Compact ion gauge using micromachining and MISOC devices

Abstract

A solid state compact ion gauge includes an inlet, a gas ionizer, and a detector all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed in the cavity through which the cavity is evacuated by differential pumping. Preferably, the substrate is formed in two halves. The substrate halves are then bonded together after the components are provided therein.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a gas-detection sensor and more particularly to a solid state compact ion gauge which is micro-machined on a semiconductor substrate.

2. Background Information

Various devices are currently available for determining the quantity and type of molecules present in a gas sample. One such device is the mass-spectrometer.

Mass-spectrometers determine the quantity and type of molecules present in a gas sample by measuring the mass-to-charge ratio and quantity of ions formed from the gas through an ionization method. This is accomplished by ionizing a small sample and then using electric and/or magnetic fields to find a charge-to-mass ratio of the ion. Current mass-spectrometers are bulky, bench-top sized instruments. These mass-spectrometers are heavy (100 pounds) and expensive. Their big advantage is that they can be used to sense any chemical species.

Another device used to determine the quantity and type of molecules present in a gas sample is a chemical sensor. These can be purchased for a low cost, but these sensors must be calibrated to work in a specific environment and are sensitive to a limited number of chemicals. Therefore, multiple sensors are needed in complex environments.

One of the methods utilized to determine the nature of a molecular species is to determine its molecular weight. This is not a unique property of a molecule, since the same set of atoms that constitute a molecule can be bonded together in a variety of ways to form molecules with differing toxicities, boiling points, or other properties. Therefore, in order to uniquely identify a particular molecular compound, the structure must be identified. A well-established technique for determining the molecular structure of molecules is the dissociative ionization of molecules and then determining the quantity and mass to charge ratio of the resulting ion fragments, also known as the cracking pattern. The general technique is referred to as mass spectroscopy.

To determine the mass to charge ratio of an ion, a variety of methods are utilized which causes a separation of the ions either by arrival at a detector over a period of time, or by causing a physical displacement of the ions. The number of detectors simultaneously used determines the speed and sensitivity of the device. Techniques that scan the ion beam over a single detector are referred to as mass-spectrometers and those that utilize multiple detectors simultaneously are referred to as mass-spectrographs. Mass-spectrographs can also be scanned by utilizing an array that covers a subset of the full range of mass to charge ratios; scanning multiple subsets allows coverage of the entire mass range. In order to provide a micro-miniature mass-spectrograph, there is a need for a micro-miniature mass separator that can be used in that micro-miniature mass-spectrograph.

Typically, a solid state mass spectrograph can be implemented on a semiconductor substrate. FIG. 1 illustrates a functional diagram of such a mass spectrograph 1. This mass spectrograph 1 is capable of simultaneously detecting a plurality of constituents in a sample gas. This sample gas enters the spectrograph 1 through dust filter 3 that keeps particulate from clogging the gas sampling path. This sample gas then moves through a sample orifice 5 to a gas ionizer 7 where it is ionized by electron bombardment, energetic particles from nuclear decays, or in a radio frequency induced plasma. Ion optics 9 accelerate and focus the ions through a mass-filter 11. The mass-filter 11 applies a strong electromagnetic field to the ion beam. Mass-filters that utilize primarily magnetic fields appear to be best suited for the miniature mass-spectrograph since the required magnetic field of about 1Tesla (10,000 gauss) is easily achieved in a compact, permanent magnet design. Ions of the sample gas that are accelerated to the same energy will describe circular paths when exposed in the mass-filter 11 to a homogenous magnetic field perpendicular to the ion's direction of travel. The radius of the arc of the path is dependent upon the ion's mass-to-charge ratio. The mass-filter 11 is preferably a Wien filter in which crossed electrostatic and magnetic fields produce a constant velocity-filtered ion beam 13 in which the ions are disbursed according to their mass/charge ratio in a dispersion plane that is in the plane of FIG. 1.

