Patent Grant
11553599
This application claims the benefit of the filing date of the Chinese patent application no. 201811581905.7 filed on 24 Dec. 2018, which is incorporated herein by reference in its entirety.
Embodiments of the invention generally relate to a component carrier, a method of manufacturing the same and an arrangement comprising the component carrier.
Ultra-thin substrates comprising pillars are recently demanded by customers. A robust and feasible process is very important for this kind of application.
There is a need to provide a component carrier, a method of manufacturing the same and an arrangement comprising the component carrier, where the component carrier may be formed as an ultra-thin substrate.
This need may be met by a component carrier, a method of manufacturing the same and an arrangement comprising the component carrier according to the independent claims.
According to an exemplary embodiment of the invention, a component carrier is provided, wherein the component carrier comprises a stack including an electrically conductive layer structure and an electrically insulating layer structure; the electrically conductive layer structure having a first plating structure; and a pillar which includes a seed layer portion on the first plating structure and a second plating structure on the seed layer portion.
According to another exemplary embodiment of the invention, a method of manufacturing a component carrier includes the following steps: a) forming a stack having an electrically conductive layer structure and an electrically insulating layer structure; and b) forming the electrically conductive layer structure to have a first plating structure and a pillar which includes a seed layer portion on the first plating structure and a second plating structure on the seed layer portion.
According to an exemplary embodiment of the invention, an arrangement includes a component carrier as described above and another component carrier, wherein the pillar of the component carrier electrically contacts an electrically conductive layer structure of the other component carrier.
Advantageously, there is a short process flow and less investment costs for the pillar process in all embodiments. Furthermore, there is a robust connection for the pillar, and a flexible application for the coreless pillar technology is achieved.
In the context of the present application, the term “pillar” is not only referred to pillar-shaped structures, but may also refer to a bump or a pad. An aspect ratio of a pillar, i.e. a ratio of the height to the diameter of the pillar, can preferably be in a range between 0.01 and 40, more preferred in a range between 0.4 and 2 and most preferred in a range between 0.4 and 1. For example, the pillars may have a diameter in a range of 5 to 200 μm and a height in a range of 2 to 200 μm.
In the context of the present application, the term “component carrier” may particularly denote any support structure which is capable of accommodating one or more components thereon and/or therein for providing mechanical support and/or electrical connectivity. In other words, a component carrier may be configured as a mechanical and/or electronic carrier for components. In particular, a component carrier may be one of a printed circuit board, an organic interposer, and an IC (integrated circuit) substrate. A component carrier may also be a hybrid board combining different ones of the above-mentioned types of component carriers. A component carrier may also be used to interconnect several modules to each other. One module can be carried by two or more component carriers. For example, one and the same main surface of a module can be connected to or carried by two or more component carriers. A component carrier itself may also be a module which in turn is carried by or connected to one or more other component carriers.
In an embodiment, the component carrier comprises a stack of at least one electrically insulating layer structure and at least one electrically conductive layer structure. For example, the component carrier may be a laminate of the mentioned electrically insulating layer structure(s) and electrically conductive layer structure(s), in particular formed by applying mechanical pressure and/or thermal energy. The mentioned stack may provide a plate-shaped component carrier capable of providing a large mounting surface for further components and being nevertheless very thin and compact. The term “layer structure” may particularly denote a continuous layer, a patterned layer or a plurality of non-consecutive islands within a common plane.
In an embodiment, the component carrier is shaped as a plate. This contributes to the compact design, wherein the component carrier nevertheless provides a large basis for mounting components thereon. Furthermore, in particular a naked die as example for an embedded electronic component, can be conveniently embedded, thanks to its small thickness, into a thin plate such as a printed circuit board.
In an embodiment, the component carrier is configured as one of the group consisting of a printed circuit board, and a substrate (in particular an IC substrate).
In the context of the present application, the term “printed circuit board” (PCB) may particularly denote a plate-shaped component carrier which is formed by laminating several electrically conductive layer structures with several electrically insulating layer structures, for instance by applying pressure and/or by the supply of thermal energy. As preferred materials for PCB technology, the electrically conductive layer structures are made of copper, whereas the electrically insulating layer structures may comprise resin and/or glass fibers, so-called prepreg such as FR4 material. The various electrically conductive layer structures may be connected to one another in a desired way by forming holes through the laminate, for instance by laser drilling or mechanical drilling, and by filling them with electrically conductive material (in particular copper), thereby forming vias as hole connections. Apart from one or more components which may be embedded in a printed circuit board, a printed circuit board is usually configured for accommodating one or more components on one or both opposing surfaces of the plate-shaped printed circuit board. They may be connected to the respective main surface by soldering. A dielectric part of a PCB may be composed of resin with glass material (such as glass fibers or glass spheres).
