Patent Grant
8642246
The subject matter relates generally to compositions, coatings and films for use in tri-layer patterning applications and methods of producing the materials.
To meet the requirements for faster performance, the characteristic dimensions of features of integrated circuit devices have continued to be decreased. Manufacturing of devices with smaller feature sizes introduces new challenges in many of the processes conventionally used in semiconductor fabrication. One of the most important of these fabrication processes is photolithography.
Effective photolithography impacts the manufacture of microscopic structures, not only in terms of directly imaging patterns on a substrate, but also in terms of producing masks typically used in such imaging. Typical lithographic processes involve formation of a patterned resist layer by patternwise exposing a radiation-sensitive resist to an imaging radiation. The image is subsequently developed by contacting the exposed resist layer with a material (typically an aqueous alkaline developer) to selectively remove portions of the resist layer to reveal the desired pattern. The pattern is subsequently transferred to an underlying material by etching the material in openings of the patterned resist layer. After the transfer is complete, the remaining resist layer is removed.
For some lithographic imaging processes, the resist used does not provide sufficient resistance to subsequent etching steps to enable effective transfer of the desired pattern to a layer underlying the resist. In many instances (e.g., where an ultrathin resist layer is desired, where the underlying material to be etched is thick, where a substantial etching depth is required, and/or where it is desired to use certain etchants for a given underlying material), a hardmask layer may be used as an intermediate layer between the resist layer and the underlying material to be patterned by transfer from the patterned resist. The hardmask layer receives the pattern from the patterned resist layer and should be able to withstand the etching processes needed to transfer the pattern to the underlying material.
Also, where the underlying material layer is excessively reflective of the imaging radiation used to pattern the resist layer, a thin antireflective coating is typically applied between the underlying layer and the resist layer. In some instances, the antireflection/absorbing and hardmask functions may be served by the same material. In some instances, however, the chemistry of the antireflective layer and hardmask layer may need to be sufficiently different such that integrating this layer between a bottom organic layer and an upper photoresist may be difficult.
In addition, device fabrication has migrated to 90 nm node and smaller for next generation chips. The resist thickness has to be thinner than 300 nm due to image collapsing problems, low focus latitude from high NA tool, and high OD of resist formulation in 193 and 157 nm lithography Conventional thin resist films are not sufficient for etching processes. It may be desirable to have hardmask compositions which can be easily etched selective to the overlying photoresist while being resistant to the etch process needed to pattern the underlying layer. In a conventional multi-layer resist method, the bottom layer film consisting of the thick organic material film formed by coating on the film which is processed to form the flat surface, and a mask pattern consisting of a thin inorganic material film is formed on this flat surface by the ordinary photopatterning technology, as what is shown in Prior Art
To form the patterns with good accuracy, it is necessary to form the mask pattern consisting of the intermediate film with high degree of accuracy. For this purpose, in the above-mentioned photopatterning step, it is important to absorb the light reflected from the surface of the film which is processed at the different-level portions and the like in the bottom layer film and intermediate film and thereby to prevent the reflected light from reaching the top layer film (the photoresist film).
However, since the intermediate film is used as the mask for etching the thick bottom layer film as described above, it is required that the intermediate film has enough resistance against the anisotropic etching such as the reactive sputter-etching or the like. In the conventional intermediate film, only the dry etching resisting property is seriously considered, but the consideration was not made with respect to the light absorption.
On the other hand, in the conventional multilayer resist method, only the reduction of the light reflected from the surface of the film which is processed by increasing the light absorption by the bottom layer film is seriously considered, and it was thought that the larger light extinction coefficient of the bottom layer film is more preferably.
However, an excessive large light extinction coefficient of the bottom layer film causes the amount of light reflected from the surface of the bottom layer film to be increased, so that the sum of the reflection light from the surface of the layer to be processed which passes through the bottom layer film and the light reflected by the surface of the bottom layer film contrarily increases. Thus, it has been found that the accuracy of dimensions of the resulting patterns is reduced. In addition, it has been found that not only the reflection light from the surface of the bottom layer film but also the reflection light from the surface of the intermediate film becomes a cause of reduction of the accuracy of dimensions of the patterns.
In another general trilayer approach, the underlayer is first applied to the surface of the substrate using a conventional deposition process such as chemical vapor deposition, spin-on coating, evaporation, plasma-assisted chemical vapor deposition, or physical vapor deposition. The thickness of the underlayer is typically about 80 to about 8000 nm. Next, an antireflective coating (BARC)/hardmask is applied to the upper surface of the underlayer utilizing a conventional deposition process such as spin-on coating, evaporation, chemical vapor deposition, plasma-assisted chemical vapor deposition, physical vapor deposition and other like deposition processes. This thickness of the anti-reflective coating/hardmask is typically from about 10 to about 500 nm, with a thickness from about 20 to about 200 nm being more typical.
In order to pattern the trilayer structure, a conventional photoresist is applied to the upper surface of the anti-reflective coating/hardmask and then the photoresist is subjected to conventional lithography which includes the steps of exposing the photoresist to a pattern of radiation, and developing the pattern into the exposed photoresist utilizing a conventional resist developer. Following the lithography step, the pattern is transferred into the trilayer structure by transferring the pattern from the resist to the anti-reflective coating/hardmask, and continuing the pattern transfer from the anti-reflective coating/hardmask to the underlayer and then to the substrate.
The first pattern transfer step typically includes the use of a dry etching process such as reactive-ion etching, ion beam etching, plasma etching or laser ablation. Reactive-ion etching is a preferred etching technique for transferring the pattern from the patterned photoresist to the anti-reflective coating/hardmask.
As stated above, after the first pattern transfer step, the pattern is transferred from the remaining resist and anti-reflective coating/hardmask to the underlayer and then the substrate utilizing one or more etching steps such as reactive ion etching, ion beam etching, plasma etching or laser ablation. The substrate may also be electroplated, metal deposited or ion implanted to form patterned structure. Preferably, the underlayer is etched by using oxygen as an etchant gas or plasma. During or after pattern transfer into the substrate, the anti-reflective coating/hardmask and underlayer are removed utilizing one or more patterning/etching processes that are capable of removing those layers. The result of this process is a patterned substrate.
Based on the different chemistries of the materials utilized in layered applications, along with the goals of the device/circuit and the patterning/etching process, it is clear that it may be more difficult than originally thought to produce and integrate an intermediate material that is compatible with both a bottom organic planarizing layer and an upper photoresist layer. Therefore, an absorbing/anti-reflective coating and lithography material needs to be developed that a) absorbs uniformly in the ultraviolet spectral region, b) contributes to improved photoresist patterning by expanding the focus matrix and the exposure latitude; c) provides improved adhesion between the anti-reflective coating layer and the organic planarizing layer in a tri-layer application and/or tri-layer patterning process; d) has a high etch selectivity; e) forms solutions that are stable and have a good shelf life; f) can be applied to a surface by any suitable application method, such as spin-on coating or chemical vapor deposition (CVD); and g) can be utilized in a number of applications, components and materials, including logic applications and flash applications. Contemplated anti-reflective coating/hardmask combinations, additives, coatings and/or materials are designed to replace and/or eliminate the middle inorganic layer that rests between the anti-reflective coating and the organic planarizing layer.
Compositions for use in tri-layer applications are described herein, wherein the composition has a matrix and includes: a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, at least one condensation catalyst, and at least one solvent.
Tri-layer structures are also contemplated herein that comprise an organic underlayer (first layer), antireflective compositions and/or films contemplated herein (second layer) and a photoresist material (third layer) that are coupled to one another.
Methods of producing a composition for tri-layer patterning applications includes: providing a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, providing at least one condensation catalyst, providing at least one solvent, providing at least one pH modifier, blending the formulated polymer and part of the at least one solvent in a reaction vessel to form a reactive mixture; and incorporating the at least one pH modifier, the at least one condensation catalyst and the remaining at least one solvent into the reactive mixture to form the composition.
Prior Art
Tri-level photoresist patterning and related applications are important in order to achieve high numerical aperture patterning. In order to increase feature resolution, you must either lower the wavelength (by moving to 193 nm lithography) and/or increase the numerical aperture. In addition, a dual-level bottom antireflective coating or BARC reduces the substrate reflectivity or the light reflected back into the photoresist. Utilizing a tri-level or tri-layer patterning scheme also facilitates a dual patterning scheme (DPS), which splits the patterning of aggressive features into two distinct patterning steps. This DPS is an alternative to moving to a higher numerical aperture or next generation wavelength systems. These tri-layer patterning processes also facilitate the use of thinner ArF photoresist—plasma etch load now placed on the middle or intermediate layer and organic underlayer. ArF photoresist can now be designed for patterning performance and not competing plasma etch resiliance.
