Number | Date | Country | Kind |
---|---|---|---|
6-072017 | Apr 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
H566 | Nyaiesh | Jan 1989 | |
4050408 | Beucherie | Sep 1977 | |
4421786 | Mahajan | Dec 1983 | |
4641603 | Miyazaki et al. | Feb 1987 | |
4664747 | Sekiguchi | May 1987 | |
4828369 | Hotomi | May 1989 | |
4971832 | Arai | Nov 1990 | |
5018479 | Markunas | May 1991 | |
5020200 | Mimasaka et al. | Jun 1991 | |
5091049 | Campbell | Feb 1992 | |
5122251 | Campbell | Jun 1992 | |
5180435 | Markunas | Jan 1993 | |
5425810 | Conti et al. | Jun 1995 | |
5429070 | Campbell | Jul 1995 | |
5436528 | Paranjpe | Jul 1995 |
Number | Date | Country |
---|---|---|
A0424256 | Apr 1991 | EPX |
A2677841 | Dec 1992 | FRX |
52-60570 | May 1977 | JPX |
58-197724 | Nov 1983 | JPX |
61-64124 | Apr 1986 | JPX |
368773 | Mar 1991 | JPX |
61-174376 | Aug 1991 | JPX |
5-78838 | Mar 1993 | JPX |
5-148634 | Jun 1993 | JPX |
5-243155 | Sep 1993 | JPX |
59-193904 | Nov 1994 | JPX |
Entry |
---|
P.C. Karr, Vacuum Deposition of Material Films on Substrates Utilizing Controlled Plasma, IBM Technical Disclosure Bulletin, vol. 19, No. 5, Oct. 1976. |
Patent Abstracts of Japan, vol. 12, No. 082 15 Mar. 1988. |