Soft and stretchable electronics are being integrated into next-generation electronic devices in a broad range of emerging fields, including soft robotics, wearable electronics, biomedical devices, and human-machine interfaces. Encouraging progress has been made in developing novel materials and architectures for stretchable sensors, displays, heaters, energy storage devices, and integrated circuits. However, the field still lacks highly stretchable, multilayer electronic circuits with integrated computation, efficient data transmission, and minimal electrical losses. Commercial electronics can provide a wide range of unobtrusive, inexpensive, high-performance integrated circuits (ICs), ranging from microcontrollers to amplifiers, but creating stretchable circuits with these ICs requires a robust interface between each circuit element.
Three common strategies to enable stretchable electronics are structure-based stretchable conductors, intrinsically stretchable conductors, and conductive composites. Highly conductive, inextensible thin metal films can be geometrically patterned to gain out-of-plane deformability and linear stretchability. Although such films interface well with traditional electronic components, their stretchability and component areal density are often limited. Intrinsically stretchable conductors—such as room temperature liquid metals (e.g. eutectic gallium-indium or eGaIn), ionic conductors, and conducting polymers—do not require sophisticated patterning, but each suffers from a range of problems, including leaking, dehydration embrittlement, or low conductivity. Conductive inclusion polymer composites are also stretchable without complex patterning, but usually suffer from low maximum strains and high resistance.
Significant effort has been devoted to making reliable junctions between stretchable parts and commercially available, high performance ICs. One popular approach, placing conventional electronic components onto strain-isolating (rigid) islands, reduces both the stretchability and durability of the resulting circuits. Another approach uses liquid metal droplets or solder paste to make temporary connections, but stretchability of these solutions is usually limited to less than 100%, without consistent cyclic performance. Overall, a facile and scalable process to attain reliable conductor-component interfaces under large repetitive strain is still missing.
Thus, there is a need in the art for materials and processes for creating stretchable versions of conventional printed circuit board (PCB) assemblies, to create highly stretchable conductive traces and robust interfaces between soft and rigid electronic components. A suitable material should be a printable material that maintains a near-constant resistance under extreme strains, maintains direct, consistent, and stretchable electrical connections with conventional electronic components, and is mechanically stable when applied onto numerous soft materials.
In one aspect, the present invention provides a biphasic composition. The composition comprises a conductive liquid and a particulate suspended in the conductive liquid, wherein the composition has a maximum normalized resistance of about 1 to about 15 at 400% strain. In some embodiments, the composition has a maximum normalized resistance of about 5 to about 8 at 400% strain. In some embodiments, the conductive liquid comprises at least one of an alkali metal, an alkaline earth metal, a post-transition metal, and a late transition metal. In some embodiments, the conductive liquid comprises gallium, indium, lead, mercury, tin, zinc, silver, gold, copper, silicon, bismuth, a non-eutectic mixture thereof, or a eutectic mixture thereof. In some embodiments, the conductive liquid comprises gallium and indium. In some embodiments, the particulate is selected from the group consisting of gallium oxide, a lithium oxide, a metal oxide, a group 13 oxide, silicon, doped silicon, a silicon oxide, germanium, indium antimonide, indium oxide, chromium oxide, silver, gold, nickel, copper, tin, and metal flakes. In some embodiments, the particulate is gallium oxide. In some embodiments, the particulate has a median particle size between 100 nm and 200 microns. In some embodiments, the volumetric ratio of particulate to conductive liquid is between 0.02 and 0.70. In some embodiments, the volumetric ratio of particulate to conductive liquid is between 0.45 and 0.55. In some embodiments, at least 50% of the particulate deviate no more than between 100 nm and 400 nm from the median particle size. In some embodiments, at least 65% of the particulate deviate no more than between 100 nm and 400 nm from the median particle size. In some embodiments, the particulate is crystalline. In some embodiments, the particulate is amorphous. In some embodiments, the particulate comprises both a crystalline and an amorphous particulate. In some embodiments, the particulate is semi-conductive. In some embodiments, the particulate is non-conductive. In some embodiments, the particulate is conductive.
In another aspect, the present invention provides a stretchable circuit board assembly. The assembly comprises at least one stretchable substrate layer, at least one conductive trace comprising any of the biphasic compositions described herein and positioned over at least one surface of the stretchable substrate, at least one electrical component electrically connected to the at least one conductive trace and positioned over the at least one surface of the stretchable substrate, optionally at least one stretchable encapsulating layer positioned over the at least one stretchable substrate, the at least one trace, and the at least one electrical component, configured to cover the at least one trace and the at least one electrical component, and optionally at least one vertical interconnected access (VIA) connecting at least two traces across at least one stretchable substrate layer, at least one encapsulating layer or a combination thereof. In some embodiments, the assembly further comprises an adhesive configured to secure the at least one electrical component to the stretchable substrate, and at least one electrical lead electrically connected to the at least one trace, the electrical lead configured to electrically connect the at least one trace to at least one external electrical system. In some embodiments, the at least one stretchable substrate is selected from the group consisting of VHB tape, paper, high-porosity foam, rubber, tape, silicone, polyimide, fabric, spandex, latex and combinations thereof. In some embodiments, the at least one stretchable substrate is porous. In some embodiments, the at least one stretchable substrate is modified by drilling, cutting, or a combination thereof of the stretchable substrate. In some embodiments, the stretchable encapsulating layer is porous. In some embodiments, the stretchable encapsulating layer is modified by drilling, cutting, or a combination thereof of the stretchable encapsulating layer. In some embodiments, the assembly further comprises a second stretchable encapsulating layer positioned over the at least one trace, at least one second trace positioned over the second stretchable encapsulating layer, electrically connected to the at least one electrical component, and at least one vertical interconnect access (VIA) electrically connected to the at least one trace and the at least one second trace. In some embodiments, the at least one stretchable substrate comprises at least one additive, at least one tackifier, at least one adhesive, or a combination thereof. In some embodiments, the at least one additive is selected from the group consisting of silanes, primers, coupling agents, tactile mutators, oxidizers, acids, bases and combinations thereof. In some embodiments, the assembly further includes surface treating the at least one stretchable substrate or the at least one electrical component. In some embodiments, the surface treating is plasma treatment. In some embodiments, the at least one electrical component is surface treated on at least a portion of at least one surface. In some embodiments, the at least one surface treated electrical component is plasma treated or coated with silanes, coupling agents, adhesives, oxidizers, acids, bases or combinations thereof. In some embodiments, the at least one electrical component is selected from the group consisting of copper pads, integrated circuits, silicon dies, resistors, capacitors, inductors, wires, optical components, antennas, displays, user interfaces, sensors, actuators, other circuit board assemblies and combinations thereof.