Prior Art
Based on the goals discussed earlier and the description of the conventional multi-layer or tri-layer patterning applications, compositions, absorbing/anti-reflective coatings and lithography materials have now been developed for these applications that a) absorb uniformly in the ultraviolet spectral region, b) contribute to improved photoresist patterning by expanding the focus matrix and the exposure latitude; c) provide improved adhesion between the anti-reflective coating layer and the organic planarizing layer in a tri-layer application and/or tri-layer patterning process; d) have a high etch selectivity; e) form solutions that are stable and have a good shelf life; f) can be applied to a surface by any suitable application method, such as spin-on coating or chemical vapor deposition (CVD); and g) can be utilized in a number of applications, components and materials, including logic applications and flash applications. These additives, coatings and/or materials are designed to replace and/or eliminate the middle inorganic layer that rests between the anti-reflective coating and the organic planarizing layer.
Compositions for use in tri-layer applications are described herein, wherein the composition has a matrix and includes: a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, at least one condensation catalyst, and at least one solvent.
Tri-layer structures are also contemplated herein that comprise an organic underlayer (first layer), compositions, antireflective compositions and/or films contemplated herein (second layer) and a photoresist material (third layer) that are coupled to one another.
As used herein, the term “coupled” means that a plurality of monomers, moieties or constituents, a surface and layer or two layers are physically or chemically attached to one another or there's a physical attraction between two parts of matter or components, including bond forces such as covalent and ionic bonding, and non-bond forces such as Van der Waals, electrostatic, coulombic, hydrogen bonding and/or magnetic attraction. As used herein, “coupled” also refers to moieties or substituents that are physically drawn to, attached to, trapped in or chemically bonded to the matrix. Also, as used herein, the term coupled is meant to encompass a situation where two layers or materials are directly attached to one another, but the term is also meant to encompass the situation where the two layers or materials are coupled to one another indirectly—such as the case where there's an adhesion promoter layer between two other layers.
Methods of producing a composition for tri-layer patterning applications includes: providing a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, providing at least one condensation catalyst, providing at least one solvent, providing at least one pH modifier, blending the formulated polymer and part of the at least one solvent in a reaction vessel to form a reactive mixture; and incorporating the at least one pH modifier, the at least one condensation catalyst and the remaining at least one solvent into the reactive mixture to form the composition.
“High Ratio” Inorganic Materials
High ratio inorganic materials and/or compounds are contemplated as a component in the compositions and coatings contemplated herein and, other than the at least one solvent, are present in the compositions and materials in the highest concentration of any component. In contemplated embodiments, these inorganic compounds and/or materials have a high molar ratio (“high ratio”) of inorganic atom-oxygen linkages to other components or atoms, which in turn increases the “inorganic character” of the compound, as compared to compounds that may contain more carbon atoms. These inorganic materials are generally non-absorbing or weakly absorbing at some wavelengths and are designed to provide inorganic character to the composition without affecting the absorbing or adhesion characteristics of the composition or resulting coatings or films. In some embodiments, high ratio inorganic materials and/or compounds comprises silicon, which helps to increase the inorganic character of the ultimate composition through the incorporation of more silicon into the composition.
Specific examples of high ratio inorganic compounds and/or materials include silicon-based moieties, such as polymers, compounds, moities, substituents and/or monomers, which lead to more Si—O linkages in the composition or material. Contemplated silicon-based compounds and/or monomers include alkoxysilane compounds, such as tetramethoxysilane, tetraethoxysilane, tetrabutoxysilane, siloxane compounds, such as methylsiloxane, methylsilsesquioxane, some silazane polymers, dimethylsiloxane, silicate polymers, silsilic acid derivaties, acetoxy-based monomers and mixtures thereof. A contemplated silazane polymer is perhydrosilazane, which has a “transparent” polymer backbone.
Absorbing Materials
Contemplated compositions, materials, coatings and films also comprise at least one absorbing compound. Unlike the high ratio inorganic compounds discussed earlier, and other constituents disclosed herein, these contemplated absorbing compounds comprise a moiety within the compound that allows it to absorb light at particular wavelengths, and in some cases very strongly absorb light at particular wavelengths. Many naphthalene-, phenanthrene- and anthracene-based compounds have significant absorption at 248 nm and below. Benzene-based, equivalently termed here phenyl-based, compounds have significant absorption at wavelengths shorter than 200 nm. While these naphthalene-, anthracene-, phenanthrene- and phenyl-based compounds are frequently referred to as dyes, the term absorbing compound is used here because the absorptions of these compounds are not limited to wavelengths in the visible region of the spectrum.
However, not all such absorbing compounds can be incorporated into inorganic-based materials for use as anti-reflective coating materials. Contemplated absorbing compounds suitable for use have a definable absorption peak centered around wavelengths such as 248 nm, 193 nm, 157 nm or other ultraviolet wavelengths, such as 365 nm, that may be used in photolithography. It is contemplated that a suitable “definable absorption peak” is one that is at least 0.5 nm in width, wherein width is calculated by those methods commonly known in the art of photolithography. In other embodiments, the definable absorption peak is at least 1 nm in width. In yet other embodiments, the definable absorption peak is at least 5 nm in width. In some contemplated embodiments, the definable absorption peak is at least 10 nm in width.
The chromophores of suitable absorbing compounds typically have at least one benzene ring, and where there are two or more benzene rings, the rings may or may not be fused. Other chromaphores have “aromatic-type” linkages, such as vinyl groups at the ends or within the compounds that convert the compound to an absorbing compound. Incorporatable absorbing compounds have an accessible reactive group attached to the chromophore, wherein the reactive groups include hydroxyl groups, amine groups, carboxylic acid groups, and substituted silyl groups with silicon bonded to one, two, or three “leaving groups,” such as alkoxy groups, acetoxy groups or halogen atoms. Ethoxy or methoxy groups or chlorine atoms are frequently used as leaving groups. Contemplated reactive groups comprise siliconalkoxy, silicondialkoxy and silicontrialkoxy groups, such as siliconethoxy, silicondiethoxy, silicontriethoxy, siliconmethoxy, silicondimethoxy, and silicontrimethoxy groups and halosilyl groups, such as chlorosilyl, dichlorosilyl, and trichlorosilyl groups, and acetoxy groups like methyltriacetoxysilane, tetraacetoxysilane.
The reactive groups may be directly bonded to the chromophore, as, for example, in phenyltriethoxysilane, or the reactive groups may be attached to the chromophore through an ester, a ketone and/or oxygen linkage or a hydrocarbon bridge, as, for example, in 9-anthracene carboxy-alkyl trialkoxysilane. The inclusion of silicontrialkoxy groups on chromophores has been found to be advantageous, especially for promoting stability of the absorbing spin-on glass or “SOG” films. Other useful absorbing compounds are those compounds that contain an azo group, —N═N—, and an accessible reactive group, particularly those containing an azo group linking benzene rings, especially when absorption around 365 nm is desired for the particular application. Azo groups may be included as part of a straight-chain molecule, a cyclic molecule or a hybrid straight-chain/cyclic molecule.
The absorbing compounds may be incorporated interstitially in the inorganic-based material matrix. The absorbing compounds may also be chemically bonded to the inorganic-based material or polymer through crosslinking reactions. In some contemplated embodiments, the incorporatable absorbing compounds form bonds with the inorganic-based material backbone or polymer backbone via the accessible reactive groups.
Examples of absorbing compounds suitable for use include those absorbing compounds that have a definable absorption peak around wavelengths less than about 375 nm, such as 365 nm, 248 nm, 193 nm and 157 nm, which include compounds such as anthraflavic acid (1), 9-anthracene carboxylic acid (2), 9-anthracene methanol (3), 9-anthracene ethanol (4), 9-anthracene propanol (5), 9-anthracene butanol (6), alizarin (7), quinizarin (8), primuline (9), 2-hydroxy-4-(3-triethoxysilylpropoxy)-diphenylketone (10), 2-hydroxy-4-(3-trimethoxysilylpropoxy)-diphenylketone (11), 2-hydroxy-4-(3-tributoxysilyipropoxy)-diphenylketone (12), 2-hydroxy-4-(3-tripropoxysilylpropoxy)-diphenylketone (13), rosolic acid (14), triethoxysilylpropyl-1,8-naphthalimide (15), trimethoxysilylpropyl-1,8-naphthalimide (16), tripropoxysilylpropyl-1,8-naphthalimide (17), 9-anthracene carboxy-methyl triethoxysilane (18), 9-anthracene carboxy-ethyl triethoxysilane (19), 9-anthracene carboxy-butyl triethoxysilane (20), 9-anthracene carboxy-propyl triethoxysilane (21), 9-anthracene carboxy-methyl trimethoxysilane (22), 9-anthracene carboxy-ethyl tributoxysilane (23), 9-anthracene carboxy-methyl tripropoxysilane (24), 9-anthracene carboxy-propyl trimethoxysilane (25), phenyltriethoxysilane (26), phenyltrimethoxysilane (27), phenyltripropoxysilane (28), 10-phenanthrene carboxy-methyl triethoxysilane (29), 10-phenanthrene carboxy-ethyl triethoxysilane (30), 10-phenanthrene carboxy-methyl trimethoxysilane (31), 10-phenanthrene carboxy-propyl triethoxysilane (32), 4-phenylazophenol, (33), 4-ethoxyphenylazobenzene-4-carboxy-methyl triethoxysilane (34), 4-methoxyphenylazobenzene-4-carboxy-ethyl triethoxysilane (35), 4-ethoxyphenylazobenzene-4-carboxy-propyl triethoxysilane (36), 4-butoxyphenylazobenzene-4-carboxy-propyl triethoxysilane (37), 4-methoxyphenylazobenzene-4-carboxy-methyl triethoxysilane (38), 4-ethoxyphenylazobenzene-4-carboxy-methyl triethoxysilane (39), 4-methoxyphenylazobenzene-4-carboxy-ethyl triethoxysilane (40), 4-methoxyphenylazobenzene-4-carboxy-propyl triethoxysilane (41), vinyltriethoxysilane (42) and combinations, thereof. It should be appreciated, however, that this list of specific compounds is not an exhaustive list, and that contemplated compounds can be selected from the broader chemical compound classes that comprise these specific compounds.