In the following, further exemplary embodiments of the component carrier, the arrangement, the method of manufacturing a component carrier will be explained.
In an embodiment of the component carrier, the seed layer portion is a foil portion; and the foil portion and the second plating structure of the pillar are preferably made of copper. The copper foil may have a thickness of about 0.5 to 5 μm in particular 1 to 3 and more particular 2 to 3 μm.
In an embodiment, the component carrier is a coreless component carrier where the stack is not supported on a core.
In an embodiment, the seed layer portion has an undercut with respect to the first plating structure and the second plating structure. The undercut may have a depth in a range between 0.3 μm and 5 μm.
In an embodiment, the first plating structure is arranged at least partially laterally inside of the electrically insulating layer structure.
In an embodiment, a surface finish either covers only a top surface of the pillar or a top surface and sidewalls of the pillar.
In a preferred embodiment, the surface finish comprises a single layer, in particular silver, Electroless Nickel Electroless Palladium Immersion Gold (ENEPIG), Electroless Nickel Immersion Gold (ENIG), Organic Solderability Preservatives (OSP), or more layers like a double layer, in particular nickel/gold, nickel/silver.
In an embodiment the pillar is tapered from the seed layer portion to the second plating structure.
In an embodiment, the electrically insulating layer structure surrounding the pillar has at least one concave surface portion.
In an embodiment, the stack is not provided with a solder resist on the side, where the pillar is arranged.
In an embodiment of the method described above, the first plating structure is arranged at least partially laterally inside of the electrically insulating layer structure.
In an embodiment, the step a) of the method described above comprises the following substeps: a1) Providing a temporary core having a core base covered by a seed layer, which forms an outer surface of the temporary core; a2) Forming the stack onto the seed layer of the temporary core; and a3) Separating the stack including the first plating structure and the seed layer from the core base of the temporary core; and wherein the step b) comprises the following substeps: b1) Applying a resist onto the seed layer; b2) Removing parts of the resist, for example by lithography or imaging and etching, thereby forming a pattern; b3) Plating the pattern, thereby forming the second plating structure of the pillar in accordance to the pattern; b4) Removing the remaining resist, if applicable after a step of tin plating; b5) Etching the seed layer to reduce a thickness of the seed layer at positions which are not covered by the pillar, thereby forming the seed layer portion; and b6) Providing a surface finish onto the pillar.
The seed layer is used for the pillar plating and for the only etching process. Additional metallization processes such as electroless plating and sputtering are not necessary. This achieves higher reliability in particular on a coreless seed layer.
In step b2) a DFR resist (Dry-Film-Resist) can be used.
In step b4), the remaining resist can be stripped by stripping chemistry, such as by exposure to one or more chemical compounds particularly by etching.
Because the seed layer is already provided in step a1), a separate step of forming a seed layer as in the prior art is not necessary in step b3).
In an embodiment in step b5) of the method described above, an undercut can be formed in the seed layer portion with respect to the first plating structure and the second plating structure. The undercut may have a depth in a range between 0.3 μm and 5 μm.
In step b6), the surface finish can be provided onto the pillar before or after the step b5) of etching the seed layer. If the surface finish is provided onto the pillar before the step of etching the seed layer, the following procedure is conceivable: First, a nickel layer and a subsequent gold layer can be applied or plated onto the pillar to form a surface finish. Thereafter, the etching step is conducted so that only a top surface of the pillar is or remains covered by the surface finish.
If the surface finish is provided onto the pillar after the step of etching the seed layer, the following procedure is conceivable: A surface finish of ENEPIG, ENIG or OSP is applied onto a top surface and sidewalls of the pillar.
In an embodiment, the seed layer is formed by a foil; and the foil and the second plating structure of the pillar are preferably made of copper.
In an embodiment the surface finish comprises a single layer, in particular silver, ENEPIG, ENIG, OSP, or a double layer, in particular nickel/gold, nickel/silver.
In an embodiment, the pillar is formed to taper from the seed layer to the second plating structure.
In an embodiment, the method further comprises a step c) of forming at least one concave surface portion in the electrically insulating layer structure surrounding the pillar.
In an embodiment of the arrangement, at least one of the component carrier and the other component carrier is a printed circuit board or a laminate-type component carrier.
In an embodiment of the arrangement, at a side of the other component carrier facing the component carrier, an electrically insulating layer structure is formed, in which a concavity is formed in correspondence to the other electrically conductive layer structure such that the other electrically conductive layer structure is exposed in the concavity of the other electrically insulating layer structure. Advantageously, a reliable and robust connection between both component carriers can be achieved.
