Claims
- 1. A method for supplying fluids to a process chamber, comprising the steps of:
supplying fluid at a first flow rate into a lower end of a metering vessel; detecting a level of the fluid in the metering vessel; supplying fluid at a second flow rate into the lower end of the metering vessel, after a first predetermined level of fluid in the vessel has been detected, with the second rate less than the first rate; closing off fluid supply to the metering vessel when a second predetermined level of fluid is detected in the vessel; and releasing the fluid from the metering vessel and allowing the fluid to flow into a tank.
- 2. The method of claim 1 further comprising the step of detecting a level of a fluid in the tank.
- 3. The method of claim 1 further comprising the step of drawing fluid out of the tank, heating the fluid, and spraying the fluid into the process chamber.
Parent Case Info
[0001] This Application is a Divisional of U.S. patent application Ser. No. 09/609,879, filed Jul. 5, 200, now pending, which claims priority to U.S. Provisional Patent Application Serial No. 60/142,740, filed Jul. 6, 1999.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60142740 |
Jul 1999 |
US |
Divisions (1)
|
Number |
Date |
Country |
Parent |
09609879 |
Jul 2000 |
US |
Child |
10205776 |
Jul 2002 |
US |