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the macromolecular compound being present in a chemically amplified positive photoresist composition
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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the macromolecular compound being present in a chemically amplified positive photoresist composition
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last 30 patents
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Positive photosensitive resin composition, positive photosensitive...
Patent number
12,195,568
Issue date
Jan 14, 2025
Shin-Etsu Chemical Co., Ltd.
Masashi Iio
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Photoresist composition and method of forming photoresist pattern
Patent number
12,189,287
Issue date
Jan 7, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Li-Po Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist composition and pattern forming process
Patent number
12,174,536
Issue date
Dec 24, 2024
Shin-Etsu Chemical Co., Ltd.
Masaki Ohashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Photosensitive resin composition, method for producing resist patte...
Patent number
12,174,538
Issue date
Dec 24, 2024
JSR Corporation
Naoki Nishiguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist composition and patterning process
Patent number
12,169,360
Issue date
Dec 17, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Resist composition and method for producing resist pattern
Patent number
12,164,229
Issue date
Dec 10, 2024
Sumitomo Chemical Company, Limited
Masako Sugihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Actinic ray-sensitive or radiation-sensitive resin composition, act...
Patent number
12,164,230
Issue date
Dec 10, 2024
FUJIFILM Corporation
Taro Miyoshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Chemically amplified positive resist composition and resist pattern...
Patent number
12,164,231
Issue date
Dec 10, 2024
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist composition and resist pattern forming method
Patent number
12,140,867
Issue date
Nov 12, 2024
Tokyo Ohka Kogyo Co., Ltd.
Tsuyoshi Nakamura
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Sulfonium salt, photoacid generator, curable composition and resist...
Patent number
12,129,240
Issue date
Oct 29, 2024
San-Apro Ltd.
Takuto Nakao
C07 - ORGANIC CHEMISTRY
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Resist composition and method of forming resist pattern
Patent number
12,099,298
Issue date
Sep 24, 2024
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Radiation-sensitive resin composition, method for forming resist pa...
Patent number
12,092,957
Issue date
Sep 17, 2024
JSR Corporation
Kazuya Kiriyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resin, photoresist composition, and method of manufacturing semicon...
Patent number
12,085,855
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Siao-Shan Wang
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Resist composition and pattern forming process
Patent number
12,072,628
Issue date
Aug 27, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Photoresist with polar-acid-labile-group
Patent number
12,050,404
Issue date
Jul 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Actinic ray-sensitive or radiation-sensitive resin composition, res...
Patent number
12,038,689
Issue date
Jul 16, 2024
FUJIFILM Corporation
Akihiro Kaneko
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Method for producing substrate with patterned film
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12,038,691
Issue date
Jul 16, 2024
Central Glass Company, Limited
Yuzuru Kaneko
H01 - BASIC ELECTRIC ELEMENTS
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Method for producing substrate with patterned film and fluorine-con...
Patent number
12,038,692
Issue date
Jul 16, 2024
Central Glass Company, Limited
Yuzuru Kaneko
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Quantum dot film, quantum dot device, and display panel
Patent number
12,031,071
Issue date
Jul 9, 2024
BOE Technology Group Co., Ltd.
Wenhai Mei
G02 - OPTICS
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Lithography techniques for reducing defects
Patent number
12,025,920
Issue date
Jul 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ming-Hui Weng
H01 - BASIC ELECTRIC ELEMENTS
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Electronic system and method of specimen qualification
Patent number
12,019,032
Issue date
Jun 25, 2024
NANYA TECHNOLOGY CORPORATION
Hung-Chih Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist composition and patterning process
Patent number
12,001,139
Issue date
Jun 4, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Positive resist composition for EUV lithography and method of formi...
Patent number
11,988,964
Issue date
May 21, 2024
Zeon Corporation
Manabu Hoshino
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Method of forming patterns using resist underlayer composition
Patent number
11,982,943
Issue date
May 14, 2024
Samsung SDI Co., Ltd.
Jaeyeol Baek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Semiconductor devices and methods of manufacturing
Patent number
11,977,333
Issue date
May 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
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Polybenzoxazole precursor and application thereof
Patent number
11,976,170
Issue date
May 7, 2024
Microcosm Technology Co., Ltd.
Steve Lien-chung Hsu
H01 - BASIC ELECTRIC ELEMENTS
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Cross-linked polymer for resist
Patent number
11,971,660
Issue date
Apr 30, 2024
Maruzen Petrochemical Co., LTD
Tomohiro Masukawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Photoresist composition and method of manufacturing a semiconductor...
Patent number
11,966,162
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tzu-Yang Lin
B82 - NANO-TECHNOLOGY
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Radiation-sensitive resin composition and method for forming pattern
Patent number
11,966,160
Issue date
Apr 23, 2024
JSR Corporation
Ryuichi Nemoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Radiation-sensitive resin composition, method of forming resist pat...