In an embodiment, the component carrier further comprises a component, in particular an electronic component, mounted on and/or embedded in the at least one electrically insulating layer structure and/or the at least one electrically conductive layer structure.
In an embodiment, the component is selected from a group consisting of an electronic component, an electrically non-conductive and/or electrically conductive inlay, a heat transfer unit, a light guiding element, an energy harvesting unit, an active electronic component, a passive electronic component, an electronic chip, a storage device, a filter, an integrated circuit, a signal processing component, a power management component, an optoelectronic interface element, a voltage converter, a cryptographic component, a transmitter and/or receiver, an electromechanical transducer, an actuator, a microelectromechanical system, a microprocessor, a capacitor, a resistor, an inductance, an accumulator, a switch, a camera, an antenna, a magnetic element, a further component carrier and a logic chip.
In an embodiment, the at least one electrically conductive layer structure comprises at least one of the group consisting of copper, aluminum, nickel, silver, gold, palladium, and tungsten, any of the mentioned materials being optionally coated with supra-conductive material such as graphene.
In an embodiment, the at least one electrically insulating layer structure comprises at least one of the group consisting of resin, in particular reinforced or non-reinforced resin, for instance epoxy resin or Bismaleimide-Triazine resin, FR-4, FR-5, cyanate ester, polyphenylene derivate, glass, prepreg material, polyimide, polyamide, liquid crystal polymer, epoxy-based Build-Up Film, polytetrafluoroethylene, a ceramic, and a metal oxide.
In an embodiment, the component carrier is shaped as a plate.
In an embodiment, the component carrier is configured as one of the group consisting of a printed circuit board, and a substrate.
In an embodiment, the component carrier is configured as a laminate-type component carrier.
In the context of the present application, the term “printed circuit board” (PCB) may particularly denote a component carrier (which may be plate-shaped (i.e. planar), three-dimensionally curved (for instance when manufactured using 3D printing) or which may have any other shape) which is formed by laminating several electrically conductive layer structures with several electrically insulating layer structures, for instance by applying pressure, if desired accompanied by the supply of thermal energy. As preferred materials for PCB technology, the electrically conductive layer structures are made of copper, whereas the electrically insulating layer structures may comprise resin and/or glass fibers, so-called prepreg or FR4 material. The various electrically conductive layer structures may be connected to one another in a desired way by forming through-holes through the laminate, for instance by laser drilling or mechanical drilling, and by filling them with electrically conductive material (in particular copper), thereby forming vias as through-hole connections. Apart from one or more components which may be embedded in a printed circuit board, a printed circuit board is usually configured for accommodating one or more components on one or both opposing surfaces of the plate-shaped printed circuit board. They may be connected to the respective main surface by soldering. A dielectric part of a PCB may be composed of resin with reinforcing fibers (such as glass fibers).
In the context of the present application, the term “substrate” may particularly denote a small component carrier having substantially the same size as a component (in particular an electronic component) to be mounted thereon. More specifically, a substrate can be understood as a carrier for electrical connections or electrical networks as well as component carrier comparable to a printed circuit board (PCB), however with a considerably higher density of laterally and/or vertically arranged connections. Lateral connections are for example conductive paths, whereas vertical connections may be for example drill holes. These lateral and/or vertical connections are arranged within the substrate and can be used to provide electrical and/or mechanical connections of housed components or unhoused components (such as bare dies), particularly of IC chips, with a printed circuit board or intermediate printed circuit board. Thus, the term “substrate” also includes “IC substrates”. A dielectric part of a substrate may be composed of resin with reinforcing spheres (such as glass spheres).
The aspects defined above and further aspects of the invention are apparent from the examples of embodiment to be described hereinafter and are explained with reference to these examples of embodiment.
The illustrations in the drawings are schematically presented. In different drawings, similar or identical elements are provided with the same reference signs.
Before, referring to the drawings, exemplary embodiments will be described in further detail, some basic considerations will be summarized based on which exemplary embodiments of the invention have been developed.
According to an exemplary embodiment, a nano-coated structure may be used for component carrier technology, in particular as a dry-adhesive structure. An adhesive layer implementing such a surface configuration may also be denoted as gecko film. The adhesive effect of such a surface may be based on van der Waals forces. Descriptively speaking, a plurality of low dimensioned suction cups may be formed by such a concept. According to an exemplary embodiment of the invention, a reliable substrate and/or structured material is provided for embedding and/or surface mounting applications having specific adhesion properties due to a corresponding configuration of nano- and/or microstructures on this surface. Exemplary embodiments have the advantage that the mentioned adjustability of the surface adhesion properties may be obtained with low material consumption, low production costs, small contamination risk, and high process reliability.
