Claims
- 1. In a MEMS device, the improvement comprising:
a plurality of sensors electrically isolated from one another and positioned to produce signals of substantially identical characteristics; and circuitry responsive to said plurality of sensors for comparing said signals produced by said plurality of sensors.
- 2. The MEMS device of claim 1 additionally comprising circuitry for actuating the MEMS device.
- 3. The MEMS device of claim 1 wherein said MEMS device is implemented using batch-fabrication techniques, and wherein said circuitry and connections between said circuitry and said sensors are implemented using batch-fabrication techniques.
- 4. The MEMS device of claim 1 wherein said MEMS device is selected from the group consisting of resonators, accelerometers, gyroscopes, antennas, micromotors and ink jet print head Microsystems.
- 5. A MEMS device, comprising:
a plurality of fixed beams arranged symmetrically; a plurality of movable beams arranged symmetrically; a first sensor formed by certain of said fixed and movable beams; a second sensor, electrically isolated from said first sensor, and formed by at least certain other of said fixed and movable beams; and a circuit responsive to said first and second sensors for comparing signals produced by said first and second sensors.
- 6. The device of claim 5 additionally comprising circuitry for actuating said plurality of movable beams.
- 7. The device of claim 5 wherein said MEMS device is implemented using batch-fabrication techniques, said circuit and connections between said circuit and said sensors are implemented using batch-fabrication techniques.
- 8. In a symmetric MEMS device, the improvement comprising:
a plurality of sensors positioned to produce signals of substantially identical characteristics; and circuitry responsive to said plurality of sensors for real time comparison of said signals produced by said plurality of sensors.
- 9. The MEMS device of claim 8 additionally comprising circuitry for actuating the MEMS device.
- 10. The MEMS device of claim 8 wherein said MEMS device is implemented using batch-fabrication techniques, said circuitry and connections between said circuitry and said sensors are implemented using batch-fabrication techniques.
- 11. The MEMS device of claim 8 wherein said MEMS device is selected from the group consisting of resonators, accelerometers, gyroscopes, antennas, micromotors and ink jet print head Microsystems.
- 12. A MEMS device, comprising:
a plurality of fixed beams arranged symmetrically; a plurality of movable beams arranged symmetrically; a first sensor formed by certain of said fixed and movable beams; a second sensor formed by at least certain other of said fixed and movable beams; and a circuit responsive to said first and second sensors for real time comparison of said signals produced by said sensors.
- 13. The MEMS device of claim 12 additionally comprising circuitry for actuating said plurality of movable beams.
- 14. The MEMS device of claim 12 wherein said MEMS device is implemented using batch-fabrication techniques, said circuit and connections between said circuit and said sensors are implemented using batch-fabrication techniques.
- 15. A method, comprising:
actuating a MEMS device; and comparing the outputs from a first and a second sensor electrically isolated from one another and positioned to produce signals of substantially identical characteristics.
- 16. The method of claim 15 wherein said actuating is performed mechanically.
- 17. The method of claim 15 wherein said actuating is performed electrically.
- 18. The method of claim 17 wherein said electrically actuating comprises interchanging the polarity of a modulation signal applied between pairs of fixed and movable members.
- 19. The method of claim 15 wherein said comparing is performed in real time.
- 20. The method of claim 15 wherein said comparing reveals local asymmetry.
- 21. The method of claim 20 wherein said local asymmetry includes one of a particle bridge, vertical misalignment, variation in local etch and unequal parasitics in the interconnects between the sensors and the circuit for analyzing.
- 22. A method, comprising:
actuating a MEMS device; and comparing the outputs from a first and a second symmetrically located sensor in real time.
- 23. The method of claim 22 wherein said actuating is performed mechanically.
- 24. The method of claim 22 wherein said actuating is performed electrically.
- 25. The method of claim 24 wherein said electrically actuating comprises interchanging the polarity of a modulation signal applied between pairs of fixed and movable members.
- 26. The method of claim 22 wherein said comparing reveals local asymmetry.
- 27. The method of claim 26 wherein said local asymmetry includes one of a particle bridge, vertical misalignment, variation in local etch and unequal parasitics in the interconnects between the sensors and the circuit for analyzing.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application claims priority from provisional application serial No. 60/411,703 filed Sep. 18, 2003 and entitled Built-In Self Test of CMOS-MEMS Accelerometers, the entirety of which is hereby incorporated by reference.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH
[0002] This work was sponsored by the National Science Foundation under grant MIP-9702678. The federal government may have rights in this invention.
Provisional Applications (1)
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Number |
Date |
Country |
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60411703 |
Sep 2002 |
US |