Absorbing compounds 1-25 and 29-41 are available commercially, for example, from Aldrich Chemical Company (Milwaukee, Wis.). 9-anthracene carboxy-alkyl trialkoxysilanes are synthesized using esterification methods, as described in detail in PCT Patent Application Serial No. PCT/US02/36327 filed on Nov. 12, 2002, which is commonly-owned and incorporated herein in its entirety by reference, including all related and commonly-owned foreign and domestic issued patents and patent applications. Absorbing compound 26-28 is available commercially from Gelest, Inc. (Tullytown, Pa.). Examples of phenyl-based absorbing compounds in addition to absorbing compound (26-28), many of which are also commercially available from Gelest, Inc., include structures with silicon-based reactive groups attached to phenyl rings or to substituted phenyls, such as methylphenyl, chlorophenyl, and chloromethylphenyl. Specific phenyl-based absorbing compounds include phenyltrimethoxysilane, benzyltrichlorosilane, chloromethylphenyltrimethoxysilane, phenyltrifluorosilane, to name only a few examples. Diphenyl silanes including one or two “leaving groups,” such as diphenylmethylethoxysilane, diphenyldiethoxysilane, and diphenyldichlorosilane, to again name only a few examples, are also suitable incorporatable absorbing compounds Alkoxybenzoic acids may also be used as absorbing compounds, including methoxybenzoic acid
Adhesion Promoters
In some contemplated embodiments, the at least one adhesion promoter comprises at least one of the following characteristics: a) is thermally stable after heat treatment, such as baking, at temperatures generally used for electronic and semiconductor component manufacture; b) has a relatively low catalytic ability, in that the donor does not initiate significant crosslinking activity in the composition to which it is added; c) is relatively neutral, so that the composition retains a low pH; d) is acidic, in order to lower the pH of the composition; e) does not initiate or propagate reactions that increase the molecular weight of species in the composition to which it is added; f) can surprisingly act as an adhesion promoter by promoting electrostatic and coulombic interactions between layers of materials, as opposed to conventionally understood Van der Waals interactions.
Adhesion to an organic resist polymer designed for low absorptivity in the UV is inherently difficult because such resists are designed with low polarity and few functional groups with which to interact adhesively. The adhesion mechanisms of silica-based formulations specifically to these organic resist polymers follows one of two pathways: a) adhesion promotion due to reduction in silanol content and increase in Van der Waals interactions and b) adhesion promotion due to an increase in the ionic contributions such as electrostatic and coulombic interaction.
In some embodiments, adhesion promoters may comprise polydimethylsiloxane materials, ethoxy or hydroxy-containing silane monomers, vinyl-containing silane monomers, such as vinyltriethoxysilane (VTEOS), acrylated silane monomers, or silyl hydrides. VTEOS, for example, has been shown to impart enhanced adhesion improvement in coatings and compositions, such as those described in the Examples section. VTEOS can act both as an adhesion promoter and as an absorbing compound. Surprisingly, as is shown in the Examples section, the addition of VTEOS also improved the exposure latitude and depth of focus in the films. In other words, the presence of VTEOS greatly improved photoresist adhesion and patterning process margin.
In a contemplated embodiment, the addition of at least one adhesion promoter, such as at least one weak acid/weak base, at least one weak acid/strong base, at least one strong acid/strong base, at least one strong acid/weak base, at least one amine base, at least one amine salt or a combination thereof increases the electrostatic and coulombic interaction. Both modeled and experimental results indicate that the salt and not the neutral (non-ionic) form of the amine enhance adhesion sufficiently with the resist to avoid collapse of lithographically defined resist lines. This adhesion enhancement is demonstrated in the successful use of higher pH amine formulations (for example pH 5.5 formulations) where and APTEOS nitrate salt has been formed. This mechanism can also be found when using other amine salts such as: APTEOS acetate, APTEOS sulfonate, APTEOS methanesulfonate, APTEOS triflate, APTEOS tosylate, APTEOS nonafluorobutane-1-sulfonate (nfbs), tetramethylammonium hydroxide, tetramethylammonium acetate, tetramethylammonium nitrate, tetramethylammonium sulfate, tetramethylammonium methanesulfonate, tetramethylammonium triflate, tetramethylammonium tosylate, tetramethylammonium nfbs, tetramethylammonium triflate, ammonium nitrate, ammonium acetate, ammonium triflate, ammonium tosylate, ammonium sulfonate, ammonium methanesulfonate, or any other amine salt or combination of amine salts. Suitable amine bases comprise ammonium, pyridine, aniline, TMAH, CTAH, TBAH, APTEOS or a combination thereof. The modeled adhesion energies indicates that the higher ionic salts (higher charged centers) increase the adhesion better than those in which the charge may be more distributed, such as in ammonium centers with large R groups. (see Table 1 below) Mechanisms and apparatus used for the modeling experiments are those found in U.S. Pat. No. 6,544,650 issued to Nancy Iwamoto, and U.S. application Ser. Nos. 09/543,628; 10/113,461; 10/326,233 and related PCT Applications, such as PCT/US03/07607, and foreign applications, all of which are commonly owned by Honeywell International Inc. and which are incorporated herein in their entirety.
The phrase “adhesion promoter” as used herein means any component or combination of components that when used with a target composition, improves the adhesion of the target composition to substrates and/or surfaces as compared to using the target composition alone. The target composition may comprise any composition that can be or is applied to a substrate, surface, layered surface, electronic or semiconductor component, including a formulated polymer, an antireflective composition, a coating material and/or a thermally degradable polymer. The adhesion promoter may be a co-monomer reacted with a thermally degradable polymer precursor or an additive to a thermally degradable polymer precursor. Examples of several useful adhesion promoters are disclosed in commonly assigned pending U.S. application Ser. No. 10/158,513 filed May 30, 2002 incorporated herein in its entirety.
In some embodiments, enhancement of the adhesion is concentration controlled, so that any procedure that helps to concentrate the adhesion promoter, such as an amine salt, at the interface of the adjacent layer, such as a silica-resist, will help adhesion. A simple solution is increasing the amount of salt species introduced into the formulation. Such other procedures include: solvation control of the salt by control of solvent; evaporation control of the solvent during spin coat or bake; addition of solubility control agents which control solubility of the salt, and addition of ammonium species to the resist.
Modeling indicates that a salt mixture can be used with the same effectiveness as a single component. These mixed salt adhesion promotion schemes can be used when an increase in organic amine is required for solvent compatibility. In this case, a larger R group on the substituted ammonium center may be used, but the loss in adhesion can be compensated by addition of a more charged center such as ammonium.
As mentioned, a contemplated adhesion promoter may comprise nitrogen, phosphorus or any other similarly characterized atom. Contemplated adhesion promoters may comprise a neutral or acidic compound or molecule, such as amines salts, methylammonium nitrate, tetramethylammonium acetate (TMAA), tetrabutylammonium acetate (TBAA), cetyltrimethylammonium acetate (CTAA), and tetramethylammonium nitrate (TMAN). TMAN can be obtained by either dissolving TMAN in water or by converting TMAA or TMAH to TMAN by using nitric acid. Contemplated salts comprise those salts from strong acids and primary, secondary, tertiary or tetraamines.
Another suitable adhesion promoter contemplated herein is to utilize an amine salt, such as those already disclosed herein, synthesized using at least one acid with a long tail or bulky group, such as nonafluorobutane-1-sulfonic acid (nfbs) or dodecylbenzenesulfonic acid (dbs) or to utilize an acid bonded to a silane having a reactive functional group, such as acid-TEOS.
