Number | Name | Date | Kind |
---|---|---|---|
4421628 | Quaderer | Dec 1983 | |
4448652 | Pachonik | May 1984 | |
4485000 | Kawaguchi et al. | Nov 1984 | |
4966676 | Fukasawa et al. | Oct 1990 | |
5066381 | Ohta et al. | Nov 1991 |
Number | Date | Country |
---|---|---|
2173217 | Oct 1986 | GBX |
Entry |
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Vossen et al., "Thin Film Processes", Academic Press, New York, 1978, p. 41. |