Number | Date | Country | Kind |
---|---|---|---|
3-335981 | Nov 1991 | JPX | |
3-335985 | Nov 1991 | JPX | |
3-335986 | Nov 1991 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4071759 | Namae | Jan 1978 | |
4714833 | Rose et al. | Dec 1987 | |
4728790 | Plies | Mar 1988 | |
4922097 | Todokoro et al. | May 1990 | |
4926054 | Frosien | May 1990 | |
4928010 | Saito et al. | May 1990 | |
4982091 | Garth et al. | Jan 1991 | |
4999496 | Shaw et al. | Mar 1991 | |
5006795 | Yoshizawa et al. | Apr 1991 | |
5032725 | Kanda | Jul 1991 |
Number | Date | Country |
---|---|---|
290620 | Nov 1988 | EPX |
3621045 | Jan 1987 | DEX |
4020806 | Jan 1991 | DEX |
46-24459 | Mar 1971 | JPX |
51-36150 | Jun 1976 | JPX |
52-20819 | Nov 1977 | JPX |
59-190610 | Oct 1984 | JPX |
Entry |
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Review of Scientific Instruments, vol. 60, No. 11, 1189, New York US, pp. 3434-3441, Z. Shao, "High-resolution low-voltage electron optical system for very large specimen". |
Journal of Vacuum Science and Technology: Part B, vol. 8, No. 5, 990, New York US, pp. 1152-1157, K. Saito et al., "A scanning electron microscope for trench observation". |