In another aspect, the present invention provides a method of using a stretchable circuit board assembly. The method includes the steps of providing at least one stretchable circuit board assembly comprising at least one stretchable substrate layer, at least one conductive trace comprising any of the biphasic compositions described herein and positioned over at least one surface of the stretchable substrate, at least one electrical component electrically connected to the at least one conductive trace and positioned over the at least one surface of the stretchable substrate, optionally at least one stretchable encapsulating layer positioned over the at least one stretchable substrate, the at least one trace, and the at least one electrical component, configured to cover the at least one trace and the at least one electrical component, and optionally at least one vertical interconnected access (VIA) connecting at least two traces across at least one stretchable substrate layer, at least one encapsulating layer or a combination thereof, and incorporating the at least one stretchable circuit board assembly into a wearable garment for sleep studies, diagnosis of sleep disorders, health tracking, fitness tracking, physical rehabilitation or combinations thereof.
In another aspect, the present invention provides a method of using a stretchable circuit board assembly including the steps of providing at least one stretchable circuit board assembly comprising at least one stretchable substrate layer, at least one conductive trace comprising any of the biphasic compositions described herein and positioned over at least one surface of the stretchable substrate, at least one electrical component electrically connected to the at least one conductive trace and positioned over the at least one surface of the stretchable substrate, optionally at least one stretchable encapsulating layer positioned over the at least one stretchable substrate, the at least one trace, and the at least one electrical component, configured to cover the at least one trace and the at least one electrical component, and optionally at least one vertical interconnected access (VIA) connecting at least two traces across at least one stretchable substrate layer, at least one encapsulating layer or a combination thereof, and incorporating the at least one stretchable circuit board assembly into a robotic system comprising one or more robots, robot-robot interfaces, human-robot interfaces, or combinations thereof.
In another aspect, the present invention provides a method of using a stretchable circuit board assembly comprising the steps of providing at least one stretchable circuit board assembly comprising at least one stretchable substrate layer, at least one conductive trace comprising any of the biphasic compositions described herein and positioned over at least one surface of the stretchable substrate, at least one electrical component electrically connected to the at least one conductive trace and positioned over the at least one surface of the stretchable substrate, optionally at least one stretchable encapsulating layer positioned over the at least one stretchable substrate, the at least one trace, and the at least one electrical component, configured to cover the at least one trace and the at least one electrical component, and optionally at least one vertical interconnected access (VIA) connecting at least two traces across at least one stretchable substrate layer, at least one encapsulating layer or a combination thereof, and incorporating the at least one stretchable circuit board assembly into an electronic device selected from the group consisting of a cell phone, a haptic device, a tablet, a display, a virtual reality headset, a handset, a sensor, an array of sensors, a gaming device, and combinations thereof.
The foregoing purposes and features, as well as other purposes and features, will become apparent with reference to the description and accompanying figures below, which are included to provide an understanding of the invention and constitute a part of the specification, in which like numerals represent like elements, and in which:
where the capacitive reactance
and cutoff frequency
are both directly correlated with the resistance value. (c) The magnitude in dB
as a function as a function of frequency of the bGaIn circuit at different strains (0%-400%) and the eGaIn circuit at 0% strain. Stretching the bGaIn circuit to different strains had a negligible impact on the output signal and cutoff frequency (˜936 Hz). (d) Shorted eGaIn circuit after stretching to less than 100% strain due to the low mechanical stability of the eGaIn trace.
It is to be understood that the figures and descriptions of the present invention have been simplified to illustrate elements that are relevant for a clear understanding of the present invention, while eliminating, for the purpose of clarity, many other elements found in related systems and methods. Those of ordinary skill in the art may recognize that other elements and/or steps are desirable and/or required in implementing the present invention. However, because such elements and steps are well known in the art, and because they do not facilitate a better understanding of the present invention, a discussion of such elements and steps is not provided herein. The disclosure herein is directed to all such variations and modifications to such elements and methods known to those skilled in the art.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Although any methods and materials similar or equivalent to those described herein can be used in the practice or testing of the present invention, exemplary methods and materials are described.
As used herein, each of the following terms has the meaning associated with it in this section.
The articles “a” and “an” are used herein to refer to one or to more than one (i.e., to at least one) of the grammatical object of the article. By way of example, “an element” means one element or more than one element.
“About” as used herein when referring to a measurable value such as an amount, a temporal duration, and the like, is meant to encompass variations of ±20%, ±10%, ±5%, ±1%, and ±0.1% from the specified value, as such variations are appropriate.
Throughout this disclosure, various aspects of the invention can be presented in a range format. It should be understood that the description in range format is merely for convenience and brevity and should not be construed as an inflexible limitation on the scope of the invention. Accordingly, the description of a range should be considered to have specifically disclosed all the possible subranges as well as individual numerical values within that range. For example, description of a range such as from 1 to 6 should be considered to have specifically disclosed subranges such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6 etc., as well as individual numbers within that range, for example, 1, 2, 2.7, 3, 4, 5, 5.3, 6 and any whole and partial increments therebetween. This applies regardless of the breadth of the range.
In one aspect, the present disclosure relates to a strain insensitive conductive material comprising a conductive liquid and a suspended particulate. The disclosed material is less resistive upon strain when compared to bulk conductors, such as copper, as defined by Pouillet's law: R/R0=(1+ε)1+2v, where R/R0 is the relative (normalized) resistance change, ε is the applied strain, and v is the Poisson's ratio, which is most often assumed to be 0.5 for incompressibility. Pouillet's law predicts large increases in resistance even at moderate strains for bulk conductors, which is ideal for resistive sensors, but prohibits the use of stretchable bulk conductors for power circuits, computational circuits, etc. In various embodiments, the material maintains a resistance of less than about 5 Ohms at about 400% strain.
In one embodiment, the conductive liquid is a liquid metal. Exemplary conductive liquids may include but are not limited to, gallium, indium, lead, mercury, tin, zinc, silver, gold, copper, silicon, a biphasic mixture thereof, and a eutectic mixture thereof. In one embodiment, the conductive liquid comprises an alkali metal. In one embodiment, the conductive liquid comprises an alkali earth metal. In one embodiment, the conductive liquid comprises a post-transition metal. In one embodiment, the conductive liquid comprises a late transition metal. In one embodiment, the eutectic mixture of Ga and In includes 75.5 wt % Ga and 24.5 wt % In. In another embodiment, non-eutectic mixtures of Ga and In may be utilized with the Ga ranging from 70 to 93 wt % and the indium ranging from 7 to 30%. In another embodiment, the conductive liquid may be solid at room temperature and have another specified melting temperature ranging from 15 deg. C. to 110 deg. C., or 15 deg. C. to 37 deg. C.
