Number | Name | Date | Kind |
---|---|---|---|
4184188 | Briglia | Jan 1980 | |
4399016 | Tsukada et al. | Aug 1983 | |
4565601 | Kakehi et al. | Jan 1986 | |
4645218 | Ooshio et al. | Feb 1987 | |
4859304 | Cathey et al. | Aug 1989 | |
5055964 | Logan et al. | Oct 1991 | |
5115858 | Fitch et al. | May 1992 | |
5155652 | Logan et al. | Oct 1992 |
Number | Date | Country |
---|---|---|
1146328 | Jun 1989 | JPX |
1200625 | Aug 1989 | JPX |
33250 | Jan 1991 | JPX |
33251 | Jan 1991 | JPX |
Entry |
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G. Fortuno et al., "Electrostatic Wafer Holder for Wafer Cooling During Reactive Ion Etching", IBM Tech. Discl. Bulletin, vol. 31, No. 1, Jun. 1988, pp. 462-464. |