A vacuum pump 15 creates a vacuum in the mass-filter 11 to provide a collision-free environment for the ions. This vacuum is needed in order to prevent error in the ion's trajectories due to these collisions.

The mass-filtered ion beam is collected in an ion detector 17. Preferably, the ion detector 17 is a linear array of detector elements that makes possible the simultaneous detection of a plurality of the constituents of the sample gas. A microprocessor 19 analyses the detector output to determine the chemical makeup of the sampled gas using well-known algorithms that relate the velocity of the ions and their mass. The results of the analysis generated by the microprocessor 19 are provided to an output device 21 which can comprise an alarm, a local display, a transmitter and/or data storage. The display can take the form shown at 21 in FIG. 1 in which the constituents of the sample gas are identified by the lines measured in atomic mass units (AMU).

Preferably, mass spectrograph 1 is implemented in a semiconductor chip 23 as illustrated in FIG. 2. In the preferred spectrograph 1, chip 23 is about 20 mm long, 10 mm wide and 0.8 mm thick. Chip 23 comprises a substrate of semiconductor material formed in two halves 25a and 25b that are joined along longitudinally extending parting surfaces 27a and 27b. The two substrate halves 25a and 25b form at their parting surfaces 27a and 27b an elongated cavity 29. This cavity 29 has an inlet section 31, a gas ionizing section 33, a mass filter section 35, and a detector section 37. A number of partitions 39 formed in the substrate extend across the cavity 29 forming chambers 41. These chambers 41 are interconnected by aligned apertures 43 in the partitions 39 in the half 25a that define the path of the gas through the cavity 29. Vacuum pump 15 is connected to each of the chambers 41 through lateral passages 45 formed in the confronting surfaces 27a and 27b. This arrangement provides differential pumping of the chambers 41 and makes it possible to achieve the pressures required in the mass filter and detector sections with a miniature vacuum pump.

The inlet section 31 of the cavity 29 is provided with a dust filter 47 that can be made of porous silicon or sintered metal. The inlet section 31 includes several of the aperture partitions 39 and, therefore, several chambers 41.

FIG. 3 shows the detector array 17 having MOS capacitors 67 which are read by a MOS switch array 69 or a charge coupled device 69. The detector array 17 is connected to an array of Faraday cups formed from a pair of Faraday cup electrodes 71 which collect the ion charge 73.

A cross-section of the all-silicon mass spectrograph 1 is shown in FIG. 4. The top 25a and bottom 25b silicon pieces are preferably bonded by indium bumps and/or epoxy, which are not shown. The first step in the fabrication of the all-silicon mass spectrograph 1 is the etching of alignment marks in the silicon substrate 25. This assures proper alignment of the etched geometries with the cubic structure of the silicon substrate 25. Once the alignment marks are etched, 40 μm deep chambers 41 are etched in each half 25a and 25b of the silicon substrate 25. These chambers are etched using an anisotropic etchant such as a potassium hydroxide etching agent or ethylene diamine pyrocatechol (EDP). After the chambers are formed, the orifices between the chambers are formed by etching 10 μm deep features. These orifices are also etched using the anisotropic etching agent.

The miniaturization of mass spectrograph 1 creates various difficulties in the manufacture of such a device.

In any ionic mass spectrometer or charge sensing device, there must be some means to collect the charge and determine its magnitude. For high performance devices, sensitivity of 10's of charges at speeds of 10's of kilocycles is required. An additional resolution constraint is mandated for mass spectrographs: the detector pitch must be smaller than the ion beam while insuring that the ion beam is not missed due to inter detector spacing of non-contiguous detector elements. As detector pitch is reduced, smaller displacements (i.e., better mass resolution in a miniaturized package) can more readily be discerned.

In the present state of the art, charge multiplication devices and high gain current sensors have been utilized. Charge multiplication devices require high voltages (>1000 volts) in order to operate. This is difficult to implement on a silicon chip where voltages are generally less than 100 volts. High gain current amplifiers, often referred to as electrometers, operate at low voltages and can be used to measure total charge. Electrometers typically found in laboratory instruments are useful for currents on the order of 1×10⁻¹⁴ amperes. However, this sensitivity is at the expense of speed, with response time approaching several seconds for these low current values.

