Claims
- 1. A device for depositing a coating on the inside of a substrate tube comprising:
a) an oven for heating the substrate tube, the oven comprising two end walls each having inner and outer surfaces and an opening between the inner and outer surfaces through which the substrate tube can be mounted; and b) an applicator located within the oven and positioned to surround a longitudinal axis of the substrate tube for generating a plasma zone from a mixture of gases in the tube by application of energy, the applicator comprising a body and at least one extension positioned about the longitudinal axis of the substrate tube and extending from the body,
wherein both the body and the at least one extension are used to direct energy into the tube and the at least one extension has an outer profile capable of moving at least partially into the opening in the end wall of the oven.
- 2. The device in claim 1, wherein the oven is used at temperatures greater than about 1000° C.
- 3. The device in claim 2, wherein the start of the opening at the inner surface of the end wall when the substrate tube is mounted has a minimum clearance of less than about 8.75 cm.
- 4. The device in claim 3, wherein the outer profile of the at least one extension is cylindrical or conical in shape.
- 5. The device in claim 4, wherein the applicator is a microwave applicator, and the body and the at least one extension are capable of directing microwave energy.
- 6. The device in claim 5, wherein the at least one extension is further formed of a material which is capable of withstanding the oven temperatures without being insulated and/or water cooled.
- 7. The device in claim 5, wherein the device is capable of depositing a usable film in the tube across the length of the usable coating deposition zone known as Ldeposition zone, Ldeposition zone>Loven−2(Lapplicator) and Loven is the inside length as measured along the longitudinal axis of the substrate tube between the inside surfaces of the two end walls of the oven, and Lapplicator is the longest dimension of the applicator as measured parallel to the longitudinal axis of the substrate tube.
- 8. The device in claim 7, further comprising a gas supply device for supplying a mixture of gases.
- 9. A method of coating the inside of substrate tube comprising the steps of:
a) heating a substrate tube within an oven for heating the substrate tube, the oven comprising two end walls having inner and outer surfaces and an opening between the inner and outer surfaces of each of the end walls through which the substrate tube is mounted; b) passing a gas mixture through the substrate tube; c) applying energy from an applicator, located within the oven, to form a plasma and react the gas mixture within the substrate tube,
wherein the applicator comprises:
1) a body and 2) at least one extension which is substantially symmetric about the substrate tube extending from the body,
wherein both the body and the at least one extension are capable of directing energy into the substrate tube; and d) moving the applicator along the longitudinal axis of the substrate tube wherein the at least one extension of the applicator has an outer profile which allows it to move at least partially into the opening in the end wall of the oven wherein the inside of the substrate tube is coated.
- 10. The method in claim 9, wherein the substrate tube is heated to above about 1000° C.
- 11. The method in claim 10, wherein the start of the opening at the inner surface of the end wall when the substrate tube is mounted has a minimum clearance of less than about 8.75 cm.
- 12. The method in claim 11, wherein the applicator extensions are cylindrical or conical in shape.
- 13. The method in claim 12, wherein the body and extensions are used to direct microwave energy.
- 14. The device in claim 13, wherein at least one of the extensions are further capable of withstanding the oven temperatures without being insulated and/or water cooled.
- 15. The method in claim 9, further comprising collapsing the substrate tube to form a optical fiber preform.
- 16. The method in claim 13, further comprising depositing a substantially uniform coating on a inside surface of the substrate tube across the length of the uniform coating deposition zone Ldeposition zone by moving the applicator along the longitudinal axis of the substrate tube wherein Ldeposition zone>Loven−2(Lapplicator); the oven has two end walls with an inside surface on each end wall and Loven is the inside length of the oven as measured along the longitudinal axis of the substrate tube between the inside surfaces of the two end walls of the oven; and Lapplicator is the longest dimension of the applicator as measured parallel to the longitudinal axis of the substrate tube.
- 17. The method in claim 16, wherein the gases in the substrate tube are at a low pressure from about 0.1 to about 75 Torr.
- 18. A microwave applicator capable of use in an oven at temperatures greater than 1000° C. comprising:
a) a body and b) at least one extension which are substantially symmetric about a longitudinal axis through the body and the two extensions,.extending from the body,
wherein both the body and the extensions are used to direct microwaves into the tube and the at least one extension is capable of withstanding the oven temperatures without being insulated and/or water cooled and without substantially distorting or bending.
- 19. A device for depositing a coating on the inside of a substrate tube comprising:
a) an oven having two end walls having inner and outer surfaces and having a distance between the inner surfaces of the two end walls known as Loven; and b) a microwave applicator comprising a body and at least one extension extending from the body, located in the furnace and circumferentially about the substrate tube mounted through and between the two end walls for generating a plasma in the tube from a mixture of gases by, application of microwaves, the microwave applicator having a maximum length along or parallel to the longitudinal axis of the substrate tube known as Lapplicator, wherein the device is capable of depositing a usable film in the tube across an usable coating deposition zone wherein the length of the zone is Ldeposition zone, and Ldeposition zone>Loven−2(Lapplicator).
- 20. The device in claim 19, wherein Ldeposition zone>Lfurnace−2(Lapplicator)+xL1, L1 is the length of one of the extensions, and x is about 1.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefit of priority under 35 U.S.C. § 19(e) of U.S. Provisional Application Serial No. 60/342,828 filed on Dec. 19, 2001.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60342828 |
Dec 2001 |
US |