In one embodiment, the particulate is a metal oxide. Exemplary particulates may include but are not limited to, a gallium oxide, a lithium oxide, a metal oxide, a group 13 oxide, silicon, doped silicon, a silicon oxide, germanium, indium antimonide. In one embodiment, the particulate is crystalline. In one embodiment, the particulate is amorphous. In one embodiment, the particulate is both crystalline and amorphous. In one embodiment, the particulate is non-conductive. In one embodiment, the particulate is semi-conductive. In one embodiment, the particulate has a median particle size between 0 and 50 μm, wherein at least 80% of the particles deviate no more than between 0 and 20 μm from the median particle size.
In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.02 and 0.70. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.02 and 0.10. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.05 and 0.10. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.10 and 0.70. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.20 and 0.70. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.30 and 0.70. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.40 and 0.50. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.40 and 0.60. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.40 and 0.70. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.50 and 0.60. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.50 and 0.70. In one embodiment, the volumetric ratio of particulate to conductive liquid is between 0.60 and 0.70.
Sufficient wetting is achieved between the conductive liquid and particulate to stabilize the liquid. For the purposes of this disclosure, “sufficient” means that the liquid metal can percolate through the interstices of solid particles, without seeing any separations between liquid and solid. Sufficient wetting may be achieved by heating liquid metal particles at high temperature (800 deg. C. or higher) to create biphasic material in situ. As a comparison, directly mixing solid particles with liquid metal can lead to separations. In another embodiment, the solid particles may be created in situ, and for example, by letting the liquid metal react with a specified environment in order to create solid particles within the liquid metal. Traditional patterning of thin films is challenging because of the high surface tension of conductive liquids which causes beading and subsequent deviation from the desired deposition pattern. Sufficient wetting between the conductive liquid and particulate has been shown to circumvent these challenges by preventing unwanted beading of the conductive liquid, providing ease in processing and patterning of thin films.
Most circuitry is made of copper. As a constant-conductivity bulk conductor, copper theoretically follows Pouillet's law when strained: R/R0=(1+ε)1+2v, where R/R0 is the relative (normalized) resistance change, ε is the applied strain, and v is the Poisson's ratio, which is most often assumed to be 0.5 for incompressibility. Pouillet's law predicts large increases in resistance even at moderate strains for bulk conductors, which is ideal for resistive sensors, but prohibits the use of stretchable bulk conductors for power circuits, computational circuits, etc. The disclosed material given sufficient wetting between the conductive liquid and particulate is a strain-insensitive stretchable conductor.
One embodiment of the disclosed material shows a maximum normalized resistance of about 7 at 400% strain. One embodiment of the disclosed material shows a maximum normalized resistance that is 10% of the maximum normalized resistance of copper at 400% strain. One embodiment of the disclosed material shows a maximum normalized resistance that is 15% of the maximum normalized resistance of copper at 400% strain. One embodiment of the disclosed material shows a maximum normalized resistance that is 20% of the maximum normalized resistance of copper at 400% strain. One embodiment of the disclosed material shows a maximum normalized resistance that is 25% of the maximum normalized resistance of copper at 400% strain. One embodiment of the disclosed material shows a maximum normalized resistance that is 30% of the maximum normalized resistance of copper at 400% strain. One embodiment of the disclosed material shows a maximum normalized resistance that is 35% of the maximum normalized resistance of copper at 400% strain. One embodiment shows maximum normalized resistance of up to 12 at 400% strain.
One embodiment of the disclosed material relates to a biphasic gallium-indium alloy, referred to herein as “bGaIn.” In one embodiment, bGaIn is produced by thermally treating eGaIn nanoparticles to create a mixture of liquid and crystalline solids. One embodiment of bGaIn shows a high initial conductivity of 2.06×106 S m−1, and near-constant resistance at strains over 1000%. BGaIn may be employed as a stretchable interconnect to interface with commercial electronic components, including but not limited to resistors, capacitors, light-emitting diodes (LEDs), operational amplifiers, and microcontrollers, by simply placing the electronics onto the bGaIn trace. One embodiment of the disclosed material is a simple, non-toxic solution for making stretchable conductors with robust interfaces to conventional electronic components, opening up opportunities to mass-manufacture stretchable circuits.
Although certain exemplary embodiments of methods, compositions, and systems are discussed herein using a particular liquid metal (for example GaIn), it is understood that in various embodiments other room temperature liquid metals could be used, for example Galinstan. In one aspect, a method of making the formulation comprises depositing a quantity of nanoparticles onto a substrate or into a crucible, heating the quantity of nanoparticles in an enclosed furnace to a temperature between 800° and 1000° C. for a time duration between 5 minutes and 60 minutes to form a film comprising a conductive liquid and a particulate suspended in the conductive liquid, and cooling the film in ambient conditions. In some embodiments, a temperature range of 800° to 1000° C. and a time duration of 10 to 30 min is preferred.
In another aspect, a method of making the formulation comprises depositing a first quantity of nanoparticles onto a first substrate or into a crucible, heating the first quantity of nanoparticles in an enclosed furnace to a temperature between 800° and 1000° C. for a time duration between 5 minutes and 60 minutes to form a first film comprising a conductive liquid and a particulate suspended in the quantity of conductive liquid, and cooling the first film in ambient conditions. In some embodiments, a temperature range of 800° to 1000° C. and a time duration of 10 to 30 min is preferred.
In one embodiment, the method comprises transferring at least a portion of the film to a second stretchable substrate to form at least one conductive trace, securing one or more electrical components to the at least one trace, and encapsulating the one or more electrical components and the at least one trace with a stretchable encapsulating layer.
In one embodiment, the method comprises positioning a mask over a second stretchable substrate, transferring the film to the unmasked portion of the second stretchable substrate to form at least one conductive metal trace, and removing the mask.
In one embodiment, the method comprises transferring the film to the portion of the second stretchable substrate by means which comprise at least one of: pressing the film against the substrate; scraping the film off the first substrate, mixing the film, and spreading the mixed film over the substrate; printing; spraying; and direct writing.
In one embodiment, the method comprises the steps of: after transferring the film to the portion of the second stretchable substrate, depositing a third stretchable insulating layer over the second stretchable substrate and the film; transferring a second portion of the film to a portion of the third stretchable insulating layer to form at least one second trace; cutting at least one cavity through the at least one trace and the at least one second trace; and filling the at least one cavity with conductive liquid to form a VIA.