In addition, adhesion enhancement is demonstrated in the successful use of higher pH amine formulations (for example pH 5.5 formulations) where and APTEOS nitrate salt has been formed. This mechanism can also be found when using other amine salts such as: APTEOS acetate, APTEOS sulfonate, APTEOS methanesulfonate, APTEOS triflate, APTEOS tosylate, APTEOS nonafluorobutane-1-sulfonate (nfbs), tetramethylammonium hydroxide, tetramethylammonium acetate, tetramethylammonium nitrate, tetramethylammonium sulfate, tetramethylammonium methanesulfonate, tetramethylammonium triflate, tetramethylammonium tosylate, tetramethylammonium nfbs, tetramethylammonium triflate, ammonium nitrate, ammonium acetate, ammonium triflate, ammonium tosylate, ammonium sulfonate, ammonium methanesulfonate, or any other amine salt or combination of amine salts. Suitable amine bases comprise ammonium, pyridine, aniline, TMAH, CTAH, TBAH, APTEOS or a combination thereof.
In some embodiments, the ratio of “mole of nitrogen/Si-compound weight (ppm)” in nitrogen containing absorbing compositions and/or coating materials is greater than about 0.01. In other embodiments, the ratio of “mole of nitrogen/Si-compound weight (ppm)” in nitrogen containing absorbing compositions and/or coating materials is greater than about 3. In yet other embodiments, the ratio of “mole of nitrogen/Si-compound weight (ppm)” in nitrogen containing absorbing compositions and/or coating materials is greater than about 4. The optimum ratio depends on an evaluation of several properties by the skilled artisan of the coating material/composition, such as the amount of organic moiety present in the material/composition, the degree of crosslinking present in the material/composition and the pH of the material/composition; however, it should be understood that the ratio influences the lithography properties and film densification properties more so than any other previously mentioned material/composition property with respect to nitrogen-containing compositions. It should also be understood that depending on the amount of organic moiety present, the degree of crosslinking present and/or the pH of the material/composition, a suitable mole/weight ratio can be recognized and used to produce the absorbing compositions and/or coating materials contemplated herein. As mentioned, it should be understood that the at least one adhesion promoter can also function as a crosslinking agent or a catalyst.
Adhesion promoters contemplated herein may also comprise compounds having at least bifunctionality wherein the bifunctionality may be the same or different and at least one of the first functionality and the second functionality is selected from the group consisting of Si-containing groups; N-containing groups; C bonded to O-containing groups; hydroxyl groups; and C double bonded to C-containing groups. The phrase “compound having at least bifunctionality” as used herein means any compound having at least two functional groups capable of interacting or reacting, or forming bonds as follows. The functional groups may react in numerous ways including addition reactions, nucleophilic and electrophilic substitutions or eliminations, radical reactions, etc. Further alternative reactions may also include the formation of non-covalent bonds, such as Van der Waals, electrostatic bonds, ionic bonds, and hydrogen bonds.
In some embodiments of the at least one adhesion promoter, preferably at least one of the first functionality and the second functionality is selected from Si-containing groups; N-containing groups; C bonded to O-containing groups; hydroxyl groups; and C double bonded to C-containing groups. Preferably, the Si-containing groups are selected from Si—H, Si—O, and Si—N; the N-containing groups are selected from such as C—NH2 or other secondary and tertiary amines, imines, amides, and imides; the C bonded to O-containing groups are selected from ═CO, carbonyl groups such as ketones and aldehydes, esters, —COOH, alkoxyls having 1 to 5 carbon atoms, ethers, glycidyl ethers; and epoxies; the hydroxyl group is phenol; and the C double bonded to C-containing groups are selected from allyl and vinyl groups. For semiconductor applications, the more preferred functional groups include the Si-containing groups; C bonded to O-containing groups; hydroxyl groups; and vinyl groups.
Contemplated adhesion promoters may also comprise an organic resin-based material that further comprises phenolic-containing resins, novolac resins, such as CRJ-406 or HRJ-11040 (both from Schenectady International, Inc.), organic acrylate and/or a styrene resins. Other adhesion promoters may comprise polydimethylsiloxane materials, ethoxy or hydroxy-containing silane monomers, vinyl-containing silane monomers, acrylated silane monomers, or silyl hydrides.
An example of a contemplated adhesion promoter having Si-containing groups is silanes of the Formula I: (R14)k(R15)lSi(R16)m(R17)n wherein R14, Ru15, R16, and R17 each independently represents hydrogen, hydroxyl, unsaturated or saturated alkyl, substituted or unsubstituted alkyl where the substituent is amino or epoxy, saturated or unsaturated alkoxyl, unsaturated or saturated carboxylic acid radical, or aryl; at least two of R14, R15, R16, and R17 represent hydrogen, hydroxyl, saturated or unsaturated alkoxyl, unsaturated alkyl, or unsaturated carboxylic acid radical; and k+l+m+n≦4. Examples include vinylsilanes such as H2C═CHSi(CH3)2H and H2C═CHSi(R18)3 where R18 is CH3O, C2H5O, AcO, H2C═CH, or H2C═C(CH3)O—, (R18=alkoxy, acetoxy groups), or vinylphenylmethylsilane; allylsilanes of the formula H2C═CHCH2—Si(OC2H5)3 and H2C═CHCH2—Si(H)(OCH3)2; glycidoxypropylsilanes such as (3-glycidoxypropyl)methyldiethoxysilane and (3-glycidoxypropyl)trimethoxysilane; methacryloxypropylsilanes of the formula H2C═(CH3)COO(CH2)3—Si(OR19)3 where R19 is an alkyl, preferably methyl or ethyl; aminopropylsilane derivatives including H2N(CH2)3Si(OCH2CH3)3, H2N(CH2)3Si(OH)3, or H2N(CH2)3OC(CH3)2CH═CHSi(OCH3)3. The aforementioned silanes are commercially available from Gelest.
An example of a contemplated adhesion promoter having C bonded to O-containing groups is glycidyl ethers including but not limited to 1,1,1-tris-(hydroxyphenyl)ethane tri-glycidyl ether which is commercially available from TriQuest. An example of a preferred adhesion promoter having C bonded to O-containing groups is esters of unsaturated carboxylic acids containing at least one carboxylic acid group. Examples include trifunctional methacrylate ester, trifunctional acrylate ester, trimethylolpropane triacrylate, dipentaerythritol pentaacrylate, and glycidyl methacrylate. The foregoing adhesion promoters are commercially available from Sartomer.
One contemplated adhesion promoter having vinyl groups is vinyl cyclic pyridine oligomers or polymers wherein the cyclic group is pyridine, aromatic, or heteroaromatic. Useful examples include but not limited to 2-vinylpyridine and 4-vinylpyridine, commercially available from Reilly; vinyl aromatics; and vinyl heteroaromatics including but not limited to vinyl quinoline, vinyl carbazole, vinyl imidazole, and vinyl oxazole.
An example of a preferred adhesion promoter having Si-containing groups is the polycarbosilane disclosed in commonly assigned copending allowed U.S. patent application Ser. No. 09/471,299 filed Dec. 23, 1999 incorporated herein by reference in its entirety. The polycarbosilane is that shown in Formula II:
in which R20, R26, and R29 each independently represents substituted or unsubstituted alkylene, cycloalkylene, vinylene, allylene, or arylene; R21, R22, R23, R24, R27, and R28 each independently represents hydrogen atom or organo group comprising alkyl, alkylene, vinyl, cycloalkyl, allyl, or aryl and may be linear or branched; R25 represents organosilicon, silanyl, siloxyl, or organo group; and p, q, r, and s satisfy the conditions of [4≦p+q+r+s≦100,000], and q and r and s may collectively or independently be zero. The organo groups may contain up to 18 carbon atoms but generally contain from about 1 to about 10 carbon atoms. Useful alkyl groups include —CH2— and —(CH2)t— where t>1.
Contemplated polycarbosilanes include dihydridopolycarbosilanes in which R20 is a substituted or unsubstituted alkylene or phenyl, R21 group is a hydrogen atom and there are no appendent radicals in the polycarbosilane chain; that is, q, r, and s are all zero. Another preferred group of polycarbosilanes are those in which the R21, R22, R23, R24, R25, and R28 groups of Formula II are substituted or unsubstituted alkenyl groups having from 2 to 10 carbon atoms. The alkenyl group may be ethenyl, propenyl, allyl, butenyl or any other unsaturated organic backbone radical having up to 10 carbon atoms. The alkenyl group may be dienyl in nature and includes unsaturated alkenyl radicals appended or substituted on an otherwise alkyl or unsaturated organic polymer backbone. Examples of these preferred polycarbosilanes include dihydrido or alkenyl substituted polycarbosilanes such as polydihydridocarbosilane, polyallylhydrididocarbosilane and random copolymers of polydihydridocarbosilane and polyallylhydridocarbosilane.
In other contemplated polycarbosilanes, the R21 group of Formula II is a hydrogen atom and R21 is methylene and the appendent radicals q, r, and s are zero.
