Claims
- 1. An isolation trench in a semiconductor body comprising:
- a trench formed in the semiconductor body;
- a layer of insulating material on the interior walls of said trench, said layer of insulating material being sufficiently thin to prevent stressing of the corners of said trench;
- a masking layer formed adjacent said layer of insulating material;
- a dialectric layer of insulating material formed adjacent said masking layer;
- a second masking layer adjacent said dielectric layer; and
- an isolation body filling the remaining area of said trench; and
- a layer of field oxide formed over the semiconductor body and the filled trench.
- 2. The isolation trench of claim 1 wherein said isolation body comprises silicon oxide.
- 3. The isolation trench of claim 1 wherein said isolation body comprises polysilicon.
- 4. The isolation trench of claim 1 wherein said layer of insulating material comprises silicon oxide.
- 5. The isolation trench of claim 1 wherein said masking layer comprises nitride.
- 6. The isolation trench of claim 1 wherein said layer of insulating material has a thickness in the range of 200 .ANG. to 450 .ANG..
- 7. The isolation trench of claim 1 wherein said masking layer has a thickness of from 300 .ANG. to 600 .ANG..
- 8. The isolation trench of claim 1 wherein said field oxide is formed at a temperature above 1000.degree. C.
Parent Case Info
This application is a Continuation of Ser. No. 07/265,306, filed Oct. 25, 1988 now abandoned, which is a continuation of Ser. No. 110,638, filed 10-14-87, now abandoned, which is a continuation of Ser. No. 929,253, filed 11-10-86, now abandoned, which is a continuation of Ser. No. 701,465, filed 2-14-85, now U.S. Pat. No. 4,631,800.
US Referenced Citations (6)
Foreign Referenced Citations (2)
Number |
Date |
Country |
0153349 |
Sep 1983 |
JPX |
200575 |
Nov 1983 |
JPX |
Non-Patent Literature Citations (1)
Entry |
"Trench Filling Process", IBM TDB, vol. 28, No. 6, Nov. 85, pp. 2583-2584. |
Continuations (4)
|
Number |
Date |
Country |
Parent |
265306 |
Oct 1988 |
|
Parent |
110638 |
Oct 1987 |
|
Parent |
929253 |
Nov 1986 |
|
Parent |
701465 |
Feb 1985 |
|