow-coating, dip coating, spray coating, and doctor coating to have a thickness of coating film of 0.1 to 2.0 μm. This is pre baked on a hot plate at 60 to 150° C. for 10 seconds to 30 minutes, preferably at 80 to 120° C. for 30 seconds to 20 minutes.
Then, this is exposed to a high energy beam using a light source selected from ultraviolet beam, a far ultraviolet beam, an electron beam, an X-ray, a soft X-ray, an excimer laser, a γ-ray, a synchrotron radiation ray, and EUV to form an intended pattern through a certain mask or directly. The exposure is preferably performed to have an exposure dose of about 1 to 200 mJ/cm2, particularly 10 to 100 mJ/cm2, or about 0.1 to 100 μC/cm2, particularly 0.5 to 50 μC/cm2. Subsequently, this is subjected to PEB on a hot plate, preferably at 60 to 150° C. for 10 seconds to 30 minutes, more preferably at 80 to 120° C. for 30 seconds to 20 minutes.
Additionally, this is developed by ordinary method such as a dip method, a puddle method, and a spray method preferably using a developer of aqueous alkaline solution such as 0.1 to 5 mass %, more preferably 2 to 3 mass % of tetramethylammonium hydroxide (TMAH), choline hydroxide, tetraethylammonium hydroxide (TEAH), tetrapropylammonium hydroxide (TPAH), tetrabutylammonium hydroxide (TBAH), benzyltrimethylammonium hydroxide, and benzyltriethylammonium hydroxide, preferably 3 seconds to 3 minutes, more preferably 5 seconds to 2 minutes. Through this development, the part irradiated with light is dissolved into the developer, and the part that have not been exposed is not dissolved, thereby forming the intended positive type pattern on the substrate.
As the mask pattern used for exposure to form a moth eye pattern, it is possible to use the one shown in JP 2010-186064A, for example. That is, it is possible use a line-and-space pattern arranged in the Y direction and the X direction, a latticed pattern, and a dot pattern. As for the illumination, illustrative examples thereof include a method of performing dipole illumination in the X direction and the Y direction twice, and a method of performing one exposure with a cross pole illumination or annular illumination.
The inventive method of producing an antireflective film like this makes it possible to easily manufacture an antireflective film that exhibits antireflection effect with lower reflection of visible light even to incident light and emitted light with a shallow angle.
Hereinafter, the present invention will be explained specifically by showing Examples and Comparative Examples, but the present invention is not limited thereto.
As the high refractive index material for forming a moth eye pattern, High refractive index resist polymers-1 to 8 and Underlayer film resist polymer-1 for forming an underlayer film as a support base obtained by radical polymerization as described below were prepared.
High refractive index resist polymer-1
weight average molecular weight (Mw)=6,800
molecular weight distribution (Mw/Mn)=1.91
High refractive index resist polymer-2
weight average molecular weight (Mw)=7,100
molecular weight distribution (Mw/Mn)=1.61
High refractive index resist polymer-3
weight average molecular weight (Mw)=7,900
molecular weight distribution (Mw/Mn)=1.67
High refractive index resist polymer-4
weight average molecular weight (Mw)=8,800
molecular weight distribution (Mw/Mn)=1.77
High refractive index resist polymer-5
weight average molecular weight (Mw)=8,800
molecular weight distribution (Mw/Mn)=1.77
High refractive index resist polymer-6
weight average molecular weight (Mw)=8,800
molecular weight distribution (Mw/Mn)=1.77
High refractive index resist polymer-7
weight average molecular weight (Mw)=7,600
molecular weight distribution (Mw/Mn)=1.63
High refractive index resist polymer-8
weight average molecular weight (Mw)=8,800
molecular weight distribution (Mw/Mn)=1.77
Underlayer film resist polymer-1
weight average molecular weight (Mw)=8,400
molecular weight distribution (Mw/Mn)=1.98
Photo-acid generators: PAG1, PAG2, PAG3 (see the following structural formulae)
Basic compounds: Quenchers 1 and 2 (see the following structural formulae)
Acid generator: AG1 (see the following structural formula)
AG1
Crosslinking agent: CR1 (see the following structural formula)
Organic Solvents:
propylene glycol monomethyl ether acetate (PGMEA)
cyclohexanone (CyH)
High refractive index resist polymer, Photo-acid generator, Basic compound, and solvent containing 100 ppm of FC-4430, which is a surfactant manufactured by 3M, were blended in the composition of Table 1, spin coated onto a silicon wafer, and baked at 110° C. for 60 seconds to form a photoresist film with the film thickness of 250 nm. The refractive index of this film was measured by spectroscopic ellipsometry. The results are shown in Table 1.
