Claims
- 1. A detecting apparatus for detecting defects of wires on a wiring board including at least one layer of wires, characterized by comprising:
- an optical sensor including a transparent substrate, a transparent electrode disposed on said transparent electrode, a film of a polymer non-linear optical material disposed on said transparent electrode, and a reflective film disposed on said film, and positioned close to a wire to be measured on said wiring board and without contacting same;
- a sensor head including a light source, optical means for guiding light from said light source into said optical sensor, and detecting means for detecting reflected light from said optical sensor to derive a signal corresponding to the intensity of said reflected light when said wire is applied with a voltage; and
- a processing unit for processing said signal derived from said detecting means to output a signal corresponding to the presence or absence of a defect on said wire.
- 2. A detecting apparatus according to claim 1, characterized in that said polymer non-linear optical material has a structure expressed by the following formula I or formula II: ##STR8## where P is a main chain of a non-linear optical active copolymer, S is a spacer group comprising a direct coupling or a straight-chain hydrocarbon radical having a number of carbon atoms ranging from 1 to 20, �X--Y--Z! is a chromophore having a non-linear optical activity, X is an electron donative group, Y is a .pi.-electron conjugated system, Z is an electron attractive group, A is a copolymer unit which has no non-linear optical activity, and B is a copolymer unit and/or a functional copolymer unit having another function.
- 3. A detecting apparatus according to claim 2, characterized in that said main chain unit P is a polyvinyl system, a polysiloxane system, polyoxyalkylene system, a polyvinylidene system, a polyurethan system, a polytriazine system, a polyester system, or a polyamide system.
- 4. A detecting apparatus according to claim 1, characterized in that said optical sensor and said sensor head are integrated.
- 5. A detecting apparatus according to claim 1, characterized in that said optical sensor and said sensor head are separated.
- 6. A detecting apparatus according to claim 5, characterized in that the dimension of said optical sensor is substantially equal to the dimension of said wiring board.
- 7. A detecting apparatus according to claim 1, characterized in that said defects on wires are narrower or disconnected wires, short-circuit between said wires, or any combination thereof.
- 8. A detecting apparatus according to claim 1, characterized in that light incident to said optical sensor 1 by said optical means is linear or planar.
- 9. A detecting apparatus according to claim 1, characterized in that a voltage applied to said wires has a frequency ranging from 50 kHz to 100 kHz.
- 10. A detecting apparatus according to claim 1, characterized in that said wiring board is a printed wiring board.
- 11. A detecting apparatus according to claim 10, characterized by simultaneously detecting defects on wires on each of layers of said multiple-layer printed wiring board.
- 12. A detecting apparatus according to claim 1, characterized in that said wiring board is a liquid-crystal display panel.
- 13. A detecting apparatus according to claim 12, characterized in that said liquid-crystal display panel is a simple matrix type panel.
- 14. A detecting apparatus according to claim 12, characterized in that said liquid-crystal display panel is an active matrix type panel.
- 15. A detecting apparatus according to claim 12, characterized in that said defects of wires are detected in a condition where said liquid crystal display panel is coated with an orientation film.
- 16. A detecting apparatus according to claim 1, characterized in that said wiring board is a package for an integrated circuit.
- 17. A detecting apparatus according to claim 16, characterized in that said package for an integrated circuit is any one of PGA, PPGA, BGA, and PBGA.
Priority Claims (2)
Number |
Date |
Country |
Kind |
5-328082 |
Dec 1993 |
JPX |
|
6-93396 |
May 1994 |
JPX |
|
Parent Case Info
This application is a continuation of application Ser. No. 08/663,295, filed Jun. 21, 1996, as the National Phase of PCT/JP94/02189, filed Dec. 22, 1994, designating the U.S. application Ser. No. 08/663,295, now abandoned, is a continuation of, is based upon, and claims priority from, PCT Application PCT/JP94/02189, filed Dec. 22, 1994, designating the U.S., claiming priority from Japanese applications Hei-5-328082 filed on Dec. 24, 1993 and Hei-6-93396 filed on May 2, 1994.
US Referenced Citations (9)
Foreign Referenced Citations (6)
Number |
Date |
Country |
42 13 155 |
Nov 1992 |
DEX |
42 13 155 A1 |
Nov 1992 |
DEX |
4-37825 |
Feb 1992 |
JPX |
5-87839 |
Apr 1993 |
JPX |
WO9103683 |
Mar 1991 |
WOX |
WO 9103683 |
Mar 1991 |
WOX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
663295 |
Jun 1996 |
|