In an embodiment, the mentioned materials may be used as support for component placement in embedding technologies. Compared to a traditional adhesive tape system that is depending on temperature and time, an exemplary embodiment uses the surface of a support (which may be rigid or flexible) or a PCB elements (such as cores, prepregs, copper foils, etc.), that exhibits, thanks to the nano- and/or microstructures, van der Waals attraction forces, a gecko effect, a high grip, and that is dry and thus can be cleaned and reused. A sheet with nano- and/or microstructures can also be included in the final product. When used for an embedding concept, components may be placed on the dry surface and can be held in position by weak bonds (like van der Waals forces, gecko effect, high grip values) prior to the component lamination.
Such an architecture allows to obtain a dry interaction between the component and the holding substrate. No additional liquid adhesive is required. This has the advantages of a dry interaction, and a reduction of risk of contamination from the substrate.
The component carrier 1 comprises a stack 2 comprising an electrically conductive layer structure 3 and an electrically insulating layer structure 4. The electrically conductive layer structure 3 comprises a first plating structure 5 and a plurality of pillars 6. Each pillar 6 comprises a seed layer portion 7 on the first plating structure 5 and a second plating structure 8 on the seed layer portion 7. The pillars 6 may have a diameter in a range of 5 to 200 μm and a height in a range of 2 to 200 μm. The electrically conductive layer structure 3 may have a thickness in a range of 0.5 to 30 μm, preferably a range of 1 to 5 μm.
The seed layer portion 7 is a foil portion made of copper. The copper foil may have a thickness in a range of 0.5 to 5 μm, more particularly in a range of 2 to 3 μm. The second plating structure 8 of the pillars 6 is likewise made of copper. However, both can be made of any other metal material.
The component carrier 1 is a coreless component carrier 1 where the stack 2 is not supported on a core.
The first plating structure 5 is arranged at least partially laterally inside of the electrically insulating layer structure 4.
A surface finish 10 covers a top surface and sidewalls of the pillars 6.
In another embodiment, a surface finish 10 covers only a top surface of the pillars 6.
In one embodiment, the surface finish 10 comprises a single layer, in particular silver, ENEPIG, ENIG, OSP. In another embodiment, the surface finish 10 comprises a double layer, in particular nickel/gold, nickel/silver.
The stack 2 is not provided with a solder resist on the side, where the pillar 6 is arranged.
The component carrier 1 may comprise a component, in particular an electronic component, mounted on and/or embedded in the at least one electrically insulating layer structure 4 and/or the at least one electrically conductive layer structure 3.
The component can be selected from a group consisting of an electronic component, an electrically non-conductive and/or electrically conductive inlay, a heat transfer unit, a light guiding element, an energy harvesting unit, an active electronic component, a passive electronic component, an electronic chip, a storage device, a filter, an integrated circuit, a signal processing component, a power management component, an optoelectronic interface element, a voltage converter, a cryptographic component, a transmitter and/or receiver, an electromechanical transducer, an actuator, a microelectromechanical system, a microprocessor, a capacitor, a resistor, an inductance, an accumulator, a switch, a camera, an antenna, a magnetic element, a further component carrier and a logic chip.
The at least one electrically conductive layer structure 3 may comprise at least one of the group consisting of copper, aluminum, nickel, silver, gold, palladium, and tungsten, any of the mentioned materials being optionally coated with supra-conductive material such as graphene.
The at least one electrically insulating layer structure 4 may comprise at least one of the group consisting of resin, in particular reinforced or non-reinforced resin, for instance epoxy resin or Bismaleimide-Triazine resin, FR-4, FR-5, cyanate ester, polyphenylene derivate, glass, prepreg material, polyimide, polyamide, liquid crystal polymer, epoxy-based Build-Up Film, polytetrafluoroethylene, a ceramic, and a metal oxide.
In the depicted embodiment, the component carrier 1 is shaped as a plate.
The component carrier 1 can be configured as one of the group consisting of a printed circuit board, and a substrate. The component carrier 1 can likewise be configured as a laminate-type component carrier.
The method basically comprises a step a) of a forming a stack 2 comprising an electrically conductive layer structure 3 and an electrically insulating layer structure 4, and a step b) of forming the electrically conductive layer structure 3 to comprise a first plating structure 5 and a pillar 6 which comprises a seed layer portion 7 on the first plating structure 5 and a second plating structure 8 on the seed layer portion 7.
