Number | Date | Country | Kind |
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9710380 | May 1997 | GBX |
Number | Name | Date | Kind |
---|---|---|---|
4992665 | Mohl | Feb 1991 | |
5089710 | Kikuchi et al. | Feb 1992 | |
5107170 | Ishikawa et al. | Apr 1992 | |
5343047 | Ono et al. | Aug 1994 | |
5399871 | Ito et al. | Mar 1995 | |
5446929 | Sakai et al. | Sep 1995 | |
5466929 | Sakai et al. | Nov 1995 | |
5468955 | Chen et al. | Nov 1995 | |
5545257 | Vella | Aug 1996 | |
5576538 | Sakai et al. | Nov 1996 |
Number | Date | Country |
---|---|---|
0665306A1 | Aug 1995 | EPX |
703597A1 | Sep 1995 | EPX |
2194857A | Jul 1987 | GBX |
2235086A | Feb 1991 | GBX |
Entry |
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5-47338(A) Ion Beam Neutralizing Device, filed Aug. 16, 1991 -Japan--Abstract only. |
4-351838(A) Neutralization Unit Of Beam Device, filed May 28, 1991--Abstract only. |
Filamentless Neutralization Of Broad Ion Beams, D. Korzec et al., Microstructure Research Center, University of Wuppertal, Germany, Jun. 15, 1991. |
Technology and Application Of Filamentless RF--Ion Sources In Ion Beam Sputter Deposition, J. Engemann, Microstructure Research Center, University of Wuppertal, Germany, 1993. |