Under layer film resist polymer, Crosslinking agent, thermal-acid generator, and solvent containing 100 ppm of FC-4430, which is a surfactant manufactured by 3M, were blended in the composition of Table 2, spin coated onto a silicon wafer, and crosslinked by baking at 200° C. for 60 seconds to form an underlayer film with the film thickness of 200 nm. The refractive index of this film was measured by spectroscopic ellipsometry. The results are shown in Table 2.
Teflon (registered trade mark) AF polymer manufactured by Du Pont-Mitsui Fluorochemicals Co., Ltd. and solvent were blended in the composition of Table 3, spin coated onto a silicon wafer, and crosslinked by baking at 100° C. for 60 seconds to form a low refractive index-over coat film with the film thickness of 250 nm. The refractive index of this film was measured by spectroscopic ellipsometry. The results are shown in Table 3.
Onto a synthesis quartz substrate, an underlayer film solution was applied to form UDL-1 film with the film thickness of 200 nm by the same spin coat method and baking conditions as described above. The solution of photoresist was applied thereonto under the same conditions and baked at 110° C. for 60 seconds to form a photoresist film with the film thickness of 250 nm. This was exposed using KrF excimer laser scanner S-206D manufactured by Nikon Corporation (NA: 0.82, dipole illumination) and 6% half-tone phase shift mask to form a pattern in the X direction of 130 nm line-and-space and a pattern in the Y direction of 130 nm line-and-space at the same position so as to intersect with the pattern in the X direction. After the exposure, this was baked at a temperature described in Table 4 for 60 seconds (PEB) and developed with 2.38 mass % aqueous tetramethylammonium hydroxide (TMAH) solution for 60 seconds to form a pillar pattern on the intersecting part of the line-and-space pattern.
The cross section of the developed pattern was observed and photographed to observe that a pillar pattern with the pitch of 260 nm was formed in a tapered profile with the side wall angle of 70 to 80°.
In Comparative Examples 2 and 3, the resist films were not subjected to patterning exposure.
In Example 10, a low refractive index-over coat film was formed under the same conditions as described above after a pattern was formed to bury the gaps between the patterns by TCL-1 as in
As shown in
As shown in Table 4, each inventive antireflective film produced in Examples 1 to 11 showed higher illumination of the transmitted light. On the other hand, Comparative Examples 1 to 3 showed lower illumination of the transmitted light than that of the inventive antireflective film.
From the foregoing, it was revealed that the inventive antireflective film successfully gave antireflection effect to bring lower reflection of light.
It is to be noted that the present invention is not restricted to the foregoing embodiment. The embodiment is just an exemplification, and any examples that have substantially the same feature and demonstrate the same functions and effects as those in the technical concept described in claims of the present invention are included in the technical scope of the present invention.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2017-240561 | Dec 2017 | JP | national |
This is a Division of application Ser. No. 16/208,737 filed Dec. 4, 2018, which claims priority to JP 2017-240561 filed Dec. 15, 2017. The disclosure of each of the prior applications is hereby incorporated by reference herein in its entirety.
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| Entry |
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| Number | Date | Country | |
|---|---|---|---|
| 20210096285 A1 | Apr 2021 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 16208737 | Dec 2018 | US |
| Child | 17111613 | US |
