Patent Application
20230164899
The present invention relates to extreme ultraviolet light source apparatuses.
Recently, due to increasing miniaturization and integration of semiconductor integrated circuits, shortening of a wavelength of an exposure light source has been promoted. As a next-generation light source for exposing semiconductors, an extreme ultraviolet light source apparatus (hereinafter also referred to as an “EUV light source apparatus”) that emits extreme ultraviolet light (hereinafter also referred to as “EUV (extreme ultraviolet) light”) having a wavelength of 13.5 nm has been developed.
There are several known methods for generating EUV light (EUV radiation) in an EUV light source apparatus. One method is to generate a high-temperature plasma by heating and exciting an extreme ultraviolet light radiation subject (hereinafter, also referred to as “EUV radiation subject”), and to generate EUV light emitted from the high-temperature plasma.
EUV light source apparatuses that employ such a method are classified into an LPP (Laser Produced Plasma) method and a DPP (Discharge Produced Plasma) method, depending on the generation scheme.
An EUV light source apparatus of the DPP type applies a high voltage to a gap between electrodes in which a discharge gas containing EUV radiation subject (plasma raw material in a gas phase) is supplied, to generate a high-density and high-temperature plasma by discharge, and utilizes extreme ultraviolet light radiated therefrom. As a specific DPP method as disclosed, for example, in JP-A-2017-103120, a method is proposed in which a liquid high-temperature plasma raw material (for example, Sn (tin)) is supplied to surfaces of electrodes that generate a discharge, an energy beam such as a laser beam is directed to the raw material to vaporize the raw material, and a high-temperature plasma is generated by the discharge. Such an approach may be referred to as LDP (Laser Assisted Discharge Plasma).
In the technology disclosed in JP-A-2017-103120, a pair of disk-shaped rotating electrodes are used to reduce a thermal load on the electrodes. The electrodes are arranged so that their peripheral edges are close to each other. Pulsed power for discharge is applied to the rotating electrodes at a fixed period (e.g., 4 kHz or higher), so that a plasma that emits extreme ultraviolet light is generated at the fixed period.
To generate plasma in an energy efficient manner (i.e., to reduce loss of energy needed for plasma generation), it is desirable to make the rise of the discharge current between both the rotating electrodes faster.
Accordingly, it is an object of the present invention to provide an extreme ultraviolet light source apparatus that can enable faster rising of discharge current.
In accordance with the present invention, there is provided an extreme ultraviolet light source apparatus, including a disk-shaped cathode; a first rotational shaft made of a metal to which the cathode is connected; a disc-shaped anode disposed apart from the cathode; a second rotational shaft made of a metal to which the anode is connected; a first tin supplier configured to coat the cathode with liquid-phase tin; a second tin supplier configured to coat the anode with liquid-phase tin; an energy beam irradiation device configured to irradiate the tin on the cathode with an energy beam to vaporize the tin and generate gas-phase tin in a gap between the cathode and the anode; an electric power supply configured to supply electric power to the cathode and anode to cause a discharge between the cathode and anode for generating a plasma in the gap between the cathode and anode, the plasma emitting extreme ultraviolet light; a first support structure made of a metal supporting the cathode; and a second support structure made of a metal supporting the anode. The first support structure and the second support structure are not in contact with each other. The first support structure has a first support wall portion and a first tubular portion protruding from the first support wall portion and surrounding the first rotational shaft, and the first tubular portion is disposed between the first support wall portion and the cathode. The second support structure has a second support wall portion and a second tubular portion protruding from the second support wall portion and surrounding the second rotational shaft, and the second tubular portion is disposed between the second support wall portion and the anode. The first support wall portion and the second support wall portion overlap each other. The first support wall portion has a through-hole through which the second tubular portion is inserted, or the second support wall portion has a through-hole through which the first tubular portion is inserted.
