1. Field of the Invention
This invention relates generally to semiconductor processing, and more particularly to semiconductor chip packaging and to methods of making the same.
2. Description of the Related Art
Many current integrated circuits are formed as multiple die on a common silicon wafer. After the basic process steps to form the circuits on the die are complete, the individual die are cut from the wafer. The cut die are then usually mounted to structures, such as circuit boards, or packaged in some form of enclosure.
One frequently-used package consists of a substrate upon which a die is mounted. The upper surface of the substrate includes electrical interconnects. The die is manufactured with a plurality of bond pads. A collection of solder bumps are provided between the bond pads of the die and substrate interconnects to establish ohmic contact. An underfill material is deposited between the die and the substrate to act as a material that prevents damage to the solder bumps due to mismatches in the coefficients of thermal expansion between the die and the substrate, and an adhesive to hold the die. The substrate interconnects include an array of solder pads that are arranged to line up with the die solder bumps. After the die is seated on the substrate, a reflow process is performed to enable the solder bumps of the die to metallurgically link to the solder pads of the substrate. After the die is mounted to the substrate, a lid is attached to the substrate to cover the die. Some conventional integrated circuits, such as microprocessors, generate sizeable quantities of heat that must be ferried away to avoid device shutdown or damage. For these devices, the lid serves as both a protective cover and a heat transfer pathway.
One conventional type of substrate consists of a core laminated between upper and lower build-up layers. The core itself usually consists of four layers of glass filled epoxy. The build-up layers, which may number four or more on opposite sides of the core, are formed from some type of resin. Various metallization structures are interspersed in the core and build-up layers in order to provide electrical pathways between pins or pads on the lowermost layer of the substrate and pads the solder pits that bond with the chip solder bumps.
The core provides a certain stiffness to the substrate. Even with that provided stiffness, conventional substrates still tend to warp due to mismatches in coefficients of thermal expansion for the chip, underfill and substrate. However, there is a need to provide shorter electrical pathways in package substrates in order to lower power supply inductance and improve power fidelity for power transferred through the substrate. The difficult problem is how to reduce the electrical pathways without inducing potentially damaging substrate warping.
The present invention is directed to overcoming or reducing the effects of one or more of the foregoing disadvantages.
In accordance with one aspect of the present invention, a method of manufacturing is provided that includes providing a substrate that has a first side and a first plurality of passive devices in the first side. A polymeric stiffener ring is formed on the first side. The stiffener ring embeds the first plurality of passive devices without covering a central portion of the first surface of the substrate. A semiconductor chip is mounted on the central portion of the first surface of the substrate.
In accordance with another aspect of the present invention, a method of manufacturing is provided that includes providing a substrate that has a first side and a first plurality of passive devices in the first side. A polymeric stiffener ring is formed on the first side. The stiffener ring embeds the first plurality of passive devices without covering a central portion of the first surface of the substrate. A semiconductor chip is mounted on the central portion of the first surface of the substrate. A lid is coupled to the stiffener ring to cover the semiconductor chip.
In accordance with another aspect of the present invention, a method of manufacturing is provided that includes providing a substrate that has a first side. A polymeric stiffener ring is molded directly on the first side. The stiffener ring does not covering a central portion of the first surface of the substrate. A semiconductor chip is mounted on the central portion of the first surface of the substrate.
In accordance with another aspect of the present invention, a method of manufacturing is provided that includes providing a sheet of substrate material and molding polymeric stiffener rings on selected portions of the sheet of substrate material. The selected portions of the sheet of substrate material are separated into individual substrates each having a stiffener ring.
In accordance with another aspect of the present invention, an apparatus is provided that includes a substrate that has a first side and a first plurality of passive devices in the first side. A polymeric stiffener ring is on the first side. The stiffener ring embeds the first plurality of passive devices without covering a central portion of the first surface of the substrate. A semiconductor chip is mounted on the central portion of the first surface of the substrate.