Another charge sensor that is typically used for the detection of light and high energy particles is a charge-coupled device (CCD). Photoelectrons generated at a capacitor or charge injection from a high energy particle onto a capacitor are moved by the CCD to a charge sensitive amplifier and converted to a voltage signal which can be sensed. CCDs are capable of sensing low amounts of charge (some as low as 10's of charges per read cycle) with read rates in the 10's of kilocycles, but require a passivating dielectric over the charge storage capacitor to protect the active CCD semiconductor layers from environmental degradation. This dielectric precludes sensing of low energy molecular and atomic ions.

High speed and low charge sensing devices capable of accurately detecting low energy molecular and atomic ions are required to effectively miniaturize ionic gas sensors. Accordingly, there is a need for a solid-state detection for sensing low energy charge particles.

If the reader desires further background information, reference can be made to the following:

(1) A User's Guide to Vacuum Technology, 2^nd Edition, by John F. O'Hanlon (1989, John Wiley & Sons), Chapter 5, pp. 75-99;

(2) Building Scientific Apparatus—A Practical Guide to Design and Construction, 2^nd Edition, by John H. Moore et al., (1989, Addison-Wesley Publishing Company, Inc.), pp. 80-83; and

(3) Micromachined Devices and Components, Proc SPIE, Vol. 3514, p. 431, “Comparison of Bulk- and Surface-Micromachined Pressure Sensors,” William P. Eaton et al.

(4) U.S. Pat. No. 5,386,115 to Freidhoff et al., entitled “Solid State Micro-machined Mass Spectrograph Universal Gas Detection Sensor.”

(5) U.S. Pat. No. 5,492,867 to Kotvas et al., entitled Method for Manufacturing a Miniaturized Solid State Mass Spectrograph.”

(6) U.S. Pat. No. 5,530,244 to Sriram et al., entitled “Solid State Detector for Sensing Low Energy Charged Particles.”

(7) U.S. Pat. No. 5,536,939 to Freidhoff et al., entitled “Miniaturized Mass Filter.”

Each of the noted patents is assigned to the present Assignee and is hereinafter incorporated by reference.

While those patents describe a mass filter that has served its intended purpose, there is still a need to eliminate the mass filter so that a low cost and compact ion gauge can be used in high vacuums and ultra-high vacuums. The use of silicon micromachining and devices allows for a low cost and compact ion gauge. Such a compact ion gauge would provide new capabilities in vacuum process equipment by placing a network of pressure sensors on vacuum tools rather that a single one. With the sensors being networked on a process tool, leak checking and process variability can be reduced which will increase efficiency and process yield.

SUMMARY OF THE INVENTION

The present invention is directed to devices formed by the micromachining of silicon on a chip (MISOC) and more particularly to a mass spectrograph formed on a chip (MSOC) to provide a new type of spectograph device from a subset of the mass spectrograph components. This will allow for a low cost and compact ion gauge provide new and improved capabilities by placing a network of pressure sensors on the vacuum tools rather than a single one.

In order to utilize a detector array, displacement of the various mass to charge ratio ions in space is conventionally used. Time of flight methods which separate the ions by arrival time at a detector are typically single detector spectrometers. For the present invention, physical separation in space is utilized in order to take advantage of the additional sensitivity gains through integration on an array. Typically, magnetic and/or electrostatic fields can be utilized to cause a separation of the ions in space. Constant magnetic and electrostatic fields cause a fanning of ions in physical space and are amenable to the incorporation of detector arrays.