In one embodiment, the method comprises depositing a second quantity of particles onto a second substrate, heating the second quantity of particles in an enclosed furnace to a temperature between 800 and 1000° C. for a time duration between 5 minutes and 60 minutes or alternatively 5 to 30 minutes to form a second film comprising a conductive liquid and a particulate suspended in the quantity of conductive liquid, cooling the second film in ambient conditions, transferring at least a portion of the first film to a first surface of a stretchable substrate to form at least one first trace, transferring at least a portion of the second film to a second surface of a stretchable substrate to form at least one second trace, wherein the second surface is opposite the first surface, securing one or more electrical components to the at least one first and second traces, encapsulating the one or more electrical components and the at least one first trace with a first stretchable encapsulating layer, encapsulating the one or more electrical components and the at least one second trace with a second stretchable encapsulating layer, cutting at least one cavity through the at least one first trace and the at least one second trace, and filling the at least one cavity with conductive liquid to form a VIA.
In one embodiment, the method comprises positioning a first mask over the first surface of the stretchable substrate, transferring the first film to the unmasked portion of the first surface to form at least one first trace, removing the first mask, positioning a second mask over the second surface of the stretchable substrate, transferring the second film to the unmasked portion of the second surface to form at least one second trace, and removing the second mask.
EGaIn is a favorable material for stretchable electronics due to its high conductivity, intrinsic stretchability, and printability. However, when exposed to oxygen, eGaIn develops a near-instantaneous gallium oxide layer composed primarily of Ga2O3, which allows liquid metal to adhere to surfaces and adopt stable non-spherical shapes, but also imparts high surface tension (˜624 mN·m−1), making the material challenging to process. To overcome the limitations posed by the high surface tension of liquid metal, in one embodiment, a liquid metal nanoparticle ink was created by sonicating bulk eGaIn in ethanol, and then printing those inks into thin films (see S. Liu, et al., “Laser sintering of liquid metal nanoparticles for scalable manufacturing of soft and flexible electronics,” ACS Applied Materials & Interfaces, 10(33):28232-28241, 2018, incorporated herein by reference). The electrically insulating oxide layer in eGaIn prevents spontaneous particle coalescence and makes the film non-conductive. To reactivate the liquid metal in micron-scale traces, a laser was used to rupture the oxide skins of the nanoparticles and coalesce them into conductive paths. However, it was discovered that, due to severe oxidation and phase segregation, high-temperature thermal sintering often depletes liquid cores of the nanoparticles, creating a pure solid film.
By contrast, the disclosed bGaIn material is in one embodiment created by a general thermal treatment of eGaIn nanoparticles, as shown in
In some embodiments the rheology of the bGaIn is tunable to select favorable electromechanical properties and/or to fit within different printability maps and parameters (
Although the disclosed thermal sintering process is presented with the exemplary duration of 30 minutes, in some embodiments, the heating could have a duration of between 5 and 60 minutes, or between 10 and 45 minutes, or between 15 and 40 minutes, or between 20 and 35 minutes, or between 25 and 32 minutes, or about 30 minutes. Similarly, although the exemplary heating stage of the thermal sintering process is conducted at 900° C., in other embodiments the process could take place at a temperature between 700 and 1200° C., or between 800 and 1000° C., or between 825 and 975° C., or between 850 and 950° C., or between 875 and 925° C., or between 890 and 910° C., or between 895 and 905° C., or about 900° C.
Although the disclosed exemplary result of the thermal sintering process 103 shown in
The biphasic portion underneath is recited as being about 24 μm thick, but could in other embodiments have any suitable thickness as needed for the application, including but not limited to 500 nm to 100 μm, or between 1 μm and 50 μm, or between 5 μm and 40 μm, or between 20 μm and 30 μm, or between 22 μm and 26 μm, or any range in between.
With reference to
In one embodiment, the bGaIn film was transferred to stretchable substrates, such as acrylic-based tape (VHB, 3M) or silicone elastomer (Dragon Skin, Smooth-On Inc.), by pressing the silicon wafer onto the substrate. The solid film adheres to the substrate and the biphasic portion remains on the surface (see 104 in
Unlike eGaIn, which is purely amorphous, bGaIn has both amorphous and crystalline structures, with both sharp and broad peaks appearing in the spectrum. XRD analysis shows that before transfer, (top graph,
Table 1 below shows the identified crystalline planes, phases, and corresponding diffraction angles of the biphasic film on silicon wafer (before transfer).
Table 2 below shows identified crystalline planes, phases, and corresponding diffraction angles of the biphasic film on VHB tape (after transfer).
To establish a baseline of the electromechanical performance of bGaIn, the relative resistance change (R/R0) of bGaIn traces was measured when undergoing uniaxial tensile strain on multiple stretchable substrates. The traces had exceptionally stable electrical performance, experiencing negligible resistance change at both 100% strain on PDMS (R/R0≈1.02,
Due to the scattered solid oxide particles being primarily semiconductive Ga2O3, the initial conductivity of bGaIn (2.06×106 S m−1) is lower than bulk eGaIn (3.40×106 S m−1). As bGaIn is stretched, the liquid decreases in thickness and the solid particles emerge from the liquid. As a result, the conductivity of bGaIn increases, compensating for the large increase in resistance over strain expected due to volumetric changes.
In more detail, because the solid particles cannot resist shape-change, they begin to emerge from the liquid, as shown in the SEM images in
The subscript notation used in the following section is as follows: □b=biphasic, □s=solid; □l=liquid; □0=initial (unstretched), while absence of □0 assumes the bGaIn is in any state of finite stretch. The model assumes: the volume of bGaIn (Vb) is not constant; bGaIn comprises two phases: liquid and solid (Vb=Vl+Vs); volume of liquid, Vl, is constant; The surface oxide layer of the liquid component of bGaIn is neglected, since the oxide layer is very thin and passivating (˜1-3 nm thick in ambient environment), it does not have a significant impact on the conductivity of the underlying bulk material; The effect of Poisson's ratio on the width and thickness variations of bGaIn films over large strains is neglected, as most stretchable materials are nearly incompressible with a Poisson's ratio4 of approximately 0.5; The capillary forces at the interfaces between the solid particles and the liquid are neglected, since the separation distance between two adjacent particles increases over strains, the capillary force decreases significantly, as indicated by the small meniscus profiles between the solid particles at 300% strain (see
Before stretching, the initial resistance of bGaIn, Rb0, is calculated by Ohm's law:
where ρb0, Lb0 and Vb0 are the resistivity, length, and volume of unstretched bGaIn, respectively. Similarly, the resistance of bGaIn during stretching is:
Therefore, the resistance change of bGaIn during stretching is:
where ∈ is the applied strain, and f(Vs) and f(Vs0) are unknown functions of Vs and Vs0, respectively. Below, the expressions for each f(V) are derived. Based on the rule of mixtures, the resistivity of bGaIn, ρb, is:
Therefore, f(Vs0) is:
when
is the initial volume fraction of liquid in the bGaIn. Similarly, f(Vs) is a function of the volume fraction of liquid, γ, during stretching:
Taking the ratio of Equation 6 to Equation 5 yields:
Because the resistivity of solid oxide particles is significantly larger than liquid (ρs>>ρl), Equation 7 can be simplified as:
where
Combining Equation 8 with Equation 3 and simplifying yields:
Using Equation 9, the change in volume of the solid particles that remain in liquid, Vs/Vs0, can be predicted as a nonlinear function of strain, ε.
