Claims
- 1. A method for electrodeposition of polyimides comprising:immersing an electric conductor in a composition comprising a photoacid generator, a positive-type photosensitive polyimide having oxycarbonyl groups in side chains, a polar solvent which dissolves said polyimide, water, a dispersing agent, and an alkaline neutralizer, and supplying electric current through said electric conductor to deposit a polyimide membrane on said electric conductor which is an anode.
- 2. A method for producing a patterned electro-deposited polyimide membrane, comprising irradiating said polyimide membrane electro-deposited by the method according to claim 1 with a light through a mask pattern, and forming a positive image by development with an alkali.
- 3. The method according to claim 2, wherein said development with an alkali is carried out by using a developing solution containing aminoethanol.
- 4. The method of claim 1, wherein said photoacid generator is at least one selected from the group consisting of esters of naphthoquinone diazide sulfonic acid with trihydroxybenzophenone, trihydroxybenzene, or 2-, or 4-methylphenol; N-phenyl-aminophenyldiazonium salts and triphenylsulfonium salts.
- 5. The method of claim 1, wherein the positive-type photosensitive polyimide having oxycarbonyl groups in side chains is diaminobenzoic acid.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11/256143 |
Aug 1999 |
JP |
|
Parent Case Info
This application is the national phase under 35 U.S.C. §371 of PCT International Application No. PCT/JP00/05285 which has an International filing date of Aug. 7, 2000 which designated the United States of America.
PCT Information
Filing Document |
Filing Date |
Country |
Kind |
PCT/JP00/05285 |
|
WO |
00 |
Publishing Document |
Publishing Date |
Country |
Kind |
WO01/10964 |
2/15/2001 |
WO |
A |
US Referenced Citations (3)
Number |
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Date |
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5202411 |
Itatani et al. |
Apr 1993 |
A |
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Mar 1996 |
A |
5741599 |
Oie et al. |
Apr 1998 |
A |
Foreign Referenced Citations (1)
Number |
Date |
Country |
1024407 |
Aug 2000 |
EP |
Non-Patent Literature Citations (1)
Entry |
Yamaoka et al. Polyfile 2, “Review of Current Status of Development of Photosensitive Polyimides”; pp. 14-18 (1990). |