The mass spectrograph on a chip concept permit some of the components to be configured for other applications, one of these is using the solid-state electron emitter, the micromachined silicon and the CMOS detector array to construct a compact, solid-state ion gauge for high vacuum systems that process semiconductor devices, etc. Another aspect of the MSOC invention is the hybridization of pieces to form the desired shape and size. The sloping walls aid in reducing the x-ray current on the detectors and extend the lower pressure limit of the device.

Further scope of applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes in modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only, and, thus, are not limitative of the present invention, and wherein:

FIG. 1 is a functional diagram of a conventional solid state mass spectrograph.

FIG. 2 is an isometric view of two halves of the conventional mass spectrograph of FIG. 1 rotated and opened to reveal the internal structure.

FIG. 3 is a longitudinal fractional section through a portion of the conventional mass spectrograph of FIG. 2.

FIG. 4 is a schematic cross-sectional view of the conventional mass spectrograph of FIG. 2.

FIGS. 5(a) and (b) illustrate the magnetic film on primary ion gauge chips that prevent stray magnetic fields from affecting the x-ray limit in accordance with the present invention.

FIGS. 6(a) and (b) illustrates the sloped walls that provide detector placement and direct x-rays primarily away form the detectors.

FIGS. 7(a) and (b) show a conceptual assembly of a micromachined ion gauge from three semiconductor chips and three conductive spacers in accordance with the subject invention.

FIG. 8 is an illustration of a nominal voltage scheme for the micromachined ion gauge depicted in FIGS. 7(a) and (b).

DESCRIPTION OF THE INVENTION

Mass spectrograph on a chip (MSOC) concept permit some of the components to be configured for other applications, one of these is using the solid-state electron emitter, the micromachined silicon and the CMOS detector array to construct a compact, solid-state ion gauge for high vacuum systems that process semiconductor devices.

Another aspect of the MSOC invention is the hybridization of the pieces to form the desired shape and size. The sloping walls aid in reducing the x-ray current on the detectors and extend the device lower pressure limit of the device.

FIGS. 5(a) and (b) illustrate the magnetic film on primary ion gauge chips that prevent stray magnetic fields from affecting the x-ray limit.

In FIG. 5(a), an array of electron sources is shown in a 3×3 configuration. Larger or smaller arrays can be utilized. The electron sources illustrated are reverse bias p-n junctions. Cold cathodes or other electron sources can be utilized. A large current is passed at a shallow p-n junction near the short horizontal set of lines via a reverse bias potential between the emitter cathode pads 73 and the substrate back 75 which acts as the p-n junction anode. Due to the ballistic trajectories that the electron current takes in this device, and the very shallow (˜100 Å) depth of the p-n junction, a small fraction of the electron current is emitted above the substrate surface by overcoming the bulk and surface potentials. A gate electrode 77 is separated from the junction surface by a thin (˜1/μm) film of silicon dioxide with a hole it above the in the shallow junction. On top of the oxide is a metal or film that is a gas electrode. This electrode is held at a potential of approximately 100 volts higher than the junction surface to accelerate the emitted electrons away from the junction surface. An electron collector 81 is held at the same potential as the gate electrode 77 and is opposite the piece shown in FIG. 5a. One configuration is shown in FIG. 7b.

As the accelerated electrons pass through a gas, collisions between the energetic electrons and gas molecules produce positive ions. The ion anode pad bottom 75 (see FIG. 5a) and ion anode 83 (see FIG. 5b) are held at a potential slightly higher than the gate electrode 77 so that ions are moved towards the detector pads 85, which are held at a lower potential. The ion deflector 87 of FIG. 5b is held at a potential higher than even the ion anodes 83 to direct the ions formed toward the detector pads 85 to increase the efficiency of ion collection. The ion current collected is proportional to the pressure since the gas density is linearly proportional to the pressure.