Based on the rule of mixtures, the conductivity of bGaIn,
is:
when
are the conductivity of solid particles and liquid, respectively.
Inserting Vs/Vs0 and
into equation (10) and rearranging yields:
where plugging Vs/Vs0 as a function of strain into equation (11), the conductivity of bGaIn can be predicted as a nonlinear function of strain.
In graph 901 of
To further verify this method of estimating Vs0/Vl, a second method was utilized. The solid and liquid parts of bGaIn by were separated by adding 1 M hydrochloride acid (HCl) solution to a vial of bGaIn and shaking for 2 min. Since amorphous gallium oxide (corresponding to oxide formed at room temperature on the surface of liquid GaIn) easily dissolves in HCl9, and crystalline β-Ga2O3 (the thermally treated β-Ga2O3 solid flakes that make up Vs) is chemically stable against attack by HCl at room temperature, this procedure separated the bGaIn into a liquid eGaIn droplet and crystalline β-Ga2O3 solids suspended in HCl (
With an estimate of Vs0/Vl and thus values for C1 and C2, the measured change in resistance over strain for bGaIn can be used to find the relationship between Vs/Vs0 and strain. Vs(ε)/Vs0 for bGaIn traces on both PDMS and VHB substrates is shown in
Plugging the estimated Vs/Vs0 and C2 into equation 11, the conductivity of bGaIn as a function of strain can be estimated (
The unique electromechanical behavior of bGaIn also relies upon the wettability of the liquid metal to the solid oxide particles. One conventional approach to make biphasic material is to physically mix eGaIn with dissimilar metallic particles, which often leads to separation of the liquid from the solid particles under strain (see e.g. Wu, Yun-hui, et al. “A Novel Strategy for Preparing Stretchable and Reliable Biphasic Liquid Metal.” Advanced Functional Materials 29.36 (2019): 1903840, incorporated herein by reference). In the disclosed material, the thermal sintering process generates solid particles from within the liquid metal, allowing the liquid to wet the solid particles and encouraging it to percolate through their interstices, as shown in
This superior wettability reduces separation between solid and liquid in the biphasic material, and therefore promotes continuous, high conductivity. The solid particles adhere to the substrate throughout stretching, while maintaining adhesion to the liquid metal and preventing the formation of electrically isolated liquid droplets, as shown in
Integration with Rigid Electronic Components
BGaIn as disclosed herein may also be configured to create robust electrical connections with rigid electronics. Reliably interfacing liquid metal with rigid electronics is challenging, and the few existing examples of liquid metal-based SCBAs require cumbersome fabrication processes, not compatible with current scalable manufacturing methods. In the present disclosure, bGaIn is employed as a stretchable interconnect to achieve reliable interfaces with rigid electronic components. First, the transmission line method was used to measure the contact resistance between bGaIn and (equivalently) zero-ohm resistance tinned copper contacts (see G. K. Reeves and H. B. Harrison, “Obtaining the specific contact resistance from transmission line model measurements.” IEEE Electron Device Letters, 3(5):111-113, 1982, incorporated herein by reference). By varying the length of the bGaIn traces (the space between adjacent tinned copper contacts), measuring the total resistance between bars, and fitting a line to the data (see
The transmission line method was used to measure the contact resistance between bGaIn and rigid electronic components. The resistance (R) between an electronic component on a bGaIn trace is composed of the resistance of the trace (Rt), the resistance of the component R0 and the resistance at the two contact points between bGaIn and the resistor (RC), is described by:
R=2RC+R0+Rt Equation 12
The resistance of the trace can be expanded as an element of the resistivity p of bGaIn, and the geometry of the trace:
where L, W, and T are the length, width, and thickness of the bGaIn trace. Placing an array of tinned copper contacts with various spacings onto the bGaIn trace, R0≈0, and the equation (12) simplifies to:
where
The resistance across the tinned copper contacts was measured with different spacings, and a line was fit to the data (
After measuring the contact resistance, a zero-ohm surface mount resistor was interfaced to a bGaIn trace on various stretchable substrates, and the resistance change was measured during strain. At 100% strain on PDMS (
Additional tests show that the bGaIn traces with embedded zero-ohm resistor subjected to a repetitive strain of 100% (
As seen in
As seen in
Patterning thin films of bulk eGaIn is challenging since high surface tension causes the liquid metal to bead up and deviate from the desired deposition pattern. By contrast, the solid particles in bGaIn spread evenly over the printed area, and strong wetting between the liquid metal and the crystalline particles stabilize the liquid, preventing unwanted beading. This mechanical stability helps bGaIn to work well with a variety of trace manufacturing processes. In one embodiment, bGaIn may be transfer printed by simply pressing a silicon wafer, on which bGaIn was made, onto a masked, stretchable substrate. In one embodiment, bGaIn may be configured as a conductive, printable paste by scraping bGaIn off a silicon wafer and mechanically mixing the top oxide into the biphasic portion. Paste prepared in this way may be used for example to stencil-print or hand-write stretchable patterns on a variety of substrates, including VHB tape (FIG. 14AAa), paper (FIG. 14AAb), high-porosity foam (FIG. 14AAc), rubber, tapes, for example scotch tape, silicone, polyimide, fabric, for example cotton or polyester fabric, spandex, latex (FIG. 14AAd), or skin, for example human skin. In some embodiments, printed bGaIn films may have a thickness of less than 100 μm, less than 60 μm, less than 50 μm, less than 40 μm, less than 20 μm, or less than 10 μm.
In one embodiment, where a laser-cut mask is used to deposit the layer or layers of bGaIn films, layers of bGaIn may have a print resolution roughly equal to the resolution of the laser cutter forming the mask. In one embodiment, the bGaIn film has a print resolution of about 25 μm. In other embodiments, a bGaIn ink may be configured to be deposited via high resolution extrusion-based printing. In one embodiment, high-resolution extrusion-based printing of bGaIn may be used to deposit bGaIn patterns to form soft and stretchable microcontrollers.
