Electronic component

Abstract

An electronic component includes a substrate, and a capacitor unit on the substrate. The capacitor unit has a laminate structure including a first electrode layer provided on the substrate, a second electrode layer opposed to the first electrode layer, and a dielectric layer disposed between the first and the second electrode layers. The first electrode layer has a multilayer structure including an adhesion metal layer joined to the dielectric layer. The adhesion metal layer is provided with an oxide coating on a side of the dielectric layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing an integrated electronic component according to the present invention;

FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1;

FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 1;

FIG. 4 is a circuit diagram of the integrated electronic component shown in FIG. 1;

FIG. 5 is a schematic diagram showing a laminate structure of a capacitor unit of the integrated electronic component shown in FIG. 1;

FIGS. 6( a) to 6(d) are cross-sectional views showing a manufacturing method of the integrated electronic component shown in FIG. 1;

FIGS. 7( a) to 7(c) are cross-sectional views showing the manufacturing method subsequent to FIG. 6(d); and

FIGS. 8( a) to 8(c) are cross-sectional views showing the manufacturing method subsequent to FIG. 7(c).

Claims

1. An electronic component comprising: a substrate; anda capacitor unit having a laminate structure including a first electrode layer provided on the substrate, a second electrode layer opposed to the first electrode layer, and a dielectric layer disposed between the first and the second electrode layers;wherein the first electrode layer has a multilayer structure including an adhesion metal layer joined to the dielectric layer, the adhesion metal layer being provided with an oxide coating on a side of the dielectric layer.

2. The electronic component according to claim 1, wherein the adhesion metal layer contains a metal selected from a group consisting of Ti, Cr, and Ta.

3. An electronic component comprising: a substrate; anda capacitor unit having a laminate structure including a first electrode layer provided on the substrate, a second electrode layer opposed to the first electrode layer, and a dielectric layer disposed between the first and the second electrode layers;wherein the first electrode layer has a multilayer structure including an adhesion metal layer that contains a metal selected from a group consisting of Ti, Cr, and Ta, and that is joined to the dielectric layer.

4. The electronic component according to claim 2, wherein the first electrode layer includes an adhesion layer that contains the metal contained in the adhesion metal layer, and that is joined to the substrate.

5. The electronic component according to claim 1, wherein the first electrode layer includes a main conductive layer containing a metal selected from a group consisting of Cu, Au, Ag, and Al.

6. The electronic component according to claim 1, further comprising an interconnect layer provided on the substrate, wherein the interconnect layer has a multilayer structure same as the multilayer structure of the first electrode layer with the adhesion metal layer removed.

7. The electronic component according to claim 6, wherein the interconnect layer is continuous with a portion of the first electrode layer other than the adhesion metal layer.

8. The electronic component according to claim 6, further comprising a passive component provided on the substrate, wherein the interconnect layer constitutes at least part of an electrical path between the passive component and the capacitor unit.

9. The electronic component according to claim 6, further comprising an electrode pad provided on the substrate, wherein the interconnect layer constitutes at least part of an electrical path between the electrode pad and the capacitor unit.

10. The electronic component according to claim 3, wherein the first electrode layer includes an adhesion layer that contains the metal contained in the adhesion metal layer, and that is joined to the substrate.

11. The electronic component according to claim 2, wherein the first electrode layer includes a main conductive layer containing a metal selected from a group consisting of Cu, Au, Ag, and Al.

12. The electronic component according to claim 3, wherein the first electrode layer includes a main conductive layer containing a metal selected from a group consisting of Cu, Au, Ag, and Al.

13. The electronic component according to claim 2, further comprising an interconnect layer provided on the substrate, wherein the interconnect layer has a multilayer structure same as the multilayer structure of the first electrode layer with the adhesion metal layer removed.

14. The electronic component according to claim 3, further comprising an interconnect layer provided on the substrate, wherein the interconnect layer has a multilayer structure same as the multilayer structure of the first electrode layer with the adhesion metal layer removed.

15. The electronic component according to claim 13, wherein the interconnect layer is continuous with a portion of the first electrode layer other than the adhesion metal layer.

16. The electronic component according to claim 14, wherein the interconnect layer is continuous with a portion of the first electrode layer other than the adhesion metal layer.

17. The electronic component according to claim 13, further comprising a passive component provided on the substrate, wherein the interconnect layer constitutes at least part of an electrical path between the passive component and the capacitor unit.

18. The electronic component according to claim 14, further comprising a passive component provided on the substrate, wherein the interconnect layer constitutes at least part of an electrical path between the passive component and the capacitor unit.

19. The electronic component according to claim 13, further comprising an electrode pad provided on the substrate, wherein the interconnect layer constitutes at least part of an electrical path between the electrode pad and the capacitor unit.

20. The electronic component according to claim 14, further comprising an electrode pad provided on the substrate, wherein the interconnect layer constitutes at least part of an electrical path between the electrode pad and the capacitor unit.