Claims
- 1. A beam steering apparatus comprising:a) a first N×M array of mirrors, wherein N and M are integers and each mirror in the first array is configured to rotate about a single first axis; and b) a second N×M array of mirrors, wherein each mirror in the second array is configured to rotate about a single second axis; further comprising at least one photodetector, wherein a signal input to the beam steering apparatus may be steered onto said photodetector, wherein each mirror in the first or second array may be coupled to a corresponding fiber in an N×M fiber array.
- 2. A beam steering apparatus comprising:a) a first N×M array of mirrors, wherein N and M are integers and each mirror in the first array is configured to rotate about a single first axis; and b) a second N×M array of mirrors, wherein each mirror in the second array is configured to rotate about a single second axis; further comprising a column photodetector array, wherein a signal input to the beam steering apparatus may be steered onto any row in said column photodetector array, wherein each mirror in the first or second array may be coupled to a corresponding fiber in an N×M fiber array.
- 3. A beam steering apparatus comprising:a) a first N×M array of mirrors, wherein N and M are integers and each mirror in the first array is configured to rotate about a single first axis; and b) a second N×M array of mirrors, wherein each mirror in the second array is configured to rotate about a single second axis; further comprising a row photodetector array, wherein a signal input to the beam steering apparatus may be steered onto any column in said row photodetector array, wherein each mirror in the first or second array may be coupled to a corresponding fiber in an N×M fiber array.
- 4. A beam steering apparatus comprising:a) a first N×M array of mirrors, wherein N and M are integers and each mirror in the first array is configured to rotate about a single first axis; and b) a second N×M array of mirrors, wherein each mirror in the second array is configured to rotate about a single second axis; further comprising a grid photodetector array, wherein a signal input to the beam steering apparatus may be steered onto any row and column in said photodetector array, wherein each mirror in the first or second array may be coupled to a corresponding fiber in an N×M fiber array.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuation of and claims priority from commonly assigned application Serial No. 09/536,164 filed Mar. 25, 2000, now U.S. Pat. No. 6,330,102. This application is related to the following copending U.S. provisional applications, all of which are herein incorporated by reference; “Two-Dimensional Gimbaled Scanning Actuator with Vertical Electrostatic Comb-Drive for Actuation and/or Sensing” of Behrang Behin, Michael J. Daneman, Meng-Hsiang Kiang, Kam-Yin Lau, and Satinderpall Pannu, application Ser. No. 60/191,987 filed Mar. 24, 2000, and “Self-Aligned Comb-Drive Actuators” of Behrang Behin and Satinderpall Pannu, application Ser. No. 60/191,856 files Mar. 24, 2000 and “Multi-Layer, Self-Aligned Vertical Comb-Drive Electrostatic Actuators and Fabrication Methods” of Behrang Behin and Satinderpall Pannu, application No. 60/192,097 filed Mar. 24, 2000.
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Dec 1996 |
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Provisional Applications (3)
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Number |
Date |
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60/191987 |
Mar 2000 |
US |
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60/191856 |
Mar 2000 |
US |
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60/192097 |
Mar 2000 |
US |
Continuations (1)
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Number |
Date |
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Parent |
09/536164 |
Mar 2000 |
US |
Child |
09/917490 |
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US |