Number | Name | Date | Kind |
---|---|---|---|
4493745 | Chen et al. | Jan 1985 | |
4602981 | Chen et al. | Jul 1986 | |
4611919 | Brooks | Sep 1986 | |
4846920 | Keller | Jul 1989 | |
5014217 | Savage | May 1991 | |
5097430 | Birang | Mar 1992 | |
5160402 | Cheng | Nov 1992 |
Number | Date | Country |
---|---|---|
128124 | Jun 1987 | JPX |
287927 | Nov 1989 | JPX |
296325 | Dec 1990 | JPX |
Entry |
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Khourky, "Real-Time Etch Plasma Monitor System", IBM Technical Disclosure Bulletin, vol. 25, No. 11A Apr. 1983. |
"Partial Least-Squares Regression: A Tutorial" by Paul Geladi and Bruce R. Kowalski, 1986 Elsevier Science Publishers B.V. |
Rawlings, John O., "Applied Regression Analysis", Wadsworth & Brooks/Cole 1988. |