Claims
- 1. An energy dispersive X-ray analyzer including means for emitting electron beams, a condenser lens for condensing the electron beams, a magnetic field type objective lens, and an energy dispersive X-ray spectrometer, the X-rays which have been emitted from a sample arranged in a leakage magnetic field of said magnetic field type objective lens by irradiation of electrons being detected by said energy dispersive X-ray detector,
- wherein a collimator which is made of a non-magnetic material and an inner wall of which has an irregular structure is provided between said energy dispersive X-ray spectrometer and the sample.
- 2. An energy dispersive X-ray analyzer according to claim 1, wherein at least part of said collimator is located in the leakage magnetic field of said magnetic field type objective lens.
- 3. An energy dispersive X-ray analyzer according to claim 1, wherein said collimator is made of a material from which only a smaller number of secondary electrons are emitted by the irradiation of the electrons.
- 4. An energy dispersive X-ray analyzer according to claim 1, wherein said collimator is sharpened towards the sample.
- 5. An energy dispersive X-ray analyzer according to claim 1, wherein said collimator is made of a material having a small transmission factor for X-rays.
- 6. An energy dispersive X-ray analyzer including means for emitting electron beams, a condenser lens for condensing the electron beams, a magnetic field type objective lens, and an energy dispersive X-ray spectrometer, the X-rays which have been emitted from a sample arranged in a leakage magnetic field of said magnetic field type objective lens by irradiation of electrons being detected by said energy dispersive X-ray spectrometer,
- wherein a collimator which is made of a non-magnetic material and has an opening portion, which is smaller than an opening portion provided on the side of said energy dispersive X-ray spectrometer, and having an inner wall with an irregular structure, is provided between said energy dispersive X-ray spectrometer and the sample.
- 7. An energy dispersive X-ray analyzer including an electron source, a condenser lens for condensing electron beams emitted from said electron source, an objective lens and a detector for detecting X-rays emitted by an irradiation of a sample with said electron beams which have gone through said objective lens,
- wherein a collimator is situated between said detector and said sample, and said collimator has at least two materials selected respectively from a non-magnetic material and a material which suppresses transmission of X-rays, and an inner wall of said collimator has a non-magnetic material and is formed in an irregular structure.
- 8. An energy dispersive X-ray analyzer according to claim 7, wherein at least a part of said collimator situated between said detector and said sample is arranged within a leakage magnetic field of said objective lens.
- 9. An energy dispersive X-ray analyzer according to claim 7, wherein said collimator is sharpened toward the sample.
- 10. An energy dispersive X-ray analyzer according to claim 7, wherein said material which suppresses transmission of X-rays is tantalum (Ta), tungsten (W), gold (Au), platinum (Pt), or lead (Pb).
- 11. An energy dispersive X-ray analyzer including an electron source, a condenser lens for condensing electron beams emitted form said electron source, an objective lens and a detector for detecting X-rays emitted by an irradiation of said a sample with electron beams which have gone through said objective lens,
- wherein a collimator is situated between said detector and said sample, and said collimator has at least two materials selected respectively from a non-magnetic material and a material which has a transmission factor for X-rays lower than that of said non-magnetic material, and an inner wall of said collimator has a material which has a transmission factor for X-rays lower than that of said non-magnetic material and is formed in an irregular structure.
Priority Claims (1)
Number |
Date |
Country |
Kind |
6-291506 |
Nov 1994 |
JPX |
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Parent Case Info
This application is a continuation-in-part of application Ser. No. 08/560,162 filed Nov. 20, 1995, now abandoned.
US Referenced Citations (10)
Foreign Referenced Citations (1)
Number |
Date |
Country |
0 966 717 |
Aug 1964 |
GBX |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
560162 |
Nov 1995 |
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