FIGS. 6 a and 6b present side views respectively of the pieces whose active device views are illustrated respectively in FIGS. 5a and 5B. The cavity 641 in substrate 625a is formed to allow the detector pads 85 to be arrayed on a slope to minimize X-ray generation that would affect the lower pressure detection limit. This cavity 641 can be formed by a number of anisotropic techniques: KOH wet etching is one example. Fifty (50) μm is a typical depth over which five pitched detector arrays can be formed with sufficient resolution. Planar substrates with the detector array mounted at an angle would be equivalent. The magnetic film 65 on both FIGS. 6a and 6b can be formed of any magnetic or magnetizable material. The polarization on chip half 625a should be the opposite of chip half 625b so that a vertical magnetic field of several to hundreds of gauss are produced in the cavity formed in FIG. 7b.

FIG. 6 b has etched “V” grooves formed by a similar method as the cavity 641 in FIG. 6b. The “V” groove slopes are aligned over top of the emitter arrays. The magnetic field (vertically oriented) will confine the electron path and aid in confining the electrons to strike the metallized slope of cavity 629. A 100 μm depth is a typical depth since low resolution lithography is needed for this device. Flat bottom or fully pointed “V” grooves can be utilized. The original flat surface 639 is only needed where connections between chip halves 625a and 625b are needed. Substrate 625b is etched, oxidized and then metallized. No particular requirements for the substrate 625b are needed other than that it can be easily formed with sloping walls. Crystalline silicon is one common substrate. The magnetic field 65 causes the electrons to spiral in a tight radius as it moves through the vacuum space. This spiral will increase the effective distance traveled by the electron and therefore the signal (positive ions) generated.

FIGS. 7(a) and (b) show a conceptual assembly of micromachined ion gauge from three semiconductor chips and three conductive spacers.

FIG. 7(a) shows a potential configuration of the compact ion gauge from the top view with both pieces in place. For example, FIGS. 6(b) and 5(b) are inverted on top of FIGS. 6(a) and 5(a). The side view is shown in FIG. 7(b), after the inversion. The emitter base chip is the large chip whose top view is shown in FIG. 5a and side view in FIG. 6a. The electron collector chip is the chip whose top view (active device part) is shown in FIG. 5(b) and its associated.

The spaces 700a and 700b are metal or metallized ceramics that hold the emitter base chip 625a and electron collector chip 625b apart in an aligned state. The spaces 700a and 700b also provide electrical connection between the two chips 625a and 625b so that electrical connections to the next level assembly can be done from the emitter base chip 625a only. The detector readout interface circuit 720 provides a charge to current convention or charge to voltage conversion to be done near to the detector array elements 85, minimizing noise and maximizing sensitivity. This readout 720 also converts the multiple elements of the array 85 to be readout on a serial line, minimizing the number of connections. Other functions of the detector readout circuit 720 include blooming control. Double correlated sampling is preferably used to minimize electronic drift. The alignment would have the electron beam hitting the sloped edges 639 of the electron collector chip 625b.

FIG. 8 provides a nominal voltage scheme for the assembled. Voltages are different here than in the previous discussion and show some of the variation that can be tolerated. The series of electrodes A1, A2, A3 and A4, at 150 V is the same as the gate electrode 77 from FIG. 5(a). The electrodes are approximately where they would be on the assembled compact ion gauge as viewed from the side, as shown in FIG. 7(b). The “B” electrode is the same as the ion anode 75 and pushes the positive ions formed towards the detector pad “E” which is the same as 85. Electrode “C” is the same as the electron collector electrode 81. Electrode “D” is an ion deflection electrode to push the ions down toward detector electrode “E” or 75. Electrode “F” is a ground plane surrounding the detector electrode “E” or 75. Electrode “G” is the emitter base chip 625a.

While specific embodiments of the invention have been described in detail, it will be appreciated by those skilled in the art that various modifications and alternatives to those details could be developed in light of the overall teachings of the disclosure. Accordingly, the particular arrangements disclosed are meant to be illustrative only and not limiting as to the scope of invention which is to be given the full breadth of the appended claims and any and all equivalents thereof.