In one embodiment, bGaIn may be deposited by drawing the material on a substrate without a mask. In another embodiment, bGaIn may be deposited by printing, for example inkjet, spray, or other printing methods.
In one aspect, the present disclosure includes methods for making stretchable circuit board assemblies (SCBAs). In one embodiment, an SCBA incorporating bGaIn may be fabricated by transfer-printing bGaIn onto a stretchable substrate, for example a VHB or silicone substrate, with a patterned mask. A suitable mask may be created by laser cutting liners, for example comprising sticker papers, cutting using a method for example with a UV laser micromachining system. Any other suitable precision cutting mechanism may be used. One side of a liner is then placed onto the substrate and peeled off after patterning.
Electrical leads may be provided using, for example, tinned copper wires which may in some embodiments be flattened using a roller mill and pressed onto bGaIn contact pads. Electrical leads may be configured, for example, to connect one or more of the bGaIn contact pads to an external electrical system. The substrates may in some embodiments be reinforced, for example with a reinforcing element positioned on the side of the substrate opposite the bGaIn traces. Exemplary reinforcing elements include, but are not limited to, double-sided tape and inextensible fabrics. Electrical wires may then be soldered to the flattened wires for external connections.
Electrical components, for example integrated circuits, passive components (resistors, capacitors, etc.) or any other circuit element suitable for attachment to a non-stretchable circuit board, may be secured to contact pads on an SCBA for example by pressing the component into the pads for a predetermined duration to encourage adhesion. In one embodiment, the electrical component may be pressed into one or more pads for between 10 seconds and 10 minutes, or between 30 seconds and 8 minutes, or between one minute and five minutes, or between two minutes and four minutes, at least two minutes, at least three minutes, or about three minutes. In some embodiments, electrical components or the contact pads may be heated to encourage adhesion. In some embodiments, electrical components may be pressed into position when the elastomer layer into which they are being pressed has not yet cured completely, in order to encourage adhesion. In some embodiments, rigid contact pads may be embedded in the SCBA and physically attached to one or more bGaIn traces, and one or more electrical components may be secured to the one or more rigid contact pads for example by reflow soldering or conventional soldering techniques.
In some embodiments, patterned bGaIn may be used to form one or more electrodes, for example the electrodes of a capacitive sensor. This may be accomplished in one embodiment by patterning two bGaIn features on opposite sides of a flexible layer.
In some embodiments, multi-layer SCBAs may be fabricated by various methods. In one embodiment, and with reference to
In another embodiment, multiple layers of GaIn nanoparticles cam deposited on a substrate. In one embodiment, a first portion of a GaIn film is transferred to a first surface of a stretchable substrate to form at least one first GaIn trace, and a second portion of a GaIn film is transferred to a second surface of a stretchable substrate to form at least one second GaIn trace. In some embodiments, the second surface is opposite the first surface. In one embodiment, a via connects the first trace to the second trace, where the via extends through the substrate.
In one form, the at least one stretchable circuit board assembly disclosed herein, may be incorporated into a wearable garment for sleep studies, diagnosis of sleep disorders, health tracking, fitness tracking, physical rehabilitation, or combinations thereof. The stretchable circuit board assembly could be used to process sensor data from a patient during sleep or during the day by being incorporated next to or near the sensors. This would not interfere with patient comfort/activities. For example, one embodiment can collect data that can be processed to gain insights into the wearer's pose during sleep, to diagnose various sleep disorders such as REM-sleep behavior disorder. In another embodiment, these sensors could be used to track daytime motor symptoms, and movements during exercise. In other embodiments, the at least one stretchable circuit board assembly could be incorporated into physical rehabilitative devices. A stretchable circuit board assembly could act as a sensor and a processor, and the sensor data could be processed to dictate how a wearable rehabilitative device should act to aid the wearer. See
In another form, the at least one stretchable circuit board assembly disclosed herein, may be incorporated into a robotic system including one or more robots, robot-robot interfaces, human-robot interfaces, or combinations thereof. The substrates and encapsulants of the stretchable circuit board assembly are stretchable, making them compatible with materials that commonly make up soft robots (which are typically silicone elastomers and other polymers). This means that the stretchable circuit board assembly could be incorporated into or onto the bodies of soft robotic systems (
In yet another form, the at least one stretchable circuit board assembly disclosed herein, may be incorporated into an electronic device selected from the group consisting of a cell phone, a haptic device, a tablet, a display, a virtual reality headset, a handset, a sensor, an array of sensors, a gaming device, and combinations thereof. These circuits could also be integrated into today's smart technology for sensory feedback and processing, and for comfort of the user during interaction with one of these devices. A haptic device could process data and provide feedback, for example, in an AR/VR experience. In another embodiment, the sensory or processing circuitry could be made soft, and located near where the device interacts with the user, for example, in a headset or wrist-worn interface.
The invention is further described in detail by reference to the following experimental examples. These examples are provided for purposes of illustration only, and are not intended to be limiting unless otherwise specified. Thus, the invention should in no way be construed as being limited to the following examples, but rather, should be construed to encompass any and all variations which become evident as a result of the teaching provided herein.
Without further description, it is believed that one of ordinary skill in the art can, using the preceding description and the following illustrative examples, make and utilize the system and method of the present invention. The following working examples therefore, specifically point out the exemplary embodiments of the present invention, and are not to be construed as limiting in any way the remainder of the disclosure. For example and without limitation, GaIn may be placed on a surface A to make a circuit, then GaIn may be placed on another surface to make a circuit. The two circuits can be layered on top of each other and connected using a vertical interconnect access (VIA), that is like a vertical channel going through multiple layers (specifically, two layers in this embodiment). Such designs may be constructed via any of the materials and material combinations described herein and the same procedures may be used for the range of liquid metals and solid particles disclosed herein.
Humans can intuitively sense the positions of their limbs, allowing them to execute complex motions even when objects or disabilities prevent them from seeing portions of their bodies. However, achieving such proprioception in a rigid robot requires knowledge of its rigid-body kinematic configuration, while the shape of soft or flexible robots are typically estimated using strain sensors coupled with a material-specific mechanical model. Such models perform poorly when buckling occurs and when material properties change. Strain and orientation measurements as described herein can be used to estimate the surface contours of 2D sheets which can stretch and bend to conform to the surface of soft robots, in a manner that is independent of the substrate that the skins were applied to. The sheets can be made by applying a biphasic Gallium-Indium paste to the surface of stretchable acrylic tape as described herein (VHB, manufactured by 3M), to create stretchable circuits upon which we attached commercial integrated circuits. Various algorithms can be utilized such as an analytic formulation algorithm, and a data-driven machine learning algorithm. These shape-sensing sheets were tested on several benchmark non-moving surfaces, in addition to being applied to the surface of a morphing robot to enable closed-loop shape change. The approach outlined herein provides a generalized method for measuring the surface shape of objects, and can be applied to solve sensing challenges across a wide range of domains, including wearable electronics and soft robotics.
