Claims
- 1. A vernier alignment structure for measuring distance comprising:a transmitter chip comprising a plurality of transmitter pads spaced along a first line at a pitch of x, said transmitter chip actively driving complementary waveforms from an input signal in an alternating pattern over said plurality of transmitter pads; a receiving chip comprising a plurality of receiving pads spaced along a second line at a pitch of y, said first line in parallel with said second line and separated by a distance; and a plurality of sensing circuits coupled to said plurality of receiving pads, said plurality of sensing circuits able to measure a change in said distance through capacitive coupling between said plurality of transmitting pads and said plurality of receiving pads.
- 2. The vernier alignment structure as described in claim 1, wherein at least one of said plurality of sensing circuits comprises:a CMOS inverter amplifier coupled to an input node, said CMOS inverter amplifier for amplifying a second input signal from an associated receiving pad; a resistive feedback circuit coupled to said CMOS inverter amplifier and for cancelling an offset voltage associated with said CMOS inverter amplifier; a bias circuit coupled to said resistive feedback circuit and for biasing said resistive feedback circuit in a minimally on state to maintain high impedance for said resistive feedback circuit; and a clamping circuit coupled to said resistive feedback circuit for restricting output swing of an output signal of said CMOS inverter amplifier to maintain said high impedance.
- 3. The vernier alignment structure as described in claim 1, wherein said plurality of sensing circuit are able to measure said distance.
- 4. The vernier alignment structure as described in claim 1, wherein said input signal is a clock signal.
- 5. The vernier alignment structure as described in claim 1, further comprising:an inverter coupled to said input signal for providing said complementary clock waveforms.
- 6. The vernier alignment structure as described in claim 1, wherein said plurality of receiving pads number less than said plurality of transmitter pads.
- 7. The vernier alignment structure as described in claim 1, wherein each of said plurality of receiving pads have approximately 10 fF of parasitic capacitance.
- 8. The vernier alignment structure as described in claim 2, wherein said second input signal comprises a capacitively coupled differential clock signal from said plurality of transmitting pads and said plurality of receiving pads.
- 9. The vernier alignment structure as described in claim 8, wherein said differential clock signal comprises a 3.3 volt clock signal coupled through a minimum of 0.1 fF differential coupling capacitance and having a frequency of between 0-20 MHz.
- 10. The vernier alignment structure as described in claim 2, wherein said resistive feedback circuit biases said CMOS inverter amplifier to a threshold voltage associated with said CMOS inverter amplifier to cancel said offset voltage.
- 11. The vernier alignment structure as described in claim 2, wherein said resistive feedback circuit comprises:a PMOS transistor comprising a PMOS source coupled to an output of said CMOS inverter amplifier that provides said output signal, a PMOS gate, and a PMOS drain coupled to said input node; and an NMOS transistor comprising an NMOS drain coupled to said PMOS source, an NMOS gate, and an NMOS source coupled to said output.
- 12. The vernier alignment structure as described in claim 2, wherein said bias circuit comprises:a second CMOS inverter amplifier of similar dimension to said CMOS inverter amplifier, said second CMOS inverter amplifier comprising a PMOS transistor and an NMOS transistor in a standard inverter configuration; and an NMOS diode coupled in series between said PMOS transistor and said NMOS transistor, said NMOS diode for providing a p-bias voltage from said PMOS transistor to said resistive feedback circuit that is slightly lower than a threshold voltage associated with said CMOS inverter amplifier, and an n-bias voltage from said NMOS transistor that is slightly higher than said threshold voltage.
- 13. The vernier alignment structure as described in claim 2, wherein said clamp circuit comprises:a PMOS transistor comprising a PMOS source coupled to an output of said CMOS inverter amplifier that provides said output signal, a PMOS gate coupled to a first bias voltage slightly lower than a threshold voltage of said CMOS inverter amplifier, and a PMOS drain coupled to a bias node; said bias node; an NMOS transistor comprising an NMOS drain coupled to bias node, an NMOS gate coupled to a second bias voltage slightly higher than said threshold voltage, and an NMOS source coupled to said output; and a second CMOS inverter amplifier of similar dimension to said CMOS inverter amplifier, and comprising a second input coupled to said bias node and a second output coupled to said bias node.
- 14. The vernier alignment structure as described in claim 2, wherein said CMOS inverter amplifier is a first amplification stage, and further comprising:a second amplification stage comprising a second CMOS inverter amplifier coupled to said output, said second CMOS inverter amplifier of similar dimension and configuration as said CMOS inverter amplifier; and a third amplification stage comprising a third CMOS inverter amplifier coupled to said second CMOS inverter amplifier.
Parent Case Info
This is a divisional of application(s) Ser. No. 10/356,450 filed on Jan. 31, 2003, now as U.S. Pat. No. 6,753,726, which is designated in the U.S.
US Referenced Citations (6)