Number | Name | Date | Kind |
---|---|---|---|
3940506 | Heinecke | Feb 1976 | |
4324611 | Vogel et al. | Apr 1982 | |
4344816 | Craighead et al. | Aug 1982 |
Entry |
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J. Electrochem. Soc.: Solid-State Science and Technology, vol. 128, No. 2, Feb. 1981, Planarization of Phosphorus-Doped Silicon Dioxide by A. C. Adams and C. D. Capio, pp. 423-429. |