In this aspect, the rise of the discharge current that flows between the cathode and anode can be made faster. This reduces loss of the energy needed for plasma generation and increases the luminance of the extreme ultraviolet light generated. The reason for faster occurrence of the rise of the discharge current is not certain, but can be estimated as follows: The first and second support structures made of metal that respectively support the cathode and the anode constitute a discharge circuit that causes a discharge between the cathode and the anode. In this aspect, the first support wall portion of the first support structure and the second support wall portion of the second support structure overlap each other, and a tubular portion of a support structure is inserted into a through-hole in the support wall portion of the other support structure. This allows the first and second support structures made of metal, in particular the first and second support wall portions to be disposed extremely close to each other. In this way, two objects in which current flows in opposite directions are placed very close to each other, so that the magnetomotive forces of the first support structure and the second support structure cancel each other out. Accordingly, it is estimated that the inductance of the entire discharge circuit can be reduced and that the rise of the discharge current can be made faster.
Preferably, the first support structure has outer wall portions protruding from the first support wall portion and facing outer surfaces of the second support wall portion.
In this case, the magnetomotive forces of the first and second support structures further cancel each other out since adjacent portions of the first and second support structures are increased.
Preferably, the second support structure has outer wall portions protruding from the second support wall portion and facing outer surfaces of the first support wall portion.
In this case, the magnetomotive forces of the first and second support structures further cancel each other out since adjacent portions of the first and second support structures are increased.
Preferably, insulators are disposed between the first support structure and the second support structure.
In this case, the first and second support structures are insulated from each other and the spacing therebetween is properly maintained.
Preferably, the extreme ultraviolet light source apparatus further includes a support base member made of a metal for supporting the first support structure and the second support structure, and at least one of a gap between the support base member and the first support structure and a gap between the support base member and the second support structure is closed with a capacitor.
In this case, the capacitor is arranged around the discharge circuit, the inductance of the entire discharge circuit can be further reduced.
In accordance with an aspect of the present invention, the rise of discharge current can be made faster.
Hereinafter, with reference to the accompanying drawings, various embodiments according to the present invention will be described. It is of note that the drawings are not necessarily to scale, and certain features may be exaggerated or omitted.
An extreme ultraviolet light source apparatus (EUV light source apparatus) 1 is an apparatus that is configured to emit extreme ultraviolet light (EUV light) having a wavelength of, for example, 13.5 nm, and that can be used as a light source apparatus of a lithography apparatus for manufacturing semiconductor devices or as a light source apparatus for an apparatus for inspecting masks used for lithography.
The EUV light source apparatus 1 according to the embodiment is an EUV light source apparatus of the DPP type. More specifically, the EUV light source apparatus uses an energy beam such as a laser beam to irradiate a plasma raw material in a liquid phase applied to the surfaces of the pair of electrodes to vaporize the plasma raw material, and an electric power source to supply electric power to the electrodes to cause a discharge and generate a high-temperature plasma between the electrodes. EUV light is emitted from the plasma.
As shown in
The discharge electrodes 21a and 21b are disposed at positions spaced apart from each other, but the peripheral portions of the discharge electrodes 21a and 21b are close to each other. At a position in which the peripheral portion of the cathode 21a and the peripheral portion of the anode 21b are closest, a discharge occurs in the gap between the cathode 21a and the anode 21b, and a high-temperature plasma is generated. Hereinafter, the gap between the cathode 21a and the anode 21b at the position in which the peripheral portion of the cathode 21a and the peripheral portion of the anode 21b are closest is referred to as a “discharge region D”.
The cathode 21a is connected to the rotational shaft (first rotational shaft) 23a of the motor 22a and rotates about the axis of the cathode 21a. The anode 21b is connected to the rotational shaft (second rotational shaft) 23b of the motor 22b and rotates about the axis of the anode 21b. Thus, the discharge electrodes 21a and 21b are respectively driven by separate motors 22a and 22b. The rotational shafts 23a and 23b of the motors 22a and 22b are made of metal.
The rotation of each of the motors 22a and 22b is controlled by a controller 15.
The EUV light source apparatus 1 includes a tin reservoir 26a for storing liquid-phase tin 25a, which is a plasma raw material, and a tin reservoir 26b for storing liquid-phase tin 25b. Heated liquid-phase tin 25a and 25b is supplied to the tin reservoirs 26a, 26b.
A lower part of the cathode 21a is immersed in tin 25 in the tin reservoir 26a, and a lower part of anode 21b is immersed in tin 25b in the tin reservoir 26b. As a result, liquid-phase tin (Sn), which is the plasma raw material, adheres to the discharge electrodes 21a and 21b. As the discharge electrodes 21a and 21b rotate, the liquid-phase tin 25a and 25b is transported to the discharge region D at which the high-temperature plasma is to be generated.