Claims

1. A compact ion gauge for analyzing a sample gas, said compact ion gauge comprising: a semiconductor substrate having a cavity therein with an inlet, a gas ionizing section adjacent said inlet, a ion gauge section adjacent said gas ionizing section, and a detector section adjacent said ion gauge section; vacuum means evacuating said cavity and drawing said sample gas into said cavity through said inlet; gas ionizing means in said gas ionization section of said cavity ionizing sample gas drawn into said cavity through said inlet to generate ionized sample gas; and detector means detecting said ionized sample gas.

2. The compact ion gauge of claim 1 wherein said sample gas has multiple gas constituents, and wherein said detector means comprises means simultaneously detecting a plurality of said multiple gas constituents.

3. The compact ion gauge of claim 1 wherein said detector means comprises an array of detector elements.

4. The compact ion gauge of claim 3 wherein said detector elements are arranged in a linear array.

5. The compact ion gauge of claim 4 wherein said detector means further comprises electron collector chip connected with each detector element.

6. The compact ion gauge of claim 5 wherein said electron collector chip comprise v-shaped conductors formed on said semiconductor substrate in said detector section of said cavity, and wherein said detector elements include signal generators located outside or inside of said cavity.

7. The compact ion gauge of claim 6 wherein said semiconductor substrate is formed in two parts joined along parting surfaces extending through said cavity, and wherein said detector elements include signal generators located in recess means in said parting surface of one of said parts spaced from said cavity.

8. The compact ion gauge of claim 3 wherein said ion gauge comprises is micromachined.

9. The compact ion gauge of claim 8 wherein said field generating means includes opposed electrodes formed on said substrate in said cavity, and to which a voltage is applied to generate said electric field.

10. The compact ion gauge of claim 9 wherein said field generating means includes a magnet generating said magnetic field within said mass filter section of said cavity.

11. The compact ion gauge of claim 9 wherein said field generating means includes magnetic film formed on said substrate on opposed surfaces.

12. The compact ion gauge of claim 3 further comprises opposed primary electrodes on said substrate of said cavity to which a voltage is applied to generate said electric field.

13. The compact ion gauge of claim 12 further includes pairs of opposed trimming electrodes on said substrate of said cavity between said opposed primary electrodes to which trimming voltages are applied to make said electric field substantially uniform within said cavity.

14. The compact ion gauge of claim 3 wherein said gas ionizing means comprises a solid state electron emitter formed in said substrate in said gas ionizing section of said cavity.

15. The compact ion gauge of claim 1 wherein said gas ionizing means comprises a solid state electron emitter formed in said substrate in said gas ionizing section of said cavity.

16. The compact ion gauge of claim 15 wherein said gas ionizing means further includes ion optic means formed in said substrate in said gas ionizing section of said cavity.

17. The compact ion gauge of claim 1 wherein said vacuum means is connected to said chamber to provide differential pumping of said cavity.

18. The compact ion gauge of claim 17 wherein said gas ionizing means comprises a solid state electron emitter formed on said substrate in said gas ionizing section of said cavity and ion optics.

19. A solid state compact ion gauge for analyzing a sample gas with multiple gas constituents, said compact ion gauge comprising: a semiconductor substrate having an elongated cavity therein with an inlet, a gas ionizing section adjacent said inlet, an ion gauge section adjacent said gas ionizing section, and a detector section adjacent said ion gauge section; vacuum means differentially evacuating and drawing said sample gas into said cavity through said inlet; gas ionizer means formed in said substrate in said gas ionizing section of said cavity and including a solid state electron emitter to which sample gas is drawn by said vacuum means and which generates ionized sample gas, and ion optic means comprising electrodes which collimate and accelerate said ionized sample gas; and a detector in said detector section of said cavity arranged in said dispersion plane simultaneously detecting a plurality of said multiple gas constituents.

20. The compact ion gauge of claim 19 wherein said detector comprises a plurality of detector elements each comprising electrodes formed on said substrate and converging towards said dispersion plane, and detector cells formed in said semiconductor substrate removed from said cavity, and connected to said electrodes.