Number | Date | Country | Kind |
---|---|---|---|
2-219254 | Aug 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4548688 | Matthews | Oct 1985 | |
4808501 | Chiulli | Feb 1989 | |
4837098 | Shimamura | Jun 1989 | |
5096802 | Hu | Mar 1992 |
Number | Date | Country |
---|---|---|
59-96729 | Jun 1984 | JPX |
1-125824 | May 1989 | JPX |
Entry |
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K. Yamashita et al., "Heterodyne Holographic Nanometer Alignment For a Half-Micron Wafer Stepper", Reprinted from Optical/Laser Microlithography III, SPIE, vol. 1264, pp. 219-226 (1990). |