The foregoing and other advantages of the invention will become apparent upon reading the following detailed description and upon reference to the drawings in which:
In the drawings described below, reference numerals are generally repeated where identical elements appear in more than one figure. Turning now to the drawings, and in particular to
Additional detail regarding the structure of the package 100 may be understood by referring now also to
An integrated circuit 125, which may be a semiconductor chip or other type of device as desired, is mounted on the central portion of the substrate 105. The integrated circuit 125 may be any of a myriad of different types of circuit devices used in electronics, such as, for example, microprocessors, graphics processors, application specific integrated circuits, memory devices or the like, and may be single or multi-core. Optionally, multiple chips may be used. The integrated circuit 125 includes a thermal interface material 130 that is designed to provide an advantageous conductive heat transfer pathway between the integrated circuit 125 and the overlying lid 110.
Still further detail regarding the package 100 may be understood by referring now to
The lid 110 may be composed of well-known plastics, ceramics or metallic materials as desired. Some exemplary materials include nickel plated copper, anodized aluminum, aluminum-silicon-carbide, aluminum nitride, boron nitride or the like. In an exemplary embodiment, the lid 110 may consist of a copper core 155 surrounded by a nickel jacket 160. As noted above in conjunction with
One or more passive devices, such as capacitors, inductors, resistors or the like, or other types of circuit elements may be provided for the integrated circuit 125. In this regard, four passive elements, such as capacitors, are shown and labeled 150a, 150b, 150c and 150d. The passive elements 150a, 150b, 150c and 150d are of such small size in
Attention is now turned to
An exemplary embodiment of a thin core substrate 105′ is depicted in
As noted briefly above, the stiffener ring 115 maybe employed on a substrate that is coreless. Such an alternate embodiment is depicted in
It is envisioned that the stiffener ring 115 may be advantageously formed by a molding process. The exact configuration of a suitable mold to fabricate the stiffener ring 115 is subject to great variation. One exemplary embodiment of a mold 220 may be understood by referring now to
A fluid passage 260 is provided that is in fluid communication with the interior space 255. A fluid supply line 265 may be coupled to the passage 260 and used to introduce the molding fluid 270 into the interior space 255 as shown. In order to exhaust air that might otherwise be trapped within the interior space 255 during the injection of the fluid 270, an air vent 275 may be provided in the upper half 230 and in fluid communication with the interior space 255 to allow air 280 to be expelled therefrom.
As the liquid 270 is introduced into the interior space 255, the passive devices 150a, 150b, 150c and 150d positioned on the substrate 105 will be embedded within the liquid 270 and ultimately the stiffener ring 115 when the liquid is cured. Suitable candidates for the liquid 270 include polymeric materials that may be molded, directly to the substrate without an adhesive if desired, and that exhibit desired coefficients of thermal expansion and bulk modulus. The ability of the stiffener ring 115 to resist substrate warping will be greater where the liquid 270 hardens into a stiffener ring 115 that has a coefficient of thermal expansion and a bulk modulus that approach or even equal that of the substrate 105. Various epoxy resins represent suitable materials. In one example, a 2-4-2 substrate with a coefficient of thermal expansion of about 22×10−6 C°−1 and a bulk modulus of about 25 to 30 GPa may be matched with an epoxy resin available from Matsushita that has a coefficient of thermal expansion of about 14×10−6 C°−1 and a bulk modulus of about 20 to 25 GPa. Thin core or coreless substrates may have coefficients of thermal expansion of between about 15×10−6 C°−1 to 19×10−6 C°−1. Accordingly, resins with coefficients of thermal expansion in that range may be suitable for thin or coreless substrates.
Many moldable epoxy materials begin to cure upon heating up to a certain temperature. In one example, a pellet of resin is melted into a liquid state by heating to about 175° C. for up to about 120 seconds. The liquid is then delivered to the mold 220 and allowed to set.
After the liquid 270 solidifies into the stiffener ring 115, the mold 220 may be opened and the substrate 105 removed therefrom as depicted in
As noted above, something other than a LGA design may be used.
Manufacturing efficiency may be achieved if multiple substrates can be provided with stiffener rings in a single molding process. In this regard,
While the invention may be susceptible to various modifications and alternative forms, specific embodiments have been shown by way of example in the drawings and have been described in detail herein. However, it should be understood that the invention is not intended to be limited to the particular forms disclosed. Rather, the invention is to cover all modifications, equivalents and alternatives falling within the spirit and scope of the invention as defined by the following appended claims.