The liquid metal nanoparticle ink was made by adding 362±5 mg of eutectic gallium-indium alloy (75.5% Ga, 24.5% In) into 4 mL of ethanol and then sonicating at an amplitude of 36 μm (30% setting) for 120 min using a tip sonicator (⅛″ microtip probe). Prior to spray printing, the ink was mixed vigorously using a vortex mixer for 3 min to ensure uniform dispersion. The nanoparticle ink was then sprayed onto a silicon wafer substrate using a customized spray printer. Compressed air (20 psi) was blown over a syringe needle while ink was dispensed at a fixed rate (0.3 mL min−1), with the printer stage translating underneath at 5 mm s−1. A 3 mL syringe of ink made a single layer of film, with the process being repeated 10 times to create films thick enough for bGaIn to form. After spray deposition, the printed liquid metal nanoparticle film was heated in a furnace at 900° C. for 30 min and then cooled in ambient conditions.
After the thermal sintering, stretchable substrates such as VHB tape or silicone elastomer were brought into conformal contact with the silicon wafer. Pressure was manually applied, and the substrate was lifted to complete the transfer printing. In other experiments, the bGaIn was scraped off the silicon wafer and thoroughly hand-mixed. It was then patterned onto VHB tape (FIG. 14AAa) and paper (FIG. 14AAb) using a thin film applicator, and directly written onto a piece of foam (FIG. 14AAc) and a latex balloon (FIG. 14AAd). Surface mount LEDs were adhered to the foam using cyanoacrylate.
In another embodiment, oGaIn was prepared by mixing 200 g of eGaIn in a 250 mL beaker at an RPM in the range of 0 to 1000 for 30 minutes. These parameters can be varied to achieve different throughput of material and desired rheologies. In other embodiments, oGaIn was prepared by mixing 200 g of eGaIn in a 250 mL beaker at 600 RPM for 20 minutes while on a hot plate set to 100 Deg. C. The heat could be adjusted, for example to alter the rate of formation of gallium oxide, or to encourage off-gassing of impurities present in the material.
BGaIn resistance was measured using a four-point probe with a digital multi-meter, after being transferred to a VHB substrate in a dog bone pattern. The resistance values (0.16±0.02Ω) were averaged from twelve measurements. The dog bone patterns had an aspect ratio (length/width) of 5:1 (7.5×1.5 mm). Thicknesses of these patterns were measured using a 3D optical profiler, and averaged from twelve measurements (15.51±1.55 μm). Initial conductivity of the biphasic material was calculated as
Contact resistance between bGaIn and electrical pins was measured using the transmission line method. An array of tinned copper contacts with various spacings was attached to a single bGaIn trace. Resistance values between each pair of contacts were measured. The measured contact resistance is half of the y-intercept value of the fitted line.
For electro-mechanical characterization, rectangular samples (length: 20 mm; width: 0.8 mm) were fabricated by transfer-printing bGaIn onto VHB or PDMS substrates. To eliminate the resistance changes at the interfaces between bGaIn and external wires, electrical connections were made by adhering copper tape on each end of the bGaIn traces, secured using silver conductive epoxy. For the samples on PDMS substrates, fabric strips were placed at the interfaces to prevent stretching. The films were then encapsulated with another layer of VHB or PDMS. To test the circuits with bGaIn-component interfaces, zero-ohm resistors were placed between two bGaIn traces. For VHB substrates, the resistors were held for 3 min to encourage bonding. For PDMS substrates, the resistors were placed when the silicone was only partially cured, and still “tacky,” to enhance bonding. The two ends of the samples were clamped on three-dimensional printed parts and assembled on a customized tensile stage. The resistance values were measured using a Wheatstone bridge and corrected based on the clamped portion of the samples. The encapsulated bGaIn films were then subjected to uniaxial tensile loading at 15 mm min−1, 150 mm min−1, 225 mm min−1, or 300 mm min−1 using a customized tensile stage, while the resistance was measured using a Wheatstone bridge.
oGaIn was electromechanically tested in a similar fashion: Dogbone samples of VHB were prepared to ASTM D412 standard, with a trace of oGaIn painted on using a mask. The oGaIn was 0.25 mm wide. To eliminate the resistance changes at the interfaces between oGaIn and external wires, electrical connections were made by adhering copper tape on each end of the oGaIn traces, secured using silver conductive epoxy. Fabric strips were placed at the interfaces to prevent stretching. The films were then encapsulated with rubber cement. The oGaIn resistance was measured using a 4 point-probe device, while it was strained either once to 400% strain (
SEM images were taken by a UHR Cold Field Emission Scanning Electron Microscope. Samples for cross-section imaging were made by cleaving in liquid nitrogen. Elemental composition and mappings were obtained using energy dispersive X-ray spectroscopy at 5 kV. XRD patterns were collected using an X-Ray Diffractometer with Cu Kα radiation (8.04 keV, 1.5406 Å).
A first SCBA was produced to demonstrate the near-universal utility of bGaIn to create stretchable soft robotic and wearable electronics. A first SCBA, shown in
The SCBAs disclosed herein were fabricated by transfer-printing bGaIn onto VHB or silicone substrates with patterned masks. The masks were created by laser cutting liners of white matte sticker papers (Online Labels Inc.) using a UV laser micromachining system with 355 nm wavelength and 15 μm beam diameter. The glossy side of the liners were placed onto the VHB adhesive or silicone substrates, and easily peeled off after patterning. To provide electrical leads, tinned copper wires were flattened using a roller mill and pressed onto the bGaIn contact pads. The VHB substrates were reinforced with double-sided tape and the silicone substrates were reinforced with inextensible fabrics. Electrical wires were then soldered onto the flattened wires.
For the LED array shown in
An operational amplifier circuit was constructed including a 14-pin rail-to-rail output operational amplifier, as shown in
A 14-pin rail-to-rail output quad-operational amplifier integrated circuit was used, with surface mount resistors. The interconnects were produced by transferring bGaIn from a silicon wafer 1502 onto a VHB tape with a laser-cut mask 1501 applied. After peeling off the mask, the bGaIn traces 1503 were exposed. the surface mount electronic components 1504 were placed onto their designated positions and pressed for 3 min to ensure sufficient bonding. Finally, flattened tinned copper wires 1505 were pressed onto the contact pads then reinforced with double-sided tape to connect with external wires. The scale bar in
A 100 mVpp sinusoidal signal with a 100 mVpp offset was supplied and the output signals were measured with an oscilloscope. The circuit was incrementally stretched, and the outputs were recorded at increments of 25% strain, up to 400%. As a control, the same circuit was built on a rigid copper-clad PCB board (G10/FR4, Pulsar) patterned by the LPKF laser, and tested with the same inputs at 0% strain.