The electrically conductive layer structure 3 can be built-up by a dielectric material such as prepreg, epoxy-based build-up materials like epoxy-based build-up films as in a normal coreless process (ETS, Embedded-Trace-Substrate).
In the embodiment, the step a) comprises substeps a1) to a3) which are described later, and the step b) comprises substeps b1) to b6) which are described later in more detail.
In the method according to the embodiment, the step a) comprises the following substeps: a1) Providing a temporary core 12 having a core base 13 covered by a seed layer 14, which forms an outer surface of the temporary core 12; a2) Forming the stack 2 onto the seed layer 14 of the temporary core 12, wherein the first plating structure 5 can be arranged at least partially laterally inside of the electrically insulating layer structure 4, and a3) Separating the stack 2 including the first plating structure 5 and the seed layer 14 from the core base 13 of the temporary core 12. After having finished the last build-up layer, a solder resist can be applied, which is, however, not essential.
The step b) comprises the following substeps: b1) Applying a resist 15 onto the seed layer 14, for example a DFR resist (Dry-Film-Resist); b2) Removing parts of the resist 15, for example by lithography or imaging and etching, thereby forming a pattern; b3) Plating the pattern, thereby forming the second plating structure 8 of the pillar 6 in accordance to the pattern; b4) Removing the remaining resist 15 for example by etching, if applicable after a step of tin plating; b5) Etching the seed layer 14 to reduce a thickness of the seed layer 14 at positions which are not covered by the pillar 6, thereby forming the seed layer portion 7; and b6) Providing a surface finish 10 onto the pillar 6. In this method, only one etching process is necessary.
In an embodiment, step b6) can be conducted before step b5).
The method further comprises a step of covering a top surface and sidewalls of the pillar 6 by a surface finish 10. In another embodiment, only a top surface of the pillar 6 is covered by a surface finish 10. In one embodiment, the surface finish 10 comprises a single layer, in particular silver, ENEPIG, ENIG, OSP. In another embodiment, the surface finish 10 comprises a double layer, in particular nickel/gold, nickel/silver.
Depending on the etching speed and chemistry, usually by wet etching, different pillar shapes can be generated as shown in
In the embodiment of
The seed layer 14 is formed by a foil made of copper. The second plating structure 8 of the pillar 6 is likewise made of copper. However, both can be made of any other metal material.
In the embodiment of
In the embodiment of
The pillars 6 of the component carrier 1 electrically contact another electrically conductive layer structure 17 of the other component carrier 16.
At least one of the component carrier 1 and the other component carrier 16 can be a printed circuit board (PCB), a substrate or an interposer. In this case the arrangement is a so-called board on board arrangement. Advantageously, a flip-chip connection is neither essential nor necessary.
At a side of the other component carrier 16 facing the component carrier 1, an electrically insulating layer structure 18 is formed, in which concavities are formed in correspondence to the other electrically conductive layer structures 17. Each one of the other electrically conductive layer structures 17 is exposed in a corresponding concavity of the other electrically insulating layer structure 18. Advantageously, a reliable and robust connection between both component carriers 1 and 16 can be achieved. Furthermore, it is not necessary to apply a solder resist on top of the component carrier 1.
The electrical (and optionally mechanical) connection between the other component carrier 16 and the component carrier 1 can be achieved by several options. A first option involves an application of an electrically conductive adhesive, an electrically conductive paste or a solder onto the pillars 6. A second option involves an application of an electrically conductive adhesive, an electrically conductive paste or a solder into the concavity of the electrically insulating layer structure 18 of the other component carrier 16. In a third option, an electrically conductive adhesive, an electrically conductive paste and a solder are not involved. Instead, the other component carrier 16 and the component carrier 1 are coupled by a direct copper-to-copper connection such as copper-copper direct bonding.
The connections may be established by using technologies like mass re-flow, copper-copper direct bonding, thermal compression bonding, soldering, any desired surface mount technology (such as direct chip attach, reflow soldering, use of an Anisotropic Conductive Film (ACF) or an Anisotropic Conductive Paste (ACP)) or other known connection technologies like ALIVH or B2iT.
It should be noted that the term “comprising” does not exclude other elements or steps and the articles “a” or “an” do not exclude a plurality. Also, elements described in association with different embodiments may be combined.
The present invention is applicable to all coreless products having a pillar, such as a pillar made of copper. The present invention is applicable to ultra-thin boards for advanced packages.
Implementation of the invention is not limited to the preferred embodiments shown in the figures and described above. Instead, a multiplicity of variants is possible which variants use the solutions shown and the principle according to the invention even in the case of fundamentally different embodiments.
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