Claims
- 1. A method of forming a silica-containing ceramic coating on a substrate comprising:
- applying a coating comprising hydrogen silsesquioxane resin on a substrate; and
- exposing the coated substrate to an electron beam for a time and at a dose effective to convert the hydrogen silsesquioxane resin coating to a silica-containing ceramic coating.
- 2. The method of claim 1 wherein the substrate is an electronic device.
- 3. The method of claim 1 wherein the electron beam dose is in the range of 100 microcoulomb to 100 coulomb/cm.sup.2.
- 4. The method of claim 1 wherein the electron beam dose is in the range of 1 to 10 coulombs/cm.sup.2.
- 5. The method of claim 1 wherein the time for electron beam exposure is in the range of 10 seconds to 1 hour.
- 6. The method of claim 1 wherein the hydrogen silsesquioxane resin coating also contains ceramic oxide precursors comprising a compound containing an element selected from the group consisting of titanium, zirconium, aluminum, tantalum, vanadium, niobium, boron and phosphorous wherein the compound contains at least one hydrolyzable substituent selected from the group consisting of alkoxy or acyloxy and the compound is present in an amount such that the silica-containing ceramic coating contains 0.1 to 30 percent by weight ceramic oxide precursor.
- 7. The method of claim 1 wherein the hydrogen silsesquioxane resin coating also contains a platinum or rhodium catalyst in an amount of between about 5 and about 1000 ppm platinum or rhodium based on the weight of hydrogen silsesquioxane resin.
- 8. The method of claim 1 wherein the coated substrate is selectively exposed to the electron beam to form a patterned coating.
- 9. The method of claim 1 wherein the coated substrate exposed to the electron beam is annealed for up to 72 hours at 50.degree.-500.degree. C. in an atmosphere selected from the group consisting of inert gas, oxidizing gas and reducing gas.
- 10. The method of claim 1 wherein the coating is heated before or during the electron beam exposure to cause it to melt and flow.
Government Interests
This invention was made with Government support under MDA904-93-C-B100 awarded by the National Security Agency. The Government has certain rights in this invention.
US Referenced Citations (9)