Accordingly, the tin reservoir 26a alone or the combination of the tin reservoir 26a and the motor 22a serves as a first tin supplier for coating the cathode 21a with the plasma raw material in a liquid phase. Similarly, the tin reservoir 26b alone or the combination of the tin reservoir 26b and the motor 22b serves as a second tin supplier for coating the anode 21b with the plasma raw material in a liquid phase. However, the material supplier is not limited to the type of this embodiment, and may be of other types.
The EUV light source apparatus 1 includes a laser (energy beam irradiation device) 28 that irradiates tin 25a coated on the cathode 21a with an energy beam to vaporize tin 25a. The laser 28 is, for example, Nd:YVO4 laser (Neodymium-doped Yttrium Orthovanadate laser), and emits an infrared laser beam L. However, the energy beam irradiation device may be another device that emits a beam other than a laser beam capable of vaporizing tin 25a.
Illumination timing of the laser beam by the laser 28 is controlled by the controller 15.
The infrared laser beam L emitted from the laser 28 is directed to a movable mirror 31. Between the laser 28 and the movable mirror 31, typically a light-collecting means is disposed. The light-collecting means includes, for example, a condensing lens 29.
The infrared laser beam L is reflected by the movable mirror 31 and illuminates the outer peripheral surface of the cathode 21a in the vicinity of the discharge region D.
The infrared laser beam L reflected by the movable mirror 31 travels from the side of the anode 21b toward the cathode 21a, passes near the outer peripheral surface of the anode 21b, and then reaches the outer peripheral surface of the cathode 21a. The anode 21b is retracted behind the cathode 21a toward the upper side of
The liquid phase tin 25a on the outer peripheral surface of the cathode 21a in the vicinity of the discharge region D is vaporized by irradiation with the infrared laser beam L, and a gas-phase plasma raw material is generated in the discharge region D.
To generate a high-temperature plasma in the discharge region D (to transform the plasma raw material in a gas phase to a plasma), a pulse power supply (electric power supply) 35 supplies electric power to the cathode 21a and the anode 21b, to cause a discharge between the cathode 21a and the anode 21b. The pulse power supply 35 periodically supplies pulsed electric power to the discharge electrodes 21a and 21b.
In this embodiment, the two electric supply lines extending from the pulse power supply 35 are connected to the tin reservoirs 26a and 26b, respectively. The tin reservoirs 26a and 26b are made of an electric conductive material, and tin 25a and 25b inside the tin reservoirs 26a and 26b is an electric conductive material, i.e., tin. The discharge electrodes 21a and 21b are immersed in tin 25a and 25b inside the tin reservoirs 26a and 26b. Thus, when the pulse power supply 35 supplies pulsed electric power to the tin reservoirs 26a and 26b, the pulsed electric power is consequently supplied to the discharge electrodes 21a and 21b.
When discharge occurs between the cathode 21a and the anode 21b, the plasma raw material in a gas phase in the discharge region D is heated and excited by a large current, so that a high-temperature plasma is generated. In addition, due to the high heat generated, tin 25b on the outer peripheral surface of the anode 21b in the vicinity of the discharge region D is also converted into plasma.
EUV light E is emitted from the high temperature plasma. EUV light E is used in other optical apparatus (a lithography apparatus or an inspection apparatus for masks).
The pulse power supply 35 applies pulsed power to the discharge electrodes 21a and 21b at a fixed period (e.g., 4 kHz or higher), so that a plasma that emits the EUV light E is generated at the fixed period.
Next, support structures that support the discharge electrodes 21a and 21b and the rotational shafts 23a and 23b will be described in detail.
The EUV light source apparatus 1 has a first support structure 40 made of a metal that supports the cathode 21a and a second support structure 50 made of a metal that supports the anode 21b. The first support structure 40 and the second support structure 50 are not in contact with each other and are insulated by a plurality of insulators 60, which are interposed therebetween.
As shown in
In this embodiment, the first support wall portion 41 is a rectangular flat plate. However, the contour of the first support wall portion 41 does not need to be rectangular. In this embodiment, the first tubular portion 42 has the shape of a hollow square pipe. However, the first tubular portion 42 may have a shape of a cylinder or other tubular shape. In this embodiment, the first tubular portion 42 completely surrounds the rotational shaft 23a, but the first tubular portion 42 may have a hole or notch formed therein.