Other preferred polycarbosilane compounds of the invention are polycarbosilanes of Formula II in which R21 and R27 are hydrogen, R20 and R29 are methylene, and R28 is an alkenyl, and appendent radicals q and r are zero. The polycarbosilanes may be prepared from well-known prior art processes or provided by manufacturers of polycarbosilane compositions. In the most preferred polycarbosilanes, the R21 group of Formula II is a hydrogen atom; R24 is —CH2—; q, r, and s are zero and p is from 5 to 25. These polycarbosilanes may be obtained from Starfire Systems, Inc.
As can be observed in Formula II, the polycarbosilanes utilized may contain oxidized radicals in the form of siloxyl groups when r>0. Accordingly, R25 represents organosilicon, silanyl, siloxyl, or organo group when r>0. It is to be appreciated that the oxidized versions of the polycarbosilanes (r>0) operate very effectively in, and are well within the purview of the present invention. As is equally apparent, r can be zero independently of p, q, and s the only conditions being that the radicals p, q, r, and s of the Formula II polycarbosilanes must satisfy the conditions of [4<p+q+r+s<100,000], and q and r can collectively or independently be zero.
The polycarbosilane may be produced from starting materials that are presently commercially available from many manufacturers and by using conventional polymerization processes. As an example of synthesis of the polycarbosilanes, the starting materials may be produced from common organo silane compounds or from polysilane as a starting material by heating an admixture of polysilane with polyborosiloxane in an inert atmosphere to thereby produce the corresponding polymer or by heating an admixture of polysilane with a low molecular weight carbosilane in an inert atmosphere to thereby produce the corresponding polymer or by heating an admixture of polysilane with a low molecular carbosilane in an inert atmosphere and in the presence of a catalyst such as polyborodiphenylsiloxane to thereby produce the corresponding polymer. Polycarbosilanes may also be synthesized by the Grignard Reaction reported in U.S. Pat. No. 5,153,295 hereby incorporated by reference in its entirety.
An example of a preferred adhesion promoter having hydroxyl groups is phenol-formaldehyde resins or oligomers of the Formula III —[R30C6H2(OH)(R31)]u— where R30 is substituted or unsubstituted alkylene, cycloalkylene, vinyl, allyl, or aryl; R31 is alkyl, alkylene, vinylene, cycloalkylene, allylene, or aryl; and u=3-100. Examples of useful alkyl groups include —CH2— and —(CH2)v— where v>1. A particularly useful phenol-formaldehyde resin oligomer has a molecular weight of 1500 and is commercially available from Schenectady International Inc.
Catalysts
As mentioned, some contemplated compositions comprises at least one condensation catalyst and at least one acid catalyst. As used herein, the term “catalyst” means any substance that affects the rate of the chemical reaction by lowering the activation energy for the chemical reaction. In some cases, the catalyst will lower the activation energy of a chemical reaction without itself being consumed or undergoing a chemical change.
Condensation catalysts act as crosslinking agents in these embodiments. As used herein, the term “crosslinking” refers to a process in which at least two molecules, or two portions of a long molecule, are joined together by a chemical interaction. Such interactions may occur in many different ways including formation of a covalent bond, formation of hydrogen bonds, hydrophobic, hydrophilic, ionic or electrostatic interaction. Furthermore, molecular interaction may also be characterized by an at least temporary physical connection between a molecule and itself or between two or more molecules.
Condensation catalysts are generally activated at a particular temperature, such as an elevated temperature. Thus, at one temperature (such as room temperature) contemplated compositions maintain a low molecular weight, thus enabling good planarization ability over the wafer and/or substrate topography. When the temperature is elevated (such as to greater than 50° C.), the condensation catalyst catalyzes the Si—OH condensation reaction, which results in a more dense structure and, in some cases, improved photolithographic performance overall.
Contemplated condensation catalysts also comprise those catalysts that can aid in maintaining a stable silicate solution. The metal-ion-free catalyst is selected from the group consisting of onium compounds and nucleophiles. The catalyst may be, for example an ammonium compound, an amine, a phosphonium compound or a phosphine compound. Non-exclusive examples of such include tetraorganoammonium compounds and tetraorganophosphonium compounds including tetramethylammonium acetate (TMAA), tetramethylammonium hydroxide (TMAH), tetrabutylammonium acetate (TBAA), cetyltrimethylammonium acetate (CTAA), tetramethylammonium nitrate (TMAN), triphenylamine, trioctylamine, tridodecylamine, triethanolamine, tetramethylphosphonium acetate, tetramethylphosphonium hydroxide, triphenylphosphine, trimethylphosphine, trioctylphosphine, and combinations thereof.
In some embodiments, TMAN is used and can be obtained by either dissolving TMAN in water or by converting TMAA or TMAH to TMAN by using nitric acid. The composition may further comprise a non-metallic, nucleophilic additive which accelerates the crosslinking of the composition. These include dimethyl sulfone, dimethyl formamide, hexamethylphosphorous triamide (HMPT), amines and combinations thereof. Examples of several useful crosslinking agents are disclosed in commonly owned and pending PCT Application Serial No.: PCT/US02/15256 (Publication No. WO 03/088344), which is also herein incorporated herein in its entity. TMAN, in some embodiments, is used to increase crosslinking density for improved robustness to nitrogen/oxygen RIE plasma and as an amine source for photoresist adhesion.
In other contemplated embodiments, at least one acid catalysts may also be added. Contemplated acid catalysts include HNO3, HCl, lactic acid, acetic acid, oxalic acid, succinic acid, maleic acid and combinations thereof. The at least one acid catalyst is added to the composition in order to “tune” or adjust the pH of the final material so that it is compatible or more compatible with any chosen resist material, including those with absorption peaks around 365 nm, 248 nm, 193 nm and 157 nm, along with increasing the stability and shelf life of the composition. Contemplated acid catalysts may also be those also found in commonly assigned PCT Application Serial No.: PCT/US01/45306 filed on Nov. 15, 2001, which is incorporated by reference in its entirety. In some embodiments, nitric acid is incorporated into the composition in a reflux reaction, and in other embodiments, nitric acid is added a second time to adjust the pH after the addition of the condensation catalyst in order to improve shelf life of the composition.
Solvents
As mentioned, at least one solvent may be added to the composition. The solvent may be specifically chosen for a particular coating composition based on polarity and/or functional groups other than those characteristics needed by the solvent to blend with or solvate the components of the coating composition. Typical solvents are also those solvents that are able to solvate the non-inorganic materials and absorbing compounds contemplated herein, so that they may be used as coating compositions, materials and films. Contemplated solvents include any suitable pure or mixture of organic, organometallic or inorganic molecules that are volatilized at a desired temperature. The solvent may also comprise any suitable pure or mixture of polar and non-polar compounds. In some embodiments, the solvent comprises water, ethanol, propanol, acetone, toluene, ethers, cyclohexanone, butyrolactone, methylethylketone, methylisobutylketone, N-methylpyrrolidone, polyethyleneglycolmethylether, mesitylene, ethyl lactate, PGMEA, anisole, and families of poly-ether solvents such as carbitols (which constitute a family of ethyleneglycol ethers capped by hydroxy, alkoxy or carboxy groups) and analogous propyleneglycol ethers.
In some embodiments, water is added in addition to the at least one solvent in order to increase the crosslinking of the coating or film that is formed from the antireflective composition. So, in some embodiments, water may not be functioning solely as a solvent (or as a solvent at all), but may be functioning as a crosslinking agent. As will be shown in the examples, water is added in an amount that is up to about 10 weight percent of the total composition. In other embodiments, water is added up to about 8 weight percent of the total composition. In yet other embodiments, water is added up to about 5 weight percent of the total composition. And in even other embodiments, water is added up to about 3 weight percent of the total composition. In embodiments where water is added to the composition, crosslinking density increases and robustness is improved to nitrogen/oxygen RIE plasmas.
Solvents and solvent mixtures may be present in solution in an amount less than about 99.5% by weight. In some embodiments, the solvents or solvent mixtures may be present in solution in an amount from about 30% to about 99.5% by weight.
The solvents used herein may comprise any suitable impurity level, such as less than about 1 ppm, less than about 100 ppb, less than about 10 ppb, less than about 1 ppb, less than about 100 ppt, less than about 10 ppt and in some cases, less than about 1 ppt. These solvents may be purchased having impurity levels that are appropriate for use in these contemplated applications or may need to be further purified to remove additional impurities and to reach the less than about 10 ppb, less than about 1 ppb, less than about 100 ppt or lower levels that are becoming more desirable in the art of photolithography and etching.
One contemplated method of making a composition and/or coating material contemplated herein comprises at least one high ratio inorganic compound, at least one absorbing compound, at least one condensation catalyst, at least one acid catalyst, an acid/water mixture, such as a nitric acid/water mixture, and at least one solvent to form a reaction mixture; and heating to a temperature about or above 40° C. or refluxing the reaction mixture to form the antireflective composition. The absorbing composition formed is then diluted with at least one solvent to provide coating solutions that produce films of various thicknesses.
