Number | Name | Date | Kind |
---|---|---|---|
4184188 | Briglia | Jan 1980 | |
4383918 | Abe | May 1983 | |
4502094 | Lewin et al. | Feb 1985 | |
4520421 | Sakitani et al. | May 1985 | |
4554611 | Lewin | Nov 1985 | |
4645218 | Oshio et al. | Feb 1987 | |
4665463 | Ward et al. | May 1987 | |
4692836 | Suzuki | Sep 1987 | |
4724510 | Wicker et al. | Feb 1988 | |
4733632 | Ohmi et al. | Mar 1988 |
Entry |
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H. Bohlen, et al. "Workpiece Holder", Technical Disclosure Bulletin, vol. 20, No. 1 (Jun. 1977). |
G. Wardley, "Electrostatic Wafer Chuck for Electron Beam Microfabrication", Rev. Sci. Instrum., vol. 44, No. 10 (Oct. 1973). |
G. Fortuno et al. "Electrostatic Wafer Holder for Wafer Cooling During Reactive Ion Etching", IBM Technical Disclosure Bulletin, vol., 31, No. 1 (Jun. 1988). |