At the end of the first tubular portion 42 opposite to the first support wall portion 41, an end wall 43 is provided on which a bearing B1 is mounted. The bearing B1 supports the rotational shaft 23a to which the cathode 21a is fixed. Although not shown, sealing members are provided around the bearing B1 to keep the discharge region D in vacuum. The end wall 43 is also used as a wall of the tin reservoir 26a.
As shown in
In this embodiment, the second support wall portion 51 is a rectangular flat plate. However, the contour of the second support wall portion 51 does not need to be rectangular. In this embodiment, the second tubular portion 52 has the shape of a hollow square pipe. However, the second tubular portion 52 may have a shape of a cylinder or other tubular shape. In this embodiment, the second tubular portion 52 completely surrounds the rotational shaft 23b, but the second tubular portion 52 may have a hole or notch formed therein.
At the end of the second tubular portion 52 opposite to the second support wall portion 51, an end wall 53 is provided on which a bearing B3 is mounted. The bearing B3 supports the rotational shaft 23b to which the anode 21b is fixed. Although not shown, sealing members are provided around the bearing B3 to keep the discharge region D in vacuum. The end wall 53 is also used as a wall of the tin reservoir 26b.
The first support wall portion 41 and the second support wall portion 51 overlap each other. In this embodiment, the second support wall portion 51 is positioned closer to the discharge electrodes 21a and 21b than the first support wall portion 41, and a through-hole 55 is formed in the second support wall portion 51 through which the first tubular portion 42 is inserted. In this embodiment, the first tubular portion 42 and the second tubular portion 52 are arranged approximately parallel to each other, and the rotational shafts 23a and 23b are also arranged approximately parallel to each other.
The rotational shaft 23a of the motor 22a fixed to the cathode 21a is supported by the bearing B1 located in the end wall 43 of the first tubular portion 42 of the first support structure 40 and another bearing B2 located in the first support wall portion 41 of the first support structure 40.
The rotational shaft 23b of the motor 22b fixed to the anode 21b is supported by the bearing B3 located in the end wall 53 of the second tubular portion 52 of the second support structure 50 and another bearing B4 located in the first support wall portion 41 of the first support structure 40. The second support wall portion 51 of the second support structure 50 has a through-hole 56 through which the rotational shaft 23b passes. Instead of or in addition to the bearing B4 disposed in the first support wall portion 41, another bearing may be disposed in the through-hole 56 for supporting the rotational shaft 23b.
In this embodiment, the second support structure 50 has two outer wall portions 57 that protrude from the second support wall portion 51 and face outer surfaces of the first support wall portion 41. The two outer wall portions 57 are disposed on two sides of the second support wall portion 51 and face the two side surfaces of the first support wall portion 41. However, the outer wall portions 57 may be disposed on the top and bottom of the second support wall portion 51 and may face the top and bottom surfaces of the first support wall portion 41. The outer wall portions 57 may surround the first support wall portion 41 all around.
The EUV light source apparatus 1 further has a support base member 65 made of a metal for supporting the first support structure 40 and the second support structure 50. A gap between the support base member 65 and the first support structure 40 and a gap between the support base member 65 and the second support structure 50 are closed with capacitors 66.
The support base member 65 is part of the chamber (housing) of the EUV light source apparatus 1. The chamber is formed of a rigid material such as a metal. The discharge electrodes 21a and 21b, the tin reservoirs 26a and 26b, and the tubular portions 42 and 52 are located within the chamber. The interior of the chamber 11 is evacuated to reduce the attenuation of the EUV light E. As described above, sealing members (not shown) are provided around the bearings B1 and B3 to maintain the discharge region D in vacuum.
The inventors conducted an experiment to investigate the rise of discharge current in the EUV light source apparatus 1 according to the embodiment.
As is clear from
The reason for faster occurrence of the rise of the discharge current by the embodiment is not certain, but can be estimated as follows: The first and second support structures 40 and 50 made of metal that respectively support the cathode 21a and the anode 21b constitute a discharge circuit that causes a discharge between the cathode 21a and the anode 21b. The rotational shafts 23a and 23b, to which the discharge electrodes 21a and 21b are connected, and the bearings B1 to B4, which are in contact with the rotational shafts 23a and 23b, are also made of metal and constitute the discharge circuit.