Ethanol, PGMEA, TEOS, vinyltriethoxysilane (VTEOS) and PTEOS are added individually into a glass reaction vessel, along with a water/0.1N nitric acid mixture and butanol. PTEOS, VTEOS and TEOS polymerize in solution and the polymer/solution mixture is pumped into a second vessel for dilution with PGMEA, TMAN and 5N nitric acid, each of which is added individually. While the neat polymer is a solid, this polymer is made, used and/or sold in a liquid solution and there is no exposure to the solid polymer. The amount of polymer in solution is typically 1.4-5.1% by weight. The final solution is pumped through a filtration unit (which is optional) and either used on-site as intermediate in the production of another polymer or stored/packaged for commercial sale.
The coating materials and solutions disclosed herein are generally considered to be applicably in tri-layer applications, tri-layer structures and/or tri-layer patterning processes. Tri-layer structures are also contemplated herein that comprise an organic underlayer (first layer), antireflective compositions and/or films contemplated herein (second layer) and a photoresist material (third layer) that are coupled to one another. Contemplated coatings, compositions and solutions may be applied to various substrates and/or surfaces to form sacrificial layers, layered materials, layers used in semiconductor processing, or layers used in electronic components, depending on the to specific fabrication process, typically by conventional spin-on deposition techniques, vapor deposition or chemical vapor deposition. These techniques include a dispense spin, a thickness spin, and thermal bake steps, to produce an inorganic coating. Typical processes include a thickness spin of between 1000 and 4000 rpm for about 20 seconds and one to three bake steps at temperatures between 80° C. and 300° C. for about one minute each. Contemplated inorganic coatings exhibit refractive indices between about 1.3 and about 2.0 and extinction coefficients greater than approximately 0.03.
Substrates contemplated herein may comprise any desirable substantially solid material. Particularly desirable substrate layers would comprise films, glass, ceramic, plastic, metal or coated metal, or composite material. In some embodiments, the substrate comprises a silicon or germanium arsenide die or wafer surface, a packaging surface such as found in a copper, silver, nickel or gold plated leadframe, a copper surface such as found in a circuit board or package interconnect trace, a via-wall or stiffener interface (“copper” includes considerations of bare copper and its oxides), a polymer-based packaging or board interface such as found in a polyimide-based flex package, lead or other metal alloy solder ball surface, glass and polymers such as polyimide. In other embodiments, the substrate comprises a material common in the packaging and circuit board industries such as silicon, copper, glass, and another polymer. In yet other embodiments, the substrate comprises a material commonly used for “front end of line” (FEOL), such as gate poly patterning, and “back end of line” (BEOL) packaging, such as via or metal interconnect patterning.
Contemplated coating materials, coating solutions and films can be utilized are useful in the fabrication of a variety of electronic devices, micro-electronic devices, particularly semiconductor integrated circuits and various layered materials for electronic and semiconductor components, including hardmask layers, dielectric layers, etch stop layers and buried etch stop layers. These coating materials, coating solutions and films are quite compatible with other materials that might be used for layered materials and devices, such as adamantane-based compounds, diamantane-based compounds, silicon-core compounds, novolac materials and dielectrics, organic dielectrics, and nanoporous dielectrics. Compounds that are considerably compatible with the coating materials, coating solutions and films contemplated herein are disclosed in PCT Application PCT/US01/32569 filed Oct. 17, 2001; PCT Application PCT/US01/50812 filed Dec. 31, 2001; U.S. application Ser. No. 09/538,276; U.S. application Ser. No. 09/544,504; U.S. application Ser. No. 09/587,851; U.S. Pat. Nos. 6,214,746; 6,171,687; 6,172,128; 6,156,812, U.S. Application Ser. No. 60/350,187 filed Jan. 15, 2002; and U.S. 60/347,195 filed Jan. 8, 2002 and U.S. Pat. No. 5,858,547, which are all incorporated herein by reference in their entirety.
The compounds, coatings, films, materials and the like described herein may be used to become a part of, form part of or form an electronic component and/or semiconductor component. As used herein, the term “electronic component” also means any device or part that can be used in a circuit to obtain some desired electrical action. Electronic components contemplated herein may be classified in many different ways, including classification into active components and passive components. Active components are electronic components capable of some dynamic function, such as amplification, oscillation, or signal control, which usually requires a power source for its operation. Examples are bipolar transistors, field-effect transistors, and integrated circuits. Passive components are electronic components that are static in operation, i.e., are ordinarily incapable of amplification or oscillation, and usually require no power for their characteristic operation. Examples are conventional resistors, capacitors, inductors, diodes, rectifiers and fuses.
Electronic components contemplated herein may also be classified as conductors, semiconductors, or insulators. Here, conductors are components that allow charge carriers (such as electrons) to move with ease among atoms as in an electric current. Examples of conductor components are circuit traces and vias comprising metals. Insulators are components where the function is substantially related to the ability of a material to be extremely resistant to conduction of current, such as a material employed to electrically separate other components, while semiconductors are components having a function that is substantially related to the ability of a material to conduct current with a natural resistivity between conductors and insulators. Examples of semiconductor components are transistors, diodes, some lasers, rectifiers, thyristors and photosensors.
Electronic components contemplated herein may also be classified as power sources or power consumers. Power source components are typically used to power other components, and include batteries, capacitors, coils, and fuel cells. Power consuming components include resistors, transistors, integrated circuits (ICs), sensors, and the like.
Still further, electronic components contemplated herein may also be classified as discreet or integrated. Discreet components are devices that offer one particular electrical property concentrated at one place in a circuit. Examples are resistors, capacitors, diodes, and transistors. Integrated components are combinations of components that that can provide multiple electrical properties at one place in a circuit. Examples are integrated circuits in which multiple components and connecting traces are combined to perform multiple or complex functions such as logic.
To the solvents of 480 g ethanol and 240 g PGMEA, the monomers of 266.62 g TEOS, 45.67 g VTEOS and 19.23 g PTEOS are individually added. While stirring a mixture of 9.04 g 0.1N nitric acid and 151.36 g water was poured, the reaction mixture was heated to reflux for 4 hours at 81° C. before cooling down for adding 70.72 g butanol and stirring at RT overnight. The polymer in solvents was diluted with 1884 g PGMEA, followed by adding 16.5 g of 1% TMAN (condensation catalyst) and 1.77 g 5N nitric acid. The target final formulation thickness determined at a 1500 rpm spin rate is adjusted through the amount of PGMEA added during the dilution step. The solution was filtered to obtain final product. The final solution is pumped through a filtration unit (which is optional) and either used on-site as intermediate in the production of another polymer or stored/packaged for commercial sale.
The polymer with the molecule weight of Mn˜1300 amu and Mw˜2000 amu, which were analyzed by Waters Alliance GPC System equipped with 2690 Separations Module, 2410 RI detector, column oven, and a set of three PL gel (from Polymer Laboratories) individual pore size columns (100 nm, 50 nm and 10 nm) containing highly cross-linked spherical polystyrene/divinyl-benzene matrix, THF as mobile phase at the flow rate of 1.0 ml/minute.
The solution consists of 3.66% solid and 4.29% water, 27.19% ethanol, 2.03% butanol and 66.19% PGMEA analyzed by HP 6890 GC System with a column (320 μm ID×60 m×1 μm film thickness) filled with Restek RTX-200) and utilized thermo-conductivity detector (TCD) at the temperature program 40° C. as initial, ramp up 20° C./minute to 300° C. The product was spun, the film was baked for thickness of 80 nm (n@193 nm=1.70, k@193 nm=0.15, checked by 1200 n&k analyzer; wet etch rate 17 A/minute with 500:1 of DHF; dry etch rate 3390 A/minute with oxide recipe of fluorocarbon etch process (The fluorocarbon etch recipe is: pressure=45 mT, power=1500 W, etchant gas flows=C4F8/CO/Ar/O2=10/50/200/5 (sccm)) and 150 A/minute with N2+O2 etch recipe (N2+O2 recipe: pressure=20 mT, power=1000 W, O2/N2: 30 sccm/120 sccm, time=30 sec) at the plasma etch tool TEL Unity 2). Both fluorocarbon etch and N2+O2 etch are done using the TEL Unity 2 etch tool.
Table 3 shows product information related to those components in the examples and in Table 2, as mentioned earlier.
Simulated reflectance data (% R) at 193 nm for a multi-layer patterning system (dual BARC) is found in
It should be noted for the purposes of this disclosure that the n and k measurement technique used is not exact. For the purpose of this disclosure, the results are adequate as the appropriate trends are observed. A detailed thickness study may be required utilizing what is termed a dual-reflectance fitting algorithm across two different thickness values, which is a more lengthy process. All of the results reported within this disclosure are from what is termed a singe reflectance algorithm which by nature of the technique is less precise. Variations up to 0.04 in both the n and k values should be expected with a single reflectance algorithm.
