Number | Name | Date | Kind |
---|---|---|---|
4080512 | Ramet et al. | Mar 1978 | |
4109096 | Dehaine | Aug 1978 | |
4648053 | Fridge | Mar 1987 | |
4942619 | Takagi et al. | Jul 1990 | |
5060389 | Frederick | Oct 1991 | |
5485398 | Yamazaki et al. | Jan 1996 | |
5502278 | Mabboux et al. | Mar 1996 | |
5566877 | McCormack | Oct 1996 | |
5633529 | Otsuki | May 1997 | |
5642158 | Petry, III et al. | Jun 1997 | |
5686699 | Chu et al. | Nov 1997 | |
5801927 | Watanabe | Sep 1998 | |
5864470 | Shim et al. | Jan 1999 | |
5866940 | Takata et al. | Feb 1999 |
Number | Date | Country |
---|---|---|
0 285 820 A2 | Dec 1988 | EP |
Entry |
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C.D. Abbott et al., “Templates for Substrate Inspections,” IBM Technical Disclosure Bulletin vol. 25, No. 12 (May 1983). |