The first support wall portion 41 of the first support structure 40 and the second support wall portion 51 of the second support structure 50 overlap each other, and the first tubular portion 42 of the first support structure 40 is inserted into the through-hole 55 of the second support wall portion 51 of the second support structure 50. This allows that the first support structure 40 and the second support structure 50 made of metal, in particular the first support wall portion 41 and the second support wall portion 51 to be disposed extremely close to each other. In this way, two objects in which current flows in opposite directions are placed very close to each other, so that the magnetomotive forces of the first support structure 40 and the second support structure 50 cancel each other out. Accordingly, it is estimated that the inductance of the entire discharge circuit can be reduced and that the rise of the discharge current can be made faster.
In addition, in this embodiment, the second support structure 50 has outer wall portions 57 that protrude from the second support wall portion 51 and that face outer surfaces of the first support wall portion 41. Thus, adjacent portions of the first support structure 40 and the second support structure 50 are increased, so that the magnetomotive forces of the first support structure 40 and the second support structure 50 further cancel each other out, and the inductance of the entire discharge circuit is further reduced.
In this embodiment, the insulators 60 are interposed between the first support structure 40 and the second support structure 50. Thus, the first support structure 40 and the second support structure 50 are insulated from each other and the spacing therebetween is properly maintained.
In addition, in this embodiment, the first support structure 40 and the second support structure 50 are supported by the metal support base member 65, and a gap between the support base member 65 and the first support structure 40 and a gap between the support base member 65 and the second support structure 50 are closed with capacitors 66. In this way, since the capacitors 66 are arranged around the discharge circuit, the inductance of the entire discharge circuit can be further reduced.
In this embodiment, again, the first support wall portion 41 of the first support structure 40 and the second support structure 50 overlap each other, and the second tubular portion 52 of the second support structure 50 is inserted into the through-hole 45 of the first support wall portion 41 of the first support structure 40. This allows the first support structure 40 and the second support structure 50 made of metal, in particular the first support wall portion 41 and the second support wall portion 51 to be disposed extremely close to each other. It is estimated that in this way, two objects in which current flows in opposite directions are placed very close to each other, so that the magnetomotive forces of the first support structure 40 and the second support structure 50 cancel each other out.
In addition, in this embodiment, the second support structure 50 has outer wall portions 57 that protrude from the second support wall portion 51 and that face outer surfaces of the first support wall portion 41. Thus, adjacent portions of the first support structure 40 and the second support structure 50 are increased, so that the magnetomotive forces of the first support structure 40 and the second support structure 50 further cancel each other out, and the inductance of the entire discharge circuit is further reduced.
In this embodiment, the rotational shaft 23a of the motor 22a fixed to the cathode 21a is supported by the bearing B1 located in the end wall 43 of the first tubular portion 42 of the first support structure 40 and another bearing B2 located in the second support wall portion 51 of the second support structure 50. The first support wall portion 41 of the first support structure 40 has a through-hole 46 through which the rotational shaft 23a passes. Instead of or in addition to the bearing B2 disposed in the second support wall portion 51, another bearing may be disposed in the through-hole 46 for supporting the rotational shaft 23a.
The rotational shaft 23b of the motor 22b fixed to the anode 21b is supported by the bearing B3 located in the end wall 53 of the second tubular portion 52 of the second support structure 50 and another bearing B4 located in the second support wall portion 51 of the second support structure 50.
The present invention has been shown and described with reference to preferred embodiments thereof. However, it will be understood by those skilled in the art that various changes in form and detail may be made without departing from the scope of the invention as defined by the claims. Such variations, alterations, and modifications are intended to be surrounded in the scope of the present invention.
For example, the above embodiments may be combined as long as they are not contradictory.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2020-086261 | May 2020 | JP | national |
This application is a U.S. National Phase Application under 35 U.S.C. 371 of International Application No. PCT/JP2021/009330, filed on Mar. 9, 2021, which claims priority to Japanese Patent Application No. 2020-086261, filed on May 15, 2020. The entire disclosures of the above applications are expressly incorporated by reference herein.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2021/009330 | 3/9/2021 | WO |