After production the product from Example 1 was checked with standard procedure of solution QC (by GPC for molecule weight, GC for liquid components and Liquid Partical Counter for the particits) and film QC (by Thermowave for thickness and by DHF for wet etch rate). The product QC data were considered at aging day-0. The material was then aged at either room temperature or 5° C. in unopened new bottles. The aged material was then checked with same QC procedure at day-15, day-30, etc. to see the changing of QC items in aging days.
To the solvents of 30 g ethanol and 15 g PGMEA, 17.18 g TEOS, 2.85 g VTEOS and 0.61 g PTEOS monomers were individually added. While stirring a mixture of 0.57 g 0.1N nitric acid and 6.76 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 4.42 g butanol was added and the mixture was stirred at room temperature overnight. The resulting polymer was analyzed by the same GPC method as that in sample 1 and had a molecular weight of Mn=996 amu, Mw=1359 amu.
5.21 g of the above solution was diluted with 16.15 g of PGMEA, the material was spun, the film was baked. The film thickness was measured to be 78 nm with n@193 nm=1.6632, k@193 nm-0.0824 (checked with the same n&k tool as in Example 1).
To the solvents of 480 g ethanol and 240 g PGMEA, 89.99 g TEOS, 197.92 g VTEOS and 30.77 g PTEOS monomers were individually added. While stirring a mixture of 9.04 g 0.1N nitric acid and 151.36 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 70.72 g butanol was added and the mixture was stirred at room temperature overnight. (the polymer with Mn=745 amu, Mw-929 amu analyzed by the same GPC system as mentioned in previous examples). 743.6 g of the solution above was diluted with 1115.4 g PGMEA, followed by adding a condensation catalyst of 9.33 g 1% TMAN and 1.03 g 5N nitric acid. The diluted solution was filtered to collect the final product. After spin and bake the film was measured to have a thickness of 70 nm and a wet etch rate was 1 A/minute in DHF 500:1. The plasma etch rate was 1394 A/minute with an oxide recipe and 300 A/minute with a N2+O2 etch recipe at the same tool as used above in other examples.
In a 1-liter flask 297 grams 2-propanol, 148 grams acetone, 123 grams TEOS, 77 grams MTEOS, 60 grams 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams 0.1 M nitric acid and 72 grams deionized water were combined. The flask was refluxed for 4 hours. To the solution, 115 grams of butanol, 488 grams 2-propanol, 245 grams of acetone, 329 grams of ethanol and 53 grams deionized water were added. The solution was filtered. The solution was dispensed, followed by a 3000 rpm thickness spin for 20 seconds, and baked at 80° C. and at 180° C. for one minute each. The final polymer has a molecular weight of Mw=1200 amu. Optical properties were measured using the same as in Example 1. The film thickness was 1635 Å. At 248 nm, the refractive index (n) was 1.373 and the extinction coefficient (k) was 0.268. In addition, TESAC also has an absorption of 365 nm and at the loading stated in this example, the n&k values at 365 nm are 1.55 and 0.06 respectively. The extinction coefficient at 248 nm and 365 nm can be lowered/increased by reducing/increasing the amount of TESAC (9-anthracene carboxy-methyl triethoxysilane) added.
To the solvents of 30 g ethanol and 15 g PGMEA, 17.23 g TEOS, 2.85 g VTEOS and 0.76 g pentafluorophenyltriethoxysilane (5F-PTEOS) monomers were individually added. While stirring a mixture of 0.57 g 0.1N nitric acid and 6.76 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 4.42 g butanol was added and the mixture was stirred at room temperature overnight. The resulting polymer has a molecular weight of Mn=984 amu, Mw=1372 amu analyzed by the same GPC system as mentioned in earlier examples. The polymer in the solvent mixture was diluted with 218 g of PGMEA, the solution was spun, the film was baked and had a measured thickness of 53 nm (n@193 nm=1.61; k@193 nm=0.03 by the same n&k tool above).
To the solvents of 30 g ethanol and 15 g PGMEA the monomers of 16.66 g TEOS, 3.81 g VTEOS only were individually added. While stirring a mixture of 0.57 g 0.1N nitric acid and 6.76 g water was added, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down for adding 4.42 g butanol and stirring at room temperature overnight. (the polymer was analyzed and shown to have molecular weights of Mn 1021 amu and Mw 1349 amu by the same GPC system above).
8.18 g of the solution above was diluted with 13.9 g of PGMEA. The diluted solution was spun, the film was baked for the thickness of 70 nm (n@193 nm=1.62; k@193 nm=0.03 by the same n&k tool above)
In this example, TEOS is used, along with incorporating a high water content was used to increase the crosslink density. Two contemplated compositions (low water and increased water) were produced, and the difference between the two compositions was the amount of water utilized, as shown in Table 9 (low water composition) and Table 10 (increased water composition) below:
The low water composition is prepared as follows:
To the solvent of 445.56 g IPA, the monomer of 243.425 g TEOS (or other monomers at certain ratio) is added. While stirring a mixture of 5.599 g 0.1N nitric acid and 66.86 g water, the reaction mixture was heated to 50° C. for 4 hours before cooling down and stirring at RT overnight. The polymer in solvents was diluted with 2284.332 g ethanol: 2-heptanone (70:30 mix). This produced a low pH product (pH˜2.5). For a higher pH (pH˜4) product, it was manufactured by adding 0.1056 g of aminopropyl TEOS (APTEOS) (base). The solution was filtered to obtain final product. The final solution is pumped through a filtration unit (which is optional) and either used on-site as an intermediate in the production of another polymer or stored/packaged for commercial sale. (Analysis: solid contain 3.02%; 1.35% water, 60.38% ethanol, 14.08% IPA and 21.18% 2-Heptanone by GC) For this composition, the n was measured at 1.50 and k was measured at 0. For a film baked at 250° C., the wet etch rate or WER for a 500:1 BOE, as shown in Angstroms/minute, was measured as 3760. The PTEOS oxide wet etch rate was 30 Angstroms/minute. Molecular weights of Mn 1303 amu and Mw 1809 amu were determined by the same GPC system as mentioned earlier.
The high water composition is prepared as follows:
To the solvent of 445.56 g IPA, the monomer of 243.425 g TEOS (or other monomers at certain ratio) is added. While stirring a mixture of 5.599 g 0.1N nitric acid and 120.348 g water, the reaction mixture was heated to 50° C. for 4 hours before cooling down and stirring at RT overnight. The polymer in solvents was diluted with 1214.248 g ethanol: 2-heptanone (70:30 mix). This produced a low pH product (pH˜2.5). For a higher pH (pH˜4) product, it was manufactured by adding 0.0912 g of APTEOS (base). The solution was filtered to obtain final product. The final solution is pumped through a filtration unit (which is optional) and either used on-site as an intermediate in the production of another polymer or stored/packaged for commercial sale. (Analysis: solid contain 4.07%; 4.39% water, 54.91% ethanol, 22.39% IPA and 14.24% 2-heptanone by GC) For this composition, the n was measured at 1.54 and k was measured at 0. For a film baked at 250° C., the wet etch rate or WER for a 500:1 BOE, as shown in Angstroms/minute, was measured as 300. The PTEOS oxide wet etch rate was 30 Angstroms/minute. Molecular weights of Mn 2050 amu and Mw 3362 amu were determined by the same GPC system as mentioned earlier.
In this example, the components come from the following sources:
In both cases to increase the pH to ˜4 to further increase cross-linking density, APTEOS was added. In the “less” or “low” water composition, 438 ppm of APTEOS was added. In the “high” or “more” water composition, 375 ppm APTEOS was added. Versions without any added APTEOS are referred to as “pH 2.5” in Table 11. Note that for a silicate only system the film is transparent (i.e. k=0). As shown in Table 11, the compositions with more or increased water content provided greatly reduced plasma etch rates. PTEOS oxide plasma etch rates were 2.91 Angstroms/second. The etch recipe utilized for this etch data was 20 mTorr, 1000 W, N2/O2=120/30 sccm.
To the solvents of 600 g ethanol and 300 g PGMEA, 395.77 g TEOS, and 24.04 g PTEOS monomers were individually added. While stirring a mixture of 11.3 g 0.1N nitric acid and 189.2 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 88.4 g butanol was added and the mixture was stirred at room temperature overnight. The resulting polymer had a molecular weight of Mn=1828 amu, Mw=3764 amu, which was analyzed by the same GPC system above.
1635 g of the polymer solution was diluted with 6865 g PGMEA, followed by adding 21.34 g 1% TMAN (condensation catalyst) and 2.0 g 5N nitric acid. The diluted solution was filtered to collect the final product. After spin and bake the film had a thickness of 31 nm and wet etch rate was 63 A/minute in DHF 500:1.
