BRIEF DESCRIPTION OF THE DRAWINGS
The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:
FIG. 1 illustrates a conventional apparatus for cleaning a chamber;
FIG. 2 illustrates an example of a gas separation type showerhead used for the present invention;
FIG. 3 illustrates a three-dimensional cross section of a gas separation module and a gas injection module of the gas separation type showerhead shown in FIG. 2;
FIGS. 4 to 6 illustrate examples of a system for supplying a cleaning gas used for the present invention;
FIGS. 7 and 8 illustrate an injection shape of a cleaning gas injected from the gas separation type showerhead shown in FIG. 2;
FIG. 9 illustrates another example of a system of supplying a cleaning gas used for the present invention;
FIGS. 10 and 11 illustrate injection shapes of a mixed cleaning gas and a gas for preventing back flow injected from the gas separation type showerhead shown in FIG. 2;
FIG. 12 illustrates another example of a gas separation type showerhead used for the present invention;
FIGS. 13 to 15 are bottom plan views of a third gas injection module of the gas separation type showerhead shown in FIG. 12;
FIGS. 16 and 17 are side views of the third gas injection module of the gas separation type showerhead shown in FIG. 12; and
FIGS. 18 to 22 illustrate injection shapes of gases injected from the gas separation type showerhead shown in FIG. 12.