Patent number
11,966,161
Issue date
Apr 23, 2024
JSR Corporation
Takuhiro Taniguchi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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last 30 patents
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ACETAL MODIFIER, POLYMER, CHEMICALLY AMPLIFIED POSITIVE RESIST COMP...
Publication number
20250028244
Publication date
Jan 23, 2025
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
C07 - ORGANIC CHEMISTRY
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RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20250020999
Publication date
Jan 16, 2025
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
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ELECTRONIC DEVICE MANUFACTURING SOLUTION, METHOD FOR MANUFACTURING...
Publication number
20240425777
Publication date
Dec 26, 2024
Merck Patent GmbH
KAZUMA YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
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CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240402599
Publication date
Dec 5, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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RADIATION-SENSITIVE RESIN COMPOSITION AND PATTERN FORMATION METHOD
Publication number
20240393688
Publication date
Nov 28, 2024
JSR Corporation
Ryuichi NEMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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DRY PHOTORESIST OR HARDMASK FOR EUV LITHOGRAPHY
Publication number
20240385505
Publication date
Nov 21, 2024
International Business Machines Corporation
Gerhard Ingmar Meijer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240385517
Publication date
Nov 21, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
POSITIVE TYPE PHOTORESIST COMPOSITION, METHOD OF FORMING PHOTORESIS...
Publication number
20240377740
Publication date
Nov 14, 2024
Samsung Electronics Co., Ltd.
Jooyoung Song
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD OF FORMING RESIST PAT...
Publication number
20240377742
Publication date
Nov 14, 2024
JSR Corporation
Ken MARUYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ONIUM SALT, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING...
Publication number
20240377733
Publication date
Nov 14, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
C07 - ORGANIC CHEMISTRY
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Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240377741
Publication date
Nov 14, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES
Publication number
20240377744
Publication date
Nov 14, 2024
Geminatio, Inc.
Brennan Peterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING PATTERN
Publication number
20240369928
Publication date
Nov 7, 2024
JSR Corporation
Ken MARUYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Resist Material, Resist Composition, And Patterning Process
Publication number
20240361691
Publication date
Oct 31, 2024
Shin-Etsu Chemical Co., Ltd.
Yutaro OTOMO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND R...
Publication number
20240337927
Publication date
Oct 10, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20240337938
Publication date
Oct 10, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240337939
Publication date
Oct 10, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ACETAL MODIFIER, POLYMER, CHEMICALLY AMPLIFIED POSITIVE RESIST COMP...
Publication number
20240329532
Publication date
Oct 3, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD FOR PRODUCING SUBSTRATE WITH PATTERNED FILM
Publication number
20240319606
Publication date
Sep 26, 2024
Central Glass Company, Limited
Yuzuru KANEKO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR PRODUCING SUBSTRATE WITH PATTERNED FILM AND FLUORINE-CON...
Publication number
20240319607
Publication date
Sep 26, 2024
Central Glass Company, Limited
Yuzuru KANEKO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
Publication number
20240310725
Publication date
Sep 19, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LITHOGRAPHY TECHNIQUES FOR REDUCING DEFECTS
Publication number
20240310735
Publication date
Sep 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hui WENG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
RESIST COMPOSITION, RESIST PATTERN FORMING METHOD, AND POLYMER
Publication number
20240295814
Publication date
Sep 5, 2024
Tokyo Ohka Kogyo Co., Ltd.
Keiichi IBATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ELECTRONIC SYSTEM OF SPECIMEN QUALIFICATION
Publication number
20240295505
Publication date
Sep 5, 2024
NANYA TECHNOLOGY CORPORATION
Hung-Chih CHANG
G01 - MEASURING TESTING
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Patent Application
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING A SEMICONDUCTOR...
Publication number
20240280903
Publication date
Aug 22, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Tzu-Yang LIN
B82 - NANO-TECHNOLOGY
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ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND R...
Publication number
20240280900
Publication date
Aug 22, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PHOTORESIST COMPOSITION AND USE THEREOF
Publication number
20240280901
Publication date
Aug 22, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PREFERENTIAL INFILTRATION IN LITHOGRAPHIC PROCESS FLOW FOR EUV CAR...
Publication number
20240272552
Publication date
Aug 15, 2024
Applied Materials, Inc.
GABRIELA ALVA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACT...
Publication number
20240272553
Publication date
Aug 15, 2024
FUJIFILM CORPORATION
YUMA KURUMISAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACT...
Publication number
20240241443
Publication date
Jul 18, 2024
FUJIFILM CORPORATION
Eiji FUKUZAKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY