Claims
- 1. A device for holding a template, said device comprising:
a body having an opening to receive said template; and a supporting plate coupled to said body, with said supporting plate being substantially transparent to a curing agent.
- 2. The device as recited in claim 1 wherein said curing agent comprises ultraviolet radiation.
- 3. The device as recited in claim 1 wherein said supporting plate is formed from material selected from a set of materials consisting of quartz, sapphire, and silicon dioxide.
- 4. The device as recited in claim 1 further including a vacuum system in fluid communication with said supporting plate to apply a vacuum to said template.
- 5. The device as recited in claim 1 further including a vacuum system in fluid communication with said supporting plate to apply a vacuum between said supporting plate and said body.
- 6. The device as recited in claim 1 wherein said supporting plate is configured to reduce deformation of said template due to forces present during an imprint lithography process.
- 7. The device as recited in claim 1 further including a reflective element connected to a portion of said body located within said opening.
- 8. A device for holding a template, said device comprising:
a body having an opening to receive said template; and a supporting plate coupled to said body, with said supporting plate substantially transparent to ultraviolet radiation.
- 9. The device as recited in claim 8 wherein said supporting plate is formed from material selected from a set of materials consisting of quartz, sapphire, and silicon dioxide.
- 10. The device as recited in claim 181 further including a vacuum system in fluid communication with said supporting plate to apply a vacuum to said template.
- 11. The device as recited in claim 8 further including a vacuum system in fluid communication with said supporting plate to apply a vacuum between said supporting plate and said body.
- 12. The device as recited in claim 8 wherein said supporting plate is configured to reduce deformation of said template due to forces present during an imprint lithography process.
- 13. The device as recited in claim 8 further including a reflective element connected to a portion of said body located within said opening.
- 14. A device for holding a template, said device comprising:
a body having an opening to receive said template; a supporting plate coupled to said body, with said supporting plate substantially transparent to a curing agent; and a vacuum system in fluid communication with said supporting plate to apply a vacuum between said supporting plate and said body.
- 15. The device as recited in claim 14 wherein said curing agent comprises ultraviolet radiation.
- 16. The device as recited in claim 14 wherein said supporting plate is formed from material selected from a set of materials consisting of quartz, sapphire, and silicon dioxide.
- 17. The device as recited in claim 14 wherein said supporting plate is configured to reduce deformation of said template due to forces present during an imprint lithography process.
- 18. The device as recited in claim 14 further including a reflective element connected to a portion of said body located within said opening.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is a divisional of U.S. patent application Ser. No. 09/976,681 filed on Oct. 12, 2001 entitled “Template Design for Room Temperature, Low Pressure Micro- and Nanoimprint Lithography,” which claims priority to U.S. Provisional Patent Application No. 60/239,808 filed on Oct. 12, 2000 entitled “Template Design for Room Temperature, Low Pressure Micro- and Nanoimprint Lithography and Method for Sensing Gap or Film Thickness,” both of which are incorporated by reference herein.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
[0002] The U.S. Government has a paid-up license in this invention and the right in limited circumstances to require the patent owner to license others on reasonable terms as provided for by the terms of N66001-98-18914 awarded by the Defense Advanced Research Projects Agency (DARPA).
Provisional Applications (2)
|
Number |
Date |
Country |
|
60239808 |
Oct 2000 |
US |
|
60218568 |
Jul 2000 |
US |
Divisions (2)
|
Number |
Date |
Country |
Parent |
09976681 |
Oct 2001 |
US |
Child |
10747737 |
Dec 2003 |
US |
Parent |
09907512 |
Jul 2001 |
US |
Child |
10747737 |
Dec 2003 |
US |