A first-order resistor-capacitor low-pass filter circuit comprised a resistor, a capacitor and bGaIn as electrical interconnects. A 500 mVpp sinusoidal signal (Vin) was supplied at various frequencies and the output signals (Vout) were measured with an oscilloscope. The circuit was incrementally stretched, and the outputs were recorded at increments of 100% strain, up to 400%. The magnitude in decibels (dB) was calculated as
As a comparison, an identical circuit using eGaIn as electrical interconnects was created. The bGaIn was patterned as interfacial contacts for the eGaIn circuit to ensure stable connections with rigid electronic components.
A stretchable LED 5×5 display was fabricated by first rod-coating a layer of silicone elastomer onto a PET substrate. Once the silicone cured, bGaIn was transfer-printed onto it to create the bottom circuit. Next, another layer of silicone elastomer was rod-coated on top and, after curing, another layer of bGaIn was printed. Once the top layer patterning was complete, 25 VIAs were created between the two layers by cutting cavities with an IR laser (30 W, 10.6 μm CO2 laser) and filling them with bGaIn.
Then, 25 surface mount LEDs were bonded to the silicone elastomer layer using a silicone adhesive. Finally, the circuit was encapsulated by rod-coating another layer of silicone elastomer on top. The LEDs were controlled individually by an external microcontroller.
Lastly, a multilayer signal conditioning circuit was made with integrated sensing and computation for wearable sensing applications. Typical wearable stretch capacitive sensors require a co-located, rigid signal conditioning circuit board for capacitance measurement, moderately constraining the movement of the body. The exemplary board was built as an SCBA on VHB tape, integrating a microcontroller, a capacitor and five resistors with transfer printed bGaIn interconnects and bGaIn filled VIAs. The fabrication process is shown in
With reference now to
The bGaIn paste can be filled into laser-cut cavities to easily create stretchable VIAs. The bGaIn strongly wets and adheres to the cavity, bridging the top and bottom traces (
The circuit board (finished circuit board shown in
In another embodiment, two-layer stretchable circuit board assemblies are fabricated by patterning traces on either side of a substrate material, placing components on one side, encapsulating with a stretchable material, and placing strain limiting island (SLI) over sensitive electronic components (
In another embodiment, this process can be extended to n-layer circuit assemblies (
In another embodiment, the stretchable circuit board assembly has circuit components “over” the circuit substrate, which can mean on any surface of the substrate (in direct contact), or adjacent to it (not in direct contact), or combinations thereof.
In one embodiment, to increase manufacturability of the circuit, it was found that the tackiness of the substrate material correlated to how well oGaIn adhered to circuit (
In another embodiment, these stretchable circuit board assemblies could be modified to make them more porous. Porosity enhancement could make them more breathable (so liquids and/or gases can transmit through the circuit). This porosity could be on any scale. For example, holes could be drilled in the spaces between traces, the stretchable circuit assembly could be cut or patterned, or the substrate material could be inherently porous. Holes could be added before making the circuit, or after the circuit has been encapsulated.
Thermal Processing Conditions for Fabricating bGaIn
To test the thermal processing conditions, the heating temperature was varied from 500° C. to 1000° C. and the heating duration from 10 min to 30 min. After the thermal heating process, the films were transferred from a silicon wafer to VHB tape, and measured the resistance values using a four-point probe with a digital multimeter. The optical images of the films before and after transfer are shown in
Below 800° C., due to low internal thermal stresses to rupture the oxide skins, an insufficient number of particles was coalesced into liquid. The films were brittle and strongly adhered to the silicon wafer, leading to incomplete transfer and non-conductive electrical readings. As the heating temperature was increased to 800° C. and higher, more particles coalesced, resulting in semi-liquid films with high electrical conductivity that could be easily transferred to VHB tape due to sufficient liquid content.
Although the films processed at 800° C., 900° C., and 1000° C. for different heating duration were all very conductive (resistance values less than 2Ω, example optical images shown in
As the heating temperature or duration increased, the formation of nanowires on the solid side of the biphasic films increased (
The operational amplifier circuit disclosed above was fabricated with four different amplifier circuits (non-inverting, inverting, summing and differential, as shown in
A 100 mVpp sinusoidal signal was supplied with a 100 mVpp offset while the output signals were measured with an oscilloscope. The circuit was incrementally stretched, and the outputs were recorded at every 25% strain, up to 400%. As a control, the same circuit was built on a rigid copper clad PCB board patterned by an LPKF laser, and tested with the same inputs at 0% strain.
With reference to
To further clarify the utility of bGaIn in resistance-sensitive circuits, a first-order resistor-capacitor low-pass filter circuit using bGaIn as electrical interconnects was also demonstrated and compared to an identical circuit manufactured using bulk eGaIn (
After demonstrating single-layer bGaIn circuits, bGaIn VIAs were used to create multi-layer, high-performance stretchable circuits. First, a stretchable LED display was fabricated with 25 LEDs and 25 corresponding bGaIn VIAs arranged in a 5×5 grid (
The signal conditioning circuit was fabricated as outlined above and held at a series of strains (0%, 50%, 100%, 150%, 200%), while subjecting the capacitive sensor to 10 cycles of 50% strain (
The sensor and the circuit deformed simultaneously during elbow flexion, and the sensor circuit measured the motion of the user's arm (
The following publications are incorporated herein by reference in their entireties:
The disclosures of each and every patent, patent application, and publication cited herein are hereby incorporated herein by reference in their entirety. While this invention has been disclosed with reference to specific embodiments, it is apparent that other embodiments and variations of this invention may be devised by others skilled in the art without departing from the true spirit and scope of the invention. The appended claims are intended to be construed to include all such embodiments and equivalent variations.
This application is a continuation-in-part of U.S. patent application Ser. No. 17/357,060, filed Jun. 24, 2021, which claims priority to U.S. provisional application No. 63/043,417, filed on Jun. 24, 2020, each of which is incorporated herein by reference in its entirety.
This invention was made with government support under 1812948, 1830870, 1454284, and 1954591 awarded by National Science Foundation and under 80NSSC17K0164 awarded by National Aeronautics and Space Administration. The government has certain rights in the invention.
Number | Date | Country | |
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63043417 | Jun 2020 | US |
Number | Date | Country | |
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Parent | 17357060 | Jun 2021 | US |
Child | 18148500 | US |