To the solvents of 480 g ethanol and 240 g PGMEA, 266.62 g TEOS, 45.67 g VTEOS and 19.23 g PTEOS monomers (or other monomers at specific ratios) were individually added. While stirring a mixture of 9.04 g 0.1N nitric acid and 151.36 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 70.72 g butanol was added to the reaction mixture and stirred at room temperature overnight. The resulting polymer was measured to have a molecular weight of Mn=1153 amu, Mw=1802 amu, which was analyzed by the same GPC system above.
To the solvents of 30 g ethanol and 15 g PGMEA, 17.23 g TEOS, 2.85 g VTEOS and 0.59 g Ben-TEOS monomers were individually added. While stirring a mixture of 0.57 g 0.1N nitric acid and 6.76 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 4.42 g butanol was added and the mixture was stirred at room temperature overnight. The resulting polymer had a molecular weight of Mn=956 amu, Mw=1386 amu, which was analyzed by the same GPC system above). The polymer in the solvent mixture was diluted with 123 g of PGMEA, the solution was spun, the film was baked and measured to have a thickness of 81 nm (n=@193 nm 1.63; k@193 nm=0.08 by the same n&k tool above).
To the solvents of 30 g ethanol and 15 g PGMEA, 16.46 g TEOS, 2.85 g VTEOS, 0.72 g PTEOS monomers were individually added along with 0.79 g NCS-TEOS. While stirring a mixture of 0.57 g 0.1N nitric acid and 6.76 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 4.42 g butanol was added and the mixture was stirred at room temperature overnight. The resulting polymer had a molecular weight of Mn=900 amu, Mw=1300 amu, which was analyzed by the same GPC system above. The polymer in the solvent mixture was diluted with 123 g of PGMEA the solution was spun, the film was baked and shown to have a thickness of 85 nm (n@ 193 nm=1.65; k@ 193 nm=0.09 by the same n&k tool above).
To the solvents of 30 g ethanol and 15 g PGMEA, 16.25 g TEOS, 2.85 g VTEOS, 0.962 g PTEOS and 0.99 g DEPE-TEOS monomers were individually added. While stirring a mixture of 0.57 g 0.1N nitric acid and 6.76 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 4.42 g butanol was added and the mixture was stirred at room temperature overnight. The resulting polymer had a molecular weight of Mn 925 amu, Mw=135 amu analyzed by the same GPC system above. The polymer in the solvent mixture was diluted with 122 g of PGMEA, the solution was spun, the film was baked and shown to have a thickness of 85 nm (n@193 nm=1.60; k@193 nm=0.10 by the same n&k tool above).
To the solvents of 60 g ethanol and 30 g PGMEA, 33.33 g TEOS, 5.71 g VTEOS and 2.40 g PTEOS monomers were individually added. While stirring a mixture of 1.13 g 0.1N nitric acid and 18.92 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 8.84 g butanol was added to the reaction mixture and stirred at room temperature overnight. The resulting polymer was measured to have a molecular weight of Mn=1121 amu, Mw=1723 amu analyzed using the same GPC system as mentioned above.
Option 1:
Option 2:
To the solvents of 60 g ethanol and 30 g PGMEA, 33.33 g TEOS, 5.71 g VTEOS and 2.40 g PTEOS monomers were individually added. While stirring a mixture of 1.13 g 0.1N nitric acid and 18.92 g water was poured, the reaction mixture was heated to reflux at 81° C. for 4 hours before cooling down. 8.84 g butanol was added to the reaction mixture and stirred at room temperature overnight. The resulting polymer was measured to have a molecular weight of Mn=1121 amu, Mw=1723 amu analyzed using the same GPC system as mentioned above. The APTEOS-triflate stock solution was freshly prepared from 4.89 g 20% triflic acid in water (Aldrich) and 1.425 g of APTEOS (APTEOS 22.6% by weight in the stock solution).
Option 1:
Option 2:
The substrate film or films to be patterned is first coated with a film of organic under layer (OUL) material. Deposition of OUL occurs using a typical film deposition process most typically being a spin coat process. The coated OUL film is then baked to a temperature ranging from 200-300° C. The OUL thickness is chosen to completely fill and planarize any topography that may exist. Typically the OUL thickness is on the order of 200 to 300 nm. Note that tri-layer patterning can be used in applications where substrate topography may or may not be present. Some basic OUL material properties are:
Although novolac resins have been considered and used as an OUL material typically they have been shown to lack mechanical robustness and also have too low of a C/O ratio to be used for state-of-the art ArF patterning. An example of a commercially available OUL is HM8005 from JSR Inc. HM8005 is a naphthalene-based polymer system with a n & k @ 193 nm of 1.5 and 0.29 respectively. Its reported plasma etch rate relative to a novolac resin is 0.85.
Following deposition of the OUL film the next step in tri-layer patterning is to deposit the SiO2 based UV absorbing middle layer film (UVAS) film. The material properties for contemplated embodiments of UVAS have already been described in this specification. The thickness of UVAS is selected based on the substrate reflectance and required plasma etch margin to the substrate films. Three UVAS formulations exist of differing final film thickness. All thickness values are measured at 1500 rpm spin coat for 30 s followed by a bake to 250° C. for 90 s.
UVAS is deposited directly onto the OUL film using a typical film deposition process most typically being a spin coat process. The thickness of UVAS is adjusted through changes in the spin speed. The UVAS film is then baked to a temperature between 200-250° C.
The final film deposition step for tri-layer patterning is deposition of the 193 nm absorbing photoresist (ArF PR). Typical ArF PR polymers are acrylate, methacrylate or generally organo-acrylate based polymer and co-polymer systems containing respective photoacid generators (PAGs) and quencher chemistries. Typically these ArF PRs are positive tone but can be negative tone as well. An extremely brief list of commercially available ArF PRs are: JSR AR2459J, JSR AR1863J, ShinEtsu SAIL-X123, and TOK P-6111. Each of the PR manufacturers offers a large selection of ArF PRs differing in exposure speed, end use application, etch resistance, and contrast. The PRs mentioned above only captures a sliver of what is available for use in the IC industry.
The ArF PR is deposited directly onto UVAS using a typical film deposition process most typically being a spin coat process. The thickness of the ArF PR is adjusted through changes in the spin speed. The ArF PR film is then baked to a temperature of approximately 90-130° C. Final ArF PR film thickness ranges from 250 nm to 100 nm depending on the application and dimensions to be patterned.
The film stack for tri-layer patterning is now complete. In the following steps, the ArF PR is illuminated by 193 nm light through a mask to expose the photoresist. The ArF PR is then baked and developed leaving behind patterned ArF PR features. The patterned dimensions of the ArF PR are then transferred using a plasma etch process first into the underlying UVAS film and then into the bottom OUL film using the respective plasma etch chemistries mentioned in the patent. The recipes presented are examples only as many variations exist in both the chemistries as well as the etch tool model and configuration.
During the etching of the OUL film the ArF PR is etched away thus making the UVAS film the plasma etch mask, receives direct exposure the plasma ion flux, during the OUL etch. Once the OUL etch is complete the pattern is now transferred into the substrate film(s). The plasma etch chemistry used to etch the substrate film or film stack depends on the type of substrate being etched. For example, etching SiO2, Al, Si layers would all use a different type plasma etch chemistry. During the substrate etch the UVAS layer is removed thus now making the OUL the etch mask, the OUL receives direct exposure of the plasma ion flux. Once the pattern is transferred into the substrate film or film stack the OUL layer is removed using either a wet (selective wet etch chemistry) or dry (plasma, super critical CO2) strip process. The patterned feature into the original ArF PR layer has now been successfully transferred into the substrate film or film stack and the patterned substrate film or film stack is now ready for the next manufacturing step.
Thus, specific embodiments and applications of compositions and methods to produce compositions, coatings and films for tri-layer applications, methods of productions and uses thereof have been disclosed. It should be apparent, however, to those skilled in the art that many more modifications besides those already described are possible without departing from the inventive concepts herein. The inventive subject matter, therefore, is not to be restricted except in the spirit of the appended claims. Moreover, in interpreting both the specification and the claims, all terms should be interpreted in the broadest possible manner consistent with the context. In particular, the terms “comprises” and “comprising” should be interpreted as referring to elements, components, or steps in a non-exclusive manner, indicating that the referenced elements, components, or steps may be present, or utilized, or combined with other elements, components, or steps that are not expressly referenced.
This application is a United States Utility application that claims priority to U.S. Provisional Application 60/903,466 filed on Feb. 26, 2007 and U.S. Provisional Application 60/949,392 filed on Jul. 12, 2007, which are both commonly-owned and incorporated herein in their entirety by reference.
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| Number | Date | Country | |
|---|---|---|---|
| 20080206690 A1 | Aug 2008 | US |
| Number | Date | Country | |
|---|---|---|---|
| 60903466 | Feb 2007 | US | |
| 60949392 | Jul 2007 | US |
