Number | Date | Country | Kind |
---|---|---|---|
3446584 | Dec 1984 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4253112 | Domens | Feb 1981 | |
4616130 | Omata | Oct 1986 |
Entry |
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Domens et al., "Automatic Mask Alignment for X-ray Microlithography", Siemens Research and Development Reports, vol. 13, No